会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 41. 发明授权
    • Fluorescent lamp with heat radiation sheet member
    • 带散热片的荧光灯
    • US5869931A
    • 1999-02-09
    • US927602
    • 1997-09-12
    • Toshiyuki Terada
    • Toshiyuki Terada
    • H01J61/52H01J65/00H01J11/00
    • H01J65/00H01J61/52H01J61/70
    • There is provided an improved fluorescent lamp comprising a tubular glass bulb, an internal electrode provided inside of said tubular glass bulb, a fluorescent layer provided on an inner surface of said tubular glass bulb, an external electrode having an opening portion and provided on an outer surface of said tubular glass bulb, and a heat radiation sheet fitly provided on said tubular glass bulb, in which a temperature rise in the glass bulb caused by heat generated by discharge at the time of lighting is inhibited by the heat radiation function of the heat radiation sheet and a reduction in the illuminance caused thereby can also be inhibited.
    • 提供了一种改进的荧光灯,其包括管状玻璃灯泡,设置在所述管状玻璃灯泡内部的内部电极,设置在所述管状玻璃灯泡的内表面上的荧光层,具有开口部分并设置在外部的外部电极的外部电极 所述管状玻璃灯泡的表面以及适合设置在所述管状玻璃灯泡上的散热片,其中由于在发光时由放电产生的热引起的玻璃灯泡中的温度上升被热量的热辐射功能所禁止 辐射片和由此引起的照度的降低也可以被抑制。
    • 47. 发明申请
    • RADIATION SOURCE, METROLOGY APPARATUS, LITHOGRAPHIC SYSTEM AND DEVICE MANUFACTURING METHOD
    • 辐射源,计量装置,光刻系统和器件制造方法
    • US20160316550A1
    • 2016-10-27
    • US15103721
    • 2014-11-14
    • ASML NETHERLANDS B.V.
    • Martijn Petrus Christianus VAN HEUMEN
    • H05G2/00H01J61/54G03F7/20H01J65/00
    • H05G2/008G01N21/9501G01N21/956G03F7/70191H01J61/35H01J61/54H01J61/545H01J65/00H01J65/04
    • A radiation source apparatus comprising: a container (400) for being pressurized with a gaseous medium in which plasma which emits plasma emitted radiation is generated following excitation of the gaseous medium by a driving radiation (50), wherein said container is operable (66, 67) substantially to remove radiation with a wavelength of 10-400 nm from said plasma emitted radiation before said plasma emitted radiation exits said container as output radiation. In an embodiment the container comprises: an inlet radiation transmitting element (64) operable to transmit said driving radiation from outside said container to inside said container, and an outlet radiation transmitting element (65) operable to transmit at least some of said plasma emitted radiation from inside said container to outside said container as output radiation; wherein at least one of said inlet and outlet radiation transmitting elements comprises a plane parallel plate.
    • 一种辐射源装置,包括:用气体介质加压的容器(400),在所述气体介质中,通过驱动辐射(50)激发气体介质之后,产生发射等离子体发射的辐射的等离子体,其中所述容器可操作(66, 67)基本上在所述等离子体发射的辐射作为输出辐射离开所述容器之前从所述等离子体发射的辐射中去除波长为10-400nm的辐射。 在一个实施例中,容器包括:入口辐射透射元件(64),其可操作以将所述驱动辐射从所述容器外部传送到所述容器内部;以及出口辐射传输元件(65),其可操作以透射所述等离子体发射辐射 从所述容器内部到所述容器的外部作为输出辐射; 其中所述入口和出射辐射传递元件中的至少一个包括平面平行板。