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41. 发明授权

US08067733B2 Scanning electron microscope having a monochromator 有权
标题翻译：具有单色仪的扫描电子显微镜
公开(公告)号：US08067733B2
公开(公告)日：2011-11-29
申请号：US12604923
申请日：2009-10-23
申请人： Wataru Mori , Makoto Ezumi , Yoichi Ose
发明人： Wataru Mori , Makoto Ezumi , Yoichi Ose
IPC分类号： G01N23/225
CPC分类号： H01J37/28 , H01J37/05 , H01J37/153 , H01J2237/057 , H01J2237/1501 , H01J2237/216
摘要： A scanning electron microscope having a monochromator that can automatically adjust an electron beam entering the monochromator and operating conditions of the monochromator. The scanning electron microscope having a monochromator is equipped with, between an electron source and the monochromator, a first focusing lens for adjusting focusing of the electron beam entering the monochromator and a first astigmatism correcting lens for correcting astigmatism of the electron beam entering the monochromator. The microscope further includes a means of obtaining an image of an electron-beam adjustment sample disposed where the electron beam in the monochromator is focused, and based on the obtained image, driving the first focusing lens and the first astigmatism correcting lens so that the focusing and astigmatism of the electron beam entering the monochromator are adjusted.
摘要翻译：具有可自动调节进入单色仪的电子束和单色仪的操作条件的单色仪的扫描电子显微镜。具有单色仪的扫描电子显微镜在电子源和单色仪之间配备有用于调节进入单色仪的电子束的聚焦的第一聚焦透镜和用于校正进入单色仪的电子束的像散的第一散光校正透镜。显微镜还包括获得设置在单色仪中的电子束被聚焦的电子束调节样本的图像的装置，并且基于获得的图像，驱动第一聚焦透镜和第一散光校正透镜，使得聚焦并且调节进入单色仪的电子束的散光。

42. 发明申请

US20070057183A1 Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US20070057183A1
公开(公告)日：2007-03-15
申请号：US10566634
申请日：2005-08-10
申请人： Noriaki Arai , Makoto Ezumi , Yoichi Ose
发明人： Noriaki Arai , Makoto Ezumi , Yoichi Ose
IPC分类号： G21K7/00
CPC分类号： H01J37/026 , H01J37/28 , H01J2237/0044 , H01J2237/12 , H01J2237/2817
摘要： An object of the invention is to reduce the beam drift in which the orbit of the charged particle beam is deflected by a potential gradient generated by a nonuniform sample surface potential on a charged-particle-beam irradiation area surface, the nonuniform sample surface potential being generated by electrification made when observing an insulating-substance sample using a charged particle beam. Energy of the charged particle beam to be irradiated onto the sample is set so that generation efficiency of secondary electrons generated from the sample becomes equal to 1 or more. A flat-plate electrode (26) is located in such a manner as to be directly opposed to the sample. Here, the flat-plate electrode is an electrode to which a voltage can be applied independently, and which is equipped with a hole through which a primary charged particle beam can pass. Furthermore, a voltage can be applied independently to a sample stage (12) on which the sample is mounted. Here, the sample stage's surface directly opposed to the sample is formed into a planarized structure with no projections and depressions thereon. Also, diameter D of the hole provided in the flat-plate electrode (26) and distance L between the flat-plate electrode (26) and the sample are set such that a relation of D/L≦1.5 is satisfied.
摘要翻译：本发明的目的是减少带电粒子束的轨道偏转由带电粒子束照射区域表面上的不均匀样品表面电位产生的电位梯度的光束漂移，不均匀的样品表面电位为通过使用带电粒子束观察绝缘物质样品时进行通电而产生。设定要照射到样品上的带电粒子束的能量被设定为使得从样品产生的二次电子的产生效率等于1或更大。平板电极（26）以与样品直接相对的方式定位。这里，平板电极是能够独立施加电压的电极，并且具有一次带电粒子束可以穿过的孔。此外，可以独立地对安装有样品的样品台（12）施加电压。这里，与样品直接相对的样品台的表面形成为在其上没有凸起和凹陷的平坦化结构。此外，设置在平板电极（26）中的孔的直径D和平板电极（26）与样品之间的距离L被设定为使得满足D / L <1.5的关系。

