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    • 47. 发明申请
    • METHOD AND APPARATUS FOR CONVERTING PRECURSOR LAYERS INTO PHOTOVOLTAIC ABSORBERS
    • 将前置层转换成光伏吸收器的方法和装置
    • US20110011340A1
    • 2011-01-20
    • US12843674
    • 2010-07-26
    • Bulent M. Basol
    • Bulent M. Basol
    • H01L31/18
    • C23C16/305C23C16/54H01L31/0322H01L31/03928Y02E10/541
    • The present invention relates to method and apparatus for preparing thin films of semiconductor films for radiation detector and photovoltaic applications. In one aspect, the present invention includes a series of chambers between the inlet and the outlet, with each chamber having a gap that allows a substrate to pass therethrough, and which is temperature controlled, thereby allowing each chamber to maintain a different temperature, and the substrate to be annealed based upon a predetermined temperature profile by efficiently moving through the series of chambers. In another aspect, each of the chambers opens and closes, and creates a seal when in the closed position during which time annealing takes place within the gap of the chamber. In a further aspect, the present invention provides a method of forming a Group IBIIIAVIA compound layer on a surface of a flexible roll.
    • 本发明涉及用于制备用于辐射检测器和光伏应用的半导体膜的薄膜的方法和装置。 在一个方面,本发明包括在入口和出口之间的一系列室,每个室具有允许衬底通过的间隙,并且其被温度控制,从而允许每个室保持不同的温度,并且 基于通过有效地移动通过所述一系列室的预定温度分布来退火的基板。 在另一方面,每个室都打开和关闭,并且当处于关闭位置时产生密封,在该位置期间在室的间隙内进行退火。 另一方面,本发明提供了在柔性卷的表面上形成IBIIIAVIA族化合物层的方法。