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    • 42. 发明授权
    • Immersion type microscope objective lens
    • 浸入式显微镜物镜
    • US07889433B2
    • 2011-02-15
    • US12765228
    • 2010-04-22
    • Miwako Yoshida
    • Miwako Yoshida
    • G02B21/02G02B9/12G02B27/02
    • G02B21/33G02B21/02
    • An immersion type microscope objective lens OL includes, in order from a cover plate C side, a first lens group G1 having positive refractive power, a second lens group G2 having positive refractive power, and a third lens group G3 having negative refractive power. The first lens group G1 includes at least one cemented lens. The second lens group G2 includes at least two achromatic lenses. The third lens group G3 includes, in order from the object side, an achromatic lens CL31 having a strong concave surface facing an image side, and an achromatic lens CL32 having a strong concave surface facing the object side.
    • 浸没式显微镜物镜OL从盖板C侧依次包括具有正屈光力的第一透镜组G1,具有正折光力的第二透镜组G2和具有负屈光力的第三透镜组G3。 第一透镜组G1包括至少一个胶合透镜。 第二透镜组G2包括至少两个消色差透镜。 第三透镜组G3从物体侧依次包括具有朝向图像侧的强凹面的消色差透镜CL31和具有面向物体侧的强凹面的消色差透镜CL32。
    • 43. 发明授权
    • Immersion microscope objective and laser scanning microscope system using same
    • 浸液显微镜物镜和激光扫描显微镜系统使用相同
    • US07869132B2
    • 2011-01-11
    • US12173111
    • 2008-07-15
    • Masayoshi SaitoEiji YokoiKenichi Kusaka
    • Masayoshi SaitoEiji YokoiKenichi Kusaka
    • G02B21/02
    • G02B21/0032G02B9/60G02B15/163G02B21/02G02B21/33
    • An immersion microscope objective formed of thirteen or fewer lens elements includes, in order from the object side, first and second lens groups of positive refractive power, a third lens group, a fourth lens group having negative refractive power with its image-side surface being concave, and a fifth lens group having positive refractive power with its object-side surface being concave. The first lens group includes, in order from the object side, a lens component that consists of a lens element of positive refractive power (when computed as being in air) and a meniscus lens element having its concave surface on the object side. Various conditions are satisfied to ensure that images of fluorescence, obtained when the immersion microscope objective is used in a laser scanning microscope that employs multiphoton excitation to observe a specimen, are bright and of high resolution. Various laser scanning microscopes are also disclosed.
    • 由十三个或更少的透镜元件形成的浸没显微镜物镜包括从物体侧起依次具有正屈光力的第一和第二透镜组,第三透镜​​组,具有负折射力的第四透镜组,其像侧表面为 具有正折射力的第五透镜组,其物侧表面是凹形的。 第一透镜组从物体的顺序依次包括由正屈光力的透镜元件(当计算为空气时)和在物体侧具有凹面的弯月透镜元件构成的透镜部件。 满足各种条件以确保当在使用多光子激发观察样品的激光扫描显微镜中使用浸没显微镜物镜时获得的荧光图像是明亮且高分辨率的。 还公开了各种激光扫描显微镜。
    • 45. 发明申请
    • IMMERSION MICROSCOPE OBJECTIVE AND MICROSCOPE WITH IT
    • 隐形显微镜目标和显微镜与它
    • US20100265574A1
    • 2010-10-21
    • US12761463
    • 2010-04-16
    • Takashi KASAHARA
    • Takashi KASAHARA
    • G02B21/02G02B21/06
    • G02B21/33
    • An immersion microscope objective comprises, in order from an object side, a first lens group having a positive refractive power comprising a cemented lens composed of a piano-convex lens whose plane surface faces the object side and a meniscus lens whose concave surface faces the object side, and at least one single lens having a positive refractive power; a second lens group having a positive refractive power comprising a three-piece cemented lens; and a third lens group having a negative refractive power including a Gaussian type lens structure, wherein the objective satisfies the following conditions when n1, NAob, d0 and β are a refractive index at a d-line of the single lens having the highest refractive index included in the first lens group, a numerical aperture on the object side of the objective, a working distance of the objective, and a magnification of the objective, respectively. 1.7≦n1 0.75≦NAob≦1.45 0.4≦NAob*d0≦3 0.03≦NAob/β≦0.1
    • 浸没式显微镜物镜从物体侧依次包括具有正屈光力的第一透镜组,其包括由平面表面朝向物体侧的钢琴凸透镜构成的胶合透镜和凹面朝向物体的弯月形透镜 和具有正折射光焦度的至少一个单透镜; 具有正屈光力的第二透镜组,包括三片胶合透镜; 以及具有包括高斯型透镜结构的负折光力的第三透镜组,其中当n1,NAob,d0和&bgr; 是包括在第一透镜组中的具有最高折射率的单透镜的d线的折射率,物镜的物体侧的数值孔径,物镜的工作距离和物镜的放大倍率, 分别。 1.7≦̸ n1 0.75≦̸ NAob≦̸ 1.45 0.4≦̸ NAob * d0≦̸ 3 0.03≦̸ NAob /&bgr;<
    • 46. 发明申请
    • IMMERSION TYPE MICROSCOPE OBJECTIVE LENS
    • 浸没型微镜目标镜片
    • US20100202062A1
    • 2010-08-12
    • US12765228
    • 2010-04-22
    • Miwako YOSHIDA
    • Miwako YOSHIDA
    • G02B21/02
    • G02B21/33G02B21/02
    • An immersion type microscope objective lens OL includes, in order from a cover plate C side, a first lens group G1 having positive refractive power, a second lens group G2 having positive refractive power, and a third lens group G3 having negative refractive power. The first lens group G1 includes at least one cemented lens. The second lens group G2 includes at least two achromatic lenses. The third lens group G3 includes, in order from the object side, an achromatic lens CL31 having a strong concave surface facing an image side, and an achromatic lens CL32 having a strong concave surface facing the object side.