43. 发明授权

US06982427B2 Electron beam apparatus with aberration corrector 有权
公开(公告)号：US06982427B2
公开(公告)日：2006-01-03
申请号：US10754581
申请日：2004-01-12
申请人： Takeshi Kawasaki , Takaho Yoshida , Yoichi Ose , Hideo Todokoro
发明人： Takeshi Kawasaki , Takaho Yoshida , Yoichi Ose , Hideo Todokoro
IPC分类号： G01K1/08 , G21K1/08
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J37/1471 , H01J37/153 , H01J37/265 , H01J37/28 , H01J37/302 , H01J2237/1501 , H01J2237/1534 , H01J2237/21 , H01J2237/2487 , H01J2237/2817 , H01J2237/31793
摘要： An electron beam apparatus with an aberration corrector using multipole lenses is provided. The electron beam apparatus has a scan mode for enabling the operation of the aberration corrector and a scan mode for disabling the operation of the aberration corrector and the operation of each of the aberration corrector, a condenser lens, and the like is controlled such that the object point of an objective lens does not change in either of the scan modes. If a comparison is made between the secondary electron images of a specimen in the two modes, the image scaling factor and the focus remain unchanged and evaluation and adjustment can be performed by distinctly recognizing only the effect of the aberration corrector. This reduces the time required to adjust an optical axis which has been long due to an axial alignment defect inherent in the aberration corrector and an axial alignment defect in a part other than the aberration corrector which are indistinguishably intermingled with each other.

44. 发明申请

US20090065694A1 Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US20090065694A1
公开(公告)日：2009-03-12
申请号：US12289461
申请日：2008-10-28
申请人： Noriaki Arai , Makoto Ezumi , Yoichi Ose
发明人： Noriaki Arai , Makoto Ezumi , Yoichi Ose
IPC分类号： G21K7/00
CPC分类号： H01J37/026 , H01J37/28 , H01J2237/0044 , H01J2237/12 , H01J2237/2817
摘要： An object of the invention is to reduce the beam drift in which the orbit of the charged particle beam is deflected by a potential gradient generated by a nonuniform sample surface potential on a charged-particle-beam irradiation area surface, the nonuniform sample surface potential being generated by electrification made when observing an insulating-substance sample using a charged particle beam.Energy of the charged particle beam to be irradiated onto the sample is set so that generation efficiency of secondary electrons generated from the sample becomes equal to 1 or more. A flat-plate electrode (26) is located in such a manner as to be directly opposed to the sample. Here, the flat-plate electrode is an electrode to which a voltage can be applied independently, and which is equipped with a hole through which a primary charged particle beam can pass. Furthermore, a voltage can be applied independently to a sample stage (12) on which the sample is mounted. Here, the sample stage's surface directly opposed to the sample is formed into a planarized structure with no projections and depressions thereon. Also, diameter D of the hole provided in the flat-plate electrode (26) and distance L between the flat-plate electrode (26) and the sample are set such that a relation of D/L≦1. 5 is satisfied.
摘要翻译：本发明的目的是减少带电粒子束的轨道偏转由带电粒子束照射区域表面上的不均匀样品表面电位产生的电位梯度的光束漂移，不均匀的样品表面电位为通过使用带电粒子束观察绝缘物质样品时进行通电而产生。设定要照射到样品上的带电粒子束的能量被设定为使得从样品产生的二次电子的产生效率等于1或更大。平板电极（26）以与样品直接相对的方式定位。这里，平板电极是能够独立施加电压的电极，并且具有一次带电粒子束可以穿过的孔。此外，可以独立地对安装有样品的样品台（12）施加电压。这里，与样品直接相对的样品台的表面形成为在其上没有凸起和凹陷的平坦