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41. 发明授权

US11961705B2 Method and apparatus for examining a beam of charged particles 有权
公开(公告)号：US11961705B2
公开(公告)日：2024-04-16
申请号：US17130044
申请日：2020-12-22
申请人： Elke Hoinkis , Carl Zeiss SMT GmbH
发明人： Daniel Rhinow , Markus Bauer , Rainer Fettig , David Lämmle , Marion Batz , Katharina Gries , Sebastian Vollmar , Petra Spies , Ottmar Hoinkis
IPC分类号： H01J37/304 , H01J37/21 , H01J37/28 , H01J37/317
CPC分类号： H01J37/304 , H01J37/21 , H01J37/28 , H01J37/3178 , H01J2237/063 , H01J2237/14 , H01J2237/21 , H01J2237/28
摘要： The present invention relates to a method for examining a beam of charged particles, including the following steps: producing persistent interactions of the beam with a sample at a plurality of positions of the sample relative to the beam and deriving at least one property of the beam by analyzing the spatial distribution of the persistent interactions at the plurality of positions.

42. 发明授权

US10622184B2 Objective lens arrangement usable in particle-optical systems 有权
公开(公告)号：US10622184B2
公开(公告)日：2020-04-14
申请号：US15632658
申请日：2017-06-26
申请人： CARL ZEISS MICROSCOPY GMBH , APPLIED MATERIALS ISRAEL, LTD.
发明人： Rainer Knippelmeyer , Stefan Schubert
IPC分类号： H01J37/141 , H01J37/28 , H01J37/145 , H01J37/20 , H01J37/21 , H01J37/24
CPC分类号： H01J37/141 , H01J37/145 , H01J37/20 , H01J37/21 , H01J37/24 , H01J37/28 , H01J2237/002 , H01J2237/04922 , H01J2237/04926 , H01J2237/12 , H01J2237/1215 , H01J2237/14 , H01J2237/141 , H01J2237/1405 , H01J2237/1415 , H01J2237/2817
摘要： An objective lens arrangement includes a first, second and third pole pieces, each being substantially rotationally symmetric. The first, second and third pole pieces are disposed on a same side of an object plane. An end of the first pole piece is separated from an end of the second pole piece to form a first gap, and an end of the third pole piece is separated from an end of the second pole piece to form a second gap. A first excitation coil generates a focusing magnetic field in the first gap, and a second excitation coil generates a compensating magnetic field in the second gap. First and second power supplies supply current to the first and second excitation coils, respectively. A magnetic flux generated in the second pole piece is oriented in a same direction as a magnetic flux generated in the second pole piece.

43. 发明授权

US10490386B2 Methods and systems for plasma deposition and treatment 有权
公开(公告)号：US10490386B2
公开(公告)日：2019-11-26
申请号：US15969183
申请日：2018-05-02
申请人： Peter F. Vandermeulen
发明人： Peter F. Vandermeulen
IPC分类号： H01J37/14 , H05H1/46 , H01J37/147 , H01J37/05 , H01J37/317 , H01L31/20 , H01L31/18
CPC分类号： H01J37/14 , H01J37/05 , H01J37/147 , H01J37/3171 , H01L31/1804 , H01L31/206 , H01J2237/057 , H01J2237/0817 , H01J2237/14 , H01J2237/152 , H05H1/46 , H05H2001/4622
摘要： An ion beam treatment or implantation system includes an ion source emitting a plurality of parallel ion beams having a given spacing. A first lens magnet having a non-uniform magnetic field receives the plurality of ion beams from the ion source and focuses the plurality of ion beams toward a common point. The system may optionally include a second lens magnet having a non-uniform magnetic field receiving the ion beams focused by the first lens magnet and redirecting the ion beams such that they have a parallel arrangement having a closer spacing than said given spacing in a direction toward a target substrate.