    • 浸没式显微镜物镜OL从盖板C侧依次包括具有正屈光力的第一透镜组G1,具有正折光力的第二透镜组G2和具有负屈光力的第三透镜组G3。 第一透镜组G1包括至少一个胶合透镜。 第二透镜组G2包括至少两个消色差透镜。 第三透镜组G3从物体侧依次包括具有朝向图像侧的强凹面的消色差透镜CL31和具有面向物体侧的强凹面的消色差透镜CL32。
    • 47. 发明申请
    • OBSERVING DEVICE AND METHOD
    • 观察装置和方法
    • US20100202041A1
    • 2010-08-12
    • US12665588
    • 2008-06-13
    • Hirotoshi TeradaHiroshi Tanabe
    • Hirotoshi TeradaHiroshi Tanabe
    • G02B21/02
    • G02B21/0016G01N21/9501G02B7/022G02B21/248G02B21/33
    • When a semiconductor device 11 is observed, first, when it is detected that a solid immersion lens 6 comes into contact with the semiconductor device 11, the solid immersion lens 6 is caused to vibrate by a vibration generator unit. Next, a reflected light image from the solid immersion lens 6 is input to calculate a reflected light quantity m of the reflected light image, and it is judged whether a ratio (m/n) of the reflected light quantity m to an incident light quantity n is not greater than a threshold value A. When the ratio (m/n) is greater than the threshold value A, it is judged that optical close contact between the solid immersion lens 6 and the semiconductor device 11 is not achieved, and the solid immersion lens 6 is again caused to vibrate. When the ratio (m/n) is not greater than the threshold value A, it is judged that optical close contact between the solid immersion lens 6 and the semiconductor device 11 is achieved, and an observed image of the semiconductor device 11 is acquired. Thereby, achieving an observation apparatus and method capable of improving the close contact between the solid immersion lens and an observation object.
    • 当观察到半导体器件11时,首先,当检测到固体浸没透镜6与半导体器件11接触时,使固体浸没透镜6由振动发生器单元振动。 接下来,输入来自固体浸没透镜6的反射光图像以计算反射光图像的反射光量m,并且判断反射光量m与入射光量的比(m / n) n不大于阈值A.当比率(m / n)大于阈值A时,判断为没有实现固体浸没透镜6与半导体器件11之间的光学紧密接触,并且 再次使固体浸没透镜6振动。 当比率(m / n)不大于阈值A时,判断固体浸没透镜6与半导体器件11之间的光学紧密接触,并且获得半导体器件11的观察图像。 由此,能够实现能够改善固体浸没透镜与观察对象物之间的紧密接触的观察装置和方法。
    • 48. 发明授权
    • Optical element, projection lens and associated projection exposure apparatus
    • 光学元件,投影透镜及相关投影曝光装置
    • US07738187B2
    • 2010-06-15
    • US12134062
    • 2008-06-05
    • Alexandra PazidisStephan SixRuediger DuesingGennady Fedosenko
    • Alexandra PazidisStephan SixRuediger DuesingGennady Fedosenko
    • G02B13/14
    • G02B21/33G03F7/70341G03F7/70958
    • An optical element (1) made of a material that is transparent to wavelengths in the UV region, which optical element (1) includes an oleophobic coating (6, 7) outside of its optically free diameter whose disperse component of the surface energy is preferably 25 mN/m or less, particularly preferably 20 mN/m or less, in particular 15 mN/m or less. In addition or as an alternative, the optical element (1) within its optically free diameter comprises an oleophilic coating (9b, 9c) that is transparent to wavelengths in the UV region, with the disperse component of the surface energy of this coating preferably being more than 25 mN/m, particularly preferably more than 30 mN/m, in particular more than 40 mN/m. The optical element may be provided in an arrangement in which it dips at least partially into an organic liquid.
    • 一种光学元件(1),其由对UV区域中的波长透明的材料制成,该光学元件(1)包括其光学自由直径外的疏油涂层(6,7),其表面能的分散分量优选为 25mN / m以下,特别优选为20mN / m以下,特别优选为15mN / m以下。 另外或作为替代,光学元件(1)在其光学自由直径内包括对UV区域中的波长透明的亲油涂层(9b,9c),该涂层的表面能的分散组分优选为 超过25mN / m,特别优选大于30mN / m,特别是大于40mN / m。 光学元件可以以其至少部分地浸入有机液体的布置来设置。