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    • 42. 发明申请
    • Charged particle beam apparatus
    • 带电粒子束装置
    • US20070246651A1
    • 2007-10-25
    • US11637946
    • 2006-12-13
    • Hirotami KoikeShinichi OkadaAkira HiguchiMasahiro InoueMasahiro YamamotoSumio Sasaki
    • Hirotami KoikeShinichi OkadaAkira HiguchiMasahiro InoueMasahiro YamamotoSumio Sasaki
    • G01N23/00
    • H01J37/02H01J2237/004H01J2237/31744
    • The present invention provides a charged particle beam apparatus capable of preventing the charging-up of the specimen without using a large-scale facility. A scanning electron microscope 100 illuminates a specimen 21 with a charged particle beam via a charged particle optical system arranged in a column. According to the present invention, the scanning electron microscope 100 has a charge preventive member 110 disposed between the objective lens 14 and the specimen 21. The charge preventive member 110 has an electrically conductive portion and an opening 113 to transmit the charged particle beam. The charge preventive member 110 is formed so as to partly cover the charged particle optical system when viewed from the charged particle beam irradiation spot on the specimen. In addition, the charge preventive member 110 has gas inflow paths 114 and 115 formed therein. These gas inflow paths have gas injection outlets 116 formed to inject gas toward the charged particle beam irradiation spot on the specimen.
    • 本发明提供一种能够防止在不使用大规模设备的情况下对样本进行充电的带电粒子束装置。 扫描电子显微镜100通过配置在列中的带电粒子光学系统用带电粒子束照射样本21。 根据本发明,扫描电子显微镜100具有设置在物镜14和试样21之间的防电荷部件110.电荷阻止部件110具有导电部分和用于透射带电粒子束的开口113。 当从样本上的带电粒子束照射点观察时,电荷抑制部件110形成为部分地覆盖带电粒子光学系统。 此外,电荷阻止部件110具有形成在其中的气体流入路径114和115。 这些气体流入路径具有气体注入口116,其形成为朝向样品上的带电粒子束照射点注入气体。