44. 发明申请

US20180138008A1 Ion Source 审中-公开
公开(公告)号：US20180138008A1
公开(公告)日：2018-05-17
申请号：US15795586
申请日：2017-10-27
申请人： Nissin Ion Equipment Co., Ltd.
发明人： Sami K. Hahto , George Sacco
IPC分类号： H01J37/08 , H01J37/317 , H01J37/05
CPC分类号： H01J37/08 , H01J27/024 , H01J37/05 , H01J37/3171 , H01J2237/057 , H01J2237/06375 , H01J2237/08 , H01J2237/082 , H01J2237/14
摘要： An ion source is provided that includes a gas source for supplying a gas, and an ionization chamber defining a longitudinal axis extending therethrough and including an exit aperture along a side wall of the ionization chamber. The ion source also includes one or more extraction electrodes at the exit aperture of the ionization chamber for extracting ions from the ionization chamber in the form of an ion beam. At least one of the extraction electrodes comprises a set of discrete rods forming a plurality of slits in the at least one extraction electrode for enabling at least one of increasing a current of the ion beam or controlling an angle of extraction of the ion beam from the ionization chamber. Each rod in the set of discrete rods is parallel to the longitudinal axis of the ionization chamber.

45. 发明申请

US20180138007A1 Ion Implanter 审中-公开
公开(公告)号：US20180138007A1
公开(公告)日：2018-05-17
申请号：US15795574
申请日：2017-10-27
申请人： Nissin Ion Equipment Co., Ltd.
发明人： Sami K. Hahto , George Sacco
IPC分类号： H01J37/08
CPC分类号： H01J37/08 , H01J27/024 , H01J37/05 , H01J37/3171 , H01J2237/057 , H01J2237/06375 , H01J2237/08 , H01J2237/082 , H01J2237/14
摘要： An ion implanter is provided that includes an ion source configured to generate an ion beam and an analyzer magnet defining a chamber having a magnetic field therein. The chamber provides a curved path between a first end and a second end of the chamber. The ion source is disposed within the chamber of the analyzer magnet adjacent to the first end. The analyzer magnet is configured to bend the ion beam from the ion source within the chamber along the curved path to spatially separate one or more ion species in the ion beam while the ion source is immersed in the magnetic field of the analyzer magnet.

46. 发明申请

US20170040139A1 Electron Beam Device 有权
标题翻译：电子束装置
公开(公告)号：US20170040139A1
公开(公告)日：2017-02-09
申请号：US15303282
申请日：2015-04-22
申请人： Hitachi High-Technologies Corporation
发明人： Tsunenori NOMAGUCHI , Toshihide AGEMURA
IPC分类号： H01J37/04 , H01J37/14 , H01J37/145 , H01J37/28 , H01J37/12 , H01J37/065 , H01J37/244
CPC分类号： H01J37/04 , H01J37/065 , H01J37/09 , H01J37/12 , H01J37/14 , H01J37/141 , H01J37/145 , H01J37/244 , H01J37/28 , H01J2237/04756 , H01J2237/14
摘要： The present invention provides an electron beam device that achieves high spatial resolution and high luminance, while remaining insusceptible to the effects of external disturbance. The present invention relates to an electron beam device, wherein, between, e.g., an electron source for generating an electron beam and an objective lens for focusing the electron beam onto a sample, a high voltage beam tube is disposed close to the electron source and a low voltage beam tube is disposed close to the objective lens. This makes it possible to achieve high luminance while maintaining spatial resolution, even with an SEM that is provided with a type of objective lens that actively leaks a magnetic field onto a sample.
摘要翻译：本发明提供一种实现高空间分辨率和高亮度的电子束装置，同时不受外部干扰的影响。电子束装置技术领域本发明涉及一种电子束装置，其中，在例如用于产生电子束的电子源和用于将电子束聚焦到样品上的物镜之间，高压束管靠近电子源设置，低压射束管靠近物镜设置。这使得即使使用设置有主动地将磁场泄漏到样品上的物镜的类型的SEM，也可以在保持空间分辨率的同时实现高亮度。

