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    • 41. 发明申请
    • Memory Device
    • 存储设备
    • US20110154663A1
    • 2011-06-30
    • US13041955
    • 2011-03-07
    • David SargentJon Maimon
    • David SargentJon Maimon
    • H05K3/10
    • H01L45/06G11C13/0004H01L45/1233H01L45/1293H01L45/142H01L45/143H01L45/144H01L45/148Y10T29/49155
    • A memory or switching device includes a mesa and a first electrode conforming to said mesa. The device also includes a second electrode and a phase-change or switching material disposed between said first and second electrodes. The phase-change or switching material is in electrical communication with the first and second electrodes at a first contact region and a second contact region respectively. Also described is a method for making a memory or switching device. The method includes providing a first insulator and configuring the first insulator to provide a mesa. A first conductive layer is provided conforming to the mesa. A phase-change or switching material is provided over a portion of the first conductive layer, and a second conductive layer is provided over the phase-change or switching material.
    • 存储器或开关器件包括台面和符合所述台面的第一电极。 该装置还包括设置在所述第一和第二电极之间的第二电极和相变或开关材料。 相变或开关材料分别在第一接触区域和第二接触区域处与第一和第二电极电连通。 还描述了一种用于制造存储器或开关装置的方法。 该方法包括提供第一绝缘体并配置第一绝缘体以提供台面。 提供符合台面的第一导电层。 相变或开关材料设置在第一导电层的一部分上,并且第二导电层设置在相变或开关材料上。
    • 42. 发明授权
    • Method for forming self-aligned thermal isolation cell for a variable resistance memory array
    • 用于形成用于可变电阻存储器阵列的自对准热隔离单元的方法
    • US07923285B2
    • 2011-04-12
    • US12351692
    • 2009-01-09
    • Erh-Kun LaiChiaHua HoKuang Yeu Hsieh
    • Erh-Kun LaiChiaHua HoKuang Yeu Hsieh
    • H01L21/00
    • H01L45/06H01L45/1233H01L45/1293H01L45/144H01L45/1683
    • A non-volatile memory with a self-aligned RRAM element includes a lower electrode element, generally planar in form, having an inner contact surface; an upper electrode element, spaced from the lower electrode element; a containment structure extends between the upper electrode element and the lower electrode element, with a sidewall spacer element having a generally funnel-shaped central cavity with a central aperture; and a spandrel element positioned between the sidewall spacer element and the lower electrode. A RRAM element extends between the lower electrode element and the upper electrode, occupying at least a portion of the sidewall spacer element central cavity and projecting from the sidewall spacer terminal edge toward and making contact with the lower electrode. In this manner, the spandrel element inner surface is spaced from the RRAM element to define a thermal isolation cell adjacent the RRAM element.
    • 具有自对准RRAM元件的非易失性存储器包括具有内接触表面的大体平面形状的下电极元件; 与所述下电极元件间隔开的上电极元件; 容纳结构在上电极元件和下电极元件之间延伸,侧壁间隔元件具有大致漏斗形的具有中心孔的中心腔; 以及位于侧壁间隔元件和下电极之间的突出元件。 RRAM元件在下电极元件和上电极之间延伸,占据侧壁间隔件元件中心腔的至少一部分并且从侧壁间隔件端子边缘朝向和与下电极接触。 以这种方式,伞形元件内表面与RRAM元件间隔开以限定与RRAM元件相邻的热隔离单元。
    • 46. 发明申请
    • THIN FILM FUSE PHASE CHANGE CELL WITH THERMAL ISOLATION PAD AND MANUFACTURING METHOD
    • 薄膜保险丝相变电池与热隔离垫片及制造方法
    • US20100068878A1
    • 2010-03-18
    • US12622350
    • 2009-11-19
    • Hsiang-Lan Lung
    • Hsiang-Lan Lung
    • H01L21/28
    • H01L45/144G11C13/0004H01L27/2436H01L45/06H01L45/1226H01L45/1293H01L45/148H01L45/1625H01L45/1641H01L45/1675
    • A memory device comprising a first electrode having a top side, a second electrode having a top side and an insulating member between the first electrode and the second electrode. The insulating member has a thickness between the first and second electrodes near the top side of the first electrode and the top side of the second electrode extends outwardly from the top sides of the first and second electrodes defining a wall of insulating material having top side. A bridge of memory material crosses the insulating member over the top of the wall, and defines an inter-electrode path between the first and second electrodes across the insulating member. An array of such memory cells is provided. The bridge comprises an active layer of memory material on the top side of the wall, having at least two solid phases and a layer of thermal insulating material overlying the memory material having thermal conductivity less than a thermal conductivity of the first and second electrodes.
    • 一种存储器件,包括具有顶侧的第一电极,具有顶侧的第二电极和位于第一电极和第二电极之间的绝缘构件。 绝缘构件具有在第一电极的顶侧附近的第一和第二电极之间的厚度,并且第二电极的顶侧从第一和第二电极的顶侧向外延伸,限定具有顶侧的绝缘材料的壁。 记忆材料桥跨越顶部的绝缘构件,并且在绝缘构件之间限定第一和第二电极之间的电极间路径。 提供这样的存储单元阵列。 该桥包括在壁的顶侧上的存储材料的有源层,具有至少两个固相和覆盖存储材料的绝热材料层,其具有小于第一和第二电极的热导率的导热性。
    • 50. 发明申请
    • Programmable Via Devices with Air Gap Isolation
    • 具有空气间隙隔离的可编程通孔器件
    • US20090305460A1
    • 2009-12-10
    • US12544964
    • 2009-08-20
    • Kuan-Neng ChenLia Krusin-ElbaumDennis M. NewnsSampath Purushothaman
    • Kuan-Neng ChenLia Krusin-ElbaumDennis M. NewnsSampath Purushothaman
    • H01L21/06
    • H01L45/06H01L28/20H01L45/1206H01L45/122H01L45/1286H01L45/1293H01L45/144H01L45/148H01L45/1683
    • Programmable via devices and methods for the fabrication thereof are provided. In one aspect, a programmable via device is provided. The programmable via device comprises a first dielectric layer; a heater over the first dielectric layer; an air gap separating at least a portion of the heater from the first dielectric layer; an isolation layer over the first dielectric layer covering at least a portion of the heater; a capping layer over a side of the isolation layer opposite the first dielectric layer; at least one programmable via extending through the capping layer and at least a portion of the isolation layer and in contact with the heater, the programmable via comprising at least one phase change material; a conductive cap over the programmable via; a second dielectric layer over a side of the capping layer opposite the isolation layer; a first conductive via and a second conductive via, each extending through the second dielectric layer, the capping layer and at least a portion of the isolation layer and in contact with the heater; and a third conductive via extending through the second dielectric layer and in contact with the conductive cap.
    • 提供可编程的器件及其制造方法。 在一个方面,提供了可编程通路装置。 可编程通孔装置包括第一介电层; 第一介电层上的加热器; 将所述加热器的至少一部分与所述第一介电层分开的气隙; 覆盖所述加热器的至少一部分的所述第一介电层上的隔离层; 在所述隔离层的与所述第一介电层相对的一侧上的覆盖层; 至少一个可编程通道,其延伸穿过所述封盖层和所述隔离层的至少一部分并与所述加热器接触,所述可编程通孔包括至少一个相变材料; 可编程通孔上的导电盖; 在覆盖层的与隔离层相对的一侧上的第二电介质层; 第一导电通孔和第二导电通孔,每个延伸穿过第二介电层,封盖层和至少一部分隔离层并与加热器接触; 以及延伸穿过所述第二介电层并与所述导电盖接触的第三导电通孔。