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    • 45. 发明授权
    • Method of enhancing the conductive and optical properties of deposited indium tin oxide (ITO) thin films
    • 提高沉积氧化铟锡(ITO)薄膜导电性能和光学性能的方法
    • US08445373B2
    • 2013-05-21
    • US12457006
    • 2009-05-28
    • David M. BroadwayYiwei Lu
    • David M. BroadwayYiwei Lu
    • H01L21/44
    • H01L31/1884B32B17/10036B32B17/10761B32B17/10788H01L31/022466H01L31/022475Y02E10/50
    • Certain example embodiments of this invention relate to a method of activating an indium tin oxide (ITO) thin film deposited, directly or indirectly, on a substrate. The ITO thin film is baked in a low oxygen environment at a temperature of at least 450 degrees C. for at least 10 minutes so as to provide for (1) a post-baked resistivity of the ITO thin film that is below a resistivity of a corresponding air-baked ITO thin film, (2) a post-baked visible spectrum absorption and transmission of the ITO thin film that respectively are below and above the absorption and transmission of the corresponding air-baked ITO thin film, and (3) a post-baked infrared reflectivity of the ITO thin film that is above the reflectivity of the corresponding air-baked ITO thin film. The substrate with the activated ITO thin film may be used in a photovoltaic device, for example.
    • 本发明的某些示例性实施例涉及一种激活在衬底上直接或间接沉积的氧化铟锡(ITO)薄膜的方法。 ITO薄膜在低氧环境中在至少450℃的温度下烘烤至少10分钟,从而提供(1)ITO薄膜的后烘烤电阻率低于 相应的空气焙烧ITO薄膜,(2)ITO薄膜的后烘烤可见光谱吸收和透射分别在相应的空气焙烧ITO薄膜的吸收和透射之下和之上,和(3) ITO薄膜的后烘焙红外反射率高于相应的空气焙烧ITO薄膜的反射率。 具有活化的ITO薄膜的基板例如可以用在光电器件中。
    • 47. 发明授权
    • Solar cell buffer layer having varying composition
    • 具有不同组成的太阳能电池缓冲层
    • US08318530B2
    • 2012-11-27
    • US12843778
    • 2010-07-26
    • Bulent M. BasolMustafa PinarbasiJames Freitag
    • Bulent M. BasolMustafa PinarbasiJames Freitag
    • H01L21/00
    • H01L31/206C23C18/12C23C18/1204C23C18/125H01L31/022475H01L31/022483H01L31/0322H01L31/0749H01L31/1884Y02E10/541Y02P70/521
    • Described is a continuous electroless deposition method and a system to form a solar cell buffer layer with a varying composition through its thickness are provided. The composition of the buffer layer is varied by varying the composition of a chemical bath deposition solution applied onto an absorber surface on which the buffer layer with varying composition is formed. In one example, the buffer layer with varying composition includes a first section containing CdS, a second section containing CdZnS formed on top of the already deposited CdS, and a third section containing ZnS is formed on the second section All the process steps are applied in a roll-to-roll fashion. In another example, a transparent conductive layer including a first transparent conductive film such as aluminum doped zinc oxide and a second transparent conductive film such as indium tin oxide is deposited over the buffer layer with the varying composition.
    • 描述了一种连续的无电沉积方法,并且提供了通过其厚度形成具有不同组成的太阳能电池缓冲层的系统。 通过改变施加到其上形成有不同组成的缓冲层的吸收体表面上的化学浴沉积溶液的组成来改变缓冲层的组成。 在一个实例中,具有不同成分的缓冲层包括含有CdS的第一部分,在已经沉积的CdS的顶部上形成的包含CdZnS的第二部分,在第二部分上形成包含ZnS的第三部分。所有的工艺步骤都应用于 一对一的滚动时尚。 在另一个实例中,包括第一透明导电膜如铝掺杂氧化锌和第二透明导电膜如氧化铟锡的透明导电层沉积在具有不同组成的缓冲层上。