47. 发明申请

US20160322190A1 System and Method for Imaging a Sample with an Electron Beam with a Filtered Energy Spread 有权
标题翻译：用具有过滤能量传播的电子束成像样品的系统和方法
公开(公告)号：US20160322190A1
公开(公告)日：2016-11-03
申请号：US14826007
申请日：2015-08-13
申请人： KLA-Technology Drive
发明人： Xinrong Jiang
IPC分类号： H01J37/14 , H01J37/12
CPC分类号： H01J37/05 , H01J2237/057 , H01J2237/12 , H01J2237/14
摘要： A selectively configurable system for directing an electron beam with a limited energy spread to a sample includes an electron source to generate an electron beam having an energy spread including one or more energies, an aperture having an on-axis opening and an off-axis opening, a first assembly of one or more electron lenses with selectively configurable focal powers positioned to collect the beam from the source and direct the beam to the aperture, a second assembly of one or more selectively configurable electron lenses positioned to collect the beam, a sample stage, and an electron inspection sub-system including electron optics positioned to direct the beam onto one or more samples. The first assembly includes an off-axis electron lens for interacting with the beam at an off-axis position and introducing spatial dispersion to the beam when configured with a nonzero focal power, thus filtering the energy spread.
摘要翻译：用于将具有有限能量的电子束引导到样品的选择性配置系统包括电子源，以产生具有包括一个或多个能量的能量扩展的电子束，具有轴上开口和离轴开口的孔一个或多个电子透镜的第一组件，其具有可选择性地配置的聚焦能量，其被定位成从光源收集光束并将光束引导到光圈;定位成收集光束的一个或多个可选择性配置的电子透镜的第二组件，并且包括电子检测子系统，其包括将光束引导到一个或多个样品上的电子光学器件。第一组件包括离轴电子透镜，用于在离轴位置处与光束相互作用，并且当配置有非零焦度功率时将空间色散引入光束，从而过滤能量扩展。

48. 发明申请

US20160314929A1 Beam Guidance System, Particle Beam Therapy System and Method 审中-公开
标题翻译：光束引导系统，粒子束治疗系统和方法
公开(公告)号：US20160314929A1
公开(公告)日：2016-10-27
申请号：US15133347
申请日：2016-04-20
申请人： Jürgen Drees , Helmut Piel
发明人： Jürgen Drees , Helmut Piel
IPC分类号： H01J37/147 , A61N5/10 , H01J37/14
CPC分类号： H01J37/147 , A61N5/1077 , A61N2005/1087 , G21K1/093 , G21K5/04 , H01J37/14 , H01J2237/14 , H01J2237/152
摘要： The invention relates, inter alia, to a beam guidance system for guiding a beam of charged particles with a magnetic beam deflection unit, wherein the magnetic beam deflection unit has an entry side for entry of the beam of charged particles into the magnetic beam deflection unit in a direction of entry, wherein the magnetic beam deflection unit has an exit side for exit of the beam of charged particles from the magnetic beam deflection unit in a direction of exit. A further aspect of the invention relates to an advantageous particle beam therapy system. The problem of providing improving beam properties and at the same time reducing the amount of space required is solved in that the entry side of the magnetic beam deflection unit is, at least in sections, aligned substantially parallel to the exit side of the magnetic beam deflection unit.
摘要翻译：本发明尤其涉及用于用磁束偏转单元引导带电粒子束的光束引导系统，其中磁光束偏转单元具有入射侧，用于将带电粒子束进入磁束偏转单元在入射方向上，其中所述磁束偏转单元具有用于沿着出射方向从所述磁束偏转单元离开所述带电粒子束的出射侧。本发明的另一方面涉及一种有利的粒子束治疗系统。提供改进的光束特性并同时减少所需空间量的问题被解决为，磁束偏转单元的入射侧至少部分地基本平行于磁束偏转的出射侧排列单元。

