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    • 42. 发明授权
    • Nonvolatile programmable logic switch
    • 非易失性可编程逻辑开关
    • US08525251B2
    • 2013-09-03
    • US13221292
    • 2011-08-30
    • Daisuke HagishimaAtsuhiro KinoshitaKazuya MatsuzawaKazutaka IkegamiYoshifumi Nishi
    • Daisuke HagishimaAtsuhiro KinoshitaKazuya MatsuzawaKazutaka IkegamiYoshifumi Nishi
    • H01L29/792
    • H01L29/7881G11C16/0408H01L27/1052H01L27/11521H01L27/11526H01L27/11546H01L27/11807H01L29/66825
    • A nonvolatile programmable logic switch according to an embodiment includes: a memory cell transistor including: a first source region and a first drain region of a second conductivity type formed at a distance from each other in a first semiconductor region of a first conductivity type; a first insulating film, a charge storage film, a second insulating film, and a control gate stacked in this order and formed on the first semiconductor region between the first source region and the first drain region; a pass transistor including: a second source region and a second drain region of a second conductivity type formed at a distance from each other in a second semiconductor region of the first conductivity type; a third insulating film, a gate electrode stacked in this order and formed on the second semiconductor region between the second source region and the second drain region, the gate electrode being electrically connected to the first drain region; and an electrode for applying a substrate bias to the first and second semiconductor regions.
    • 根据实施例的非易失性可编程逻辑开关包括:存储单元晶体管,包括:在第一导电类型的第一半导体区域中彼此间隔开形成的第二导电类型的第一源极区域和第一漏极区域; 第一绝缘膜,电荷存储膜,第二绝缘膜和控制栅极,并且形成在第一源极区域和第一漏极区域之间的第一半导体区域上; 传输晶体管,包括:在第一导电类型的第二半导体区域中彼此成一定距离地形成的第二导电类型的第二源极区域和第二漏极区域; 第三绝缘膜,栅极电极,并且形成在第二源极区域和第二漏极区域之间的第二半导体区域上,栅极电连接到第一漏极区域; 以及用于将衬底偏压施加到第一和第二半导体区域的电极。