49. 发明申请

US20160181054A1 OBJECTIVE LENS ARRANGEMENT USABLE IN PARTICLE-OPTICAL SYSTEMS 审中-公开
标题翻译：目标镜头布置可用于粒子系统
公开(公告)号：US20160181054A1
公开(公告)日：2016-06-23
申请号：US15056143
申请日：2016-02-29
申请人： CARL ZEISS MICROSCOPY GMBH , APPLIED MATERIALS ISRAEL, LTD.
发明人： Rainer KNIPPELMEYER , Stefan SCHUBERT
IPC分类号： H01J37/145
CPC分类号： H01J37/141 , H01J37/145 , H01J37/20 , H01J37/21 , H01J37/24 , H01J37/28 , H01J2237/002 , H01J2237/04922 , H01J2237/04926 , H01J2237/12 , H01J2237/1215 , H01J2237/14 , H01J2237/1405 , H01J2237/141 , H01J2237/1415 , H01J2237/2817
摘要： An objective lens arrangement includes a first, second and third pole pieces, each being substantially rotationally symmetric. The first, second and third pole pieces are disposed on a same side of an object plane. An end of the first pole piece is separated from an end of the second pole piece to form a first gap, and an end of the third pole piece is separated from an end of the second pole piece to form a second gap. A first excitation coil generates a focusing magnetic field in the first gap, and a second excitation coil generates a compensating magnetic field in the second gap. First and second power supplies supply current to the first and second excitation coils, respectively. A magnetic flux generated in the second pole piece is oriented in a same direction as a magnetic flux generated in the second pole piece.
摘要翻译：物镜配置包括第一，第二和第三极片，每个极片基本上是旋转对称的。第一，第二和第三极片设置在物平面的同一侧。第一极靴的端部与第二极靴的端部分离以形成第一间隙，并且第三极靴的端部与第二极靴的端部分离以形成第二间隙。第一激励线圈在第一间隙中产生聚焦磁场，第二激励线圈在第二间隙中产生补偿磁场。第一和第二电源分别向第一和第二励磁线圈提供电流。在第二极靴中产生的磁通量在与第二极靴中产生的磁通量相同的方向上定向。

50. 发明申请

US20150248990A1 Energy-discrimination detection device 有权
标题翻译：能量鉴别检测装置
公开(公告)号：US20150248990A1
公开(公告)日：2015-09-03
申请号：US14608828
申请日：2015-01-29
申请人： Hermes Microvision, Inc.
发明人： Weiming Ren , Shuai Li , Zhongwei Chen
IPC分类号： H01J37/05 , H01J37/10
CPC分类号： H01J37/05 , H01J37/10 , H01J37/12 , H01J37/244 , H01J37/263 , H01J2237/057 , H01J2237/12 , H01J2237/14
摘要： This invention provides a method for improving performance of a reflective type energy filter for a charged particle beam, which employs a beam-adjusting lens on an entrance side of a potential barrier of the energy filter to make the charged particle beam become a substantially parallel beam to be incident onto the potential barrier. The method makes the energy filter have both a fine energy-discrimination power over a large emission angle spread and a high uniformity of energy-discrimination powers over a large FOV. A LVSEM using this method in the energy filter can obviously improve image contrast. The invention also provides multiple energy-discrimination detection devices formed by using the advantages of the method.
摘要翻译：本发明提供了一种用于提高带电粒子束的反射型能量过滤器的性能的方法，该方法在能量过滤器的势垒的入口侧采用光束调节透镜，以使带电粒子束变成基本平行的光束被发现在潜在的障碍之上。该方法使得能量滤波器在大的发射角扩展上具有精细的能量鉴别能力，并且在大的FOV上具有高的能量鉴别能力的均匀性。在能量过滤器中使用这种方法的LVSEM可以显着提高图像对比度。本发明还提供了通过使用该方法的优点形成的多个能量鉴别检测装置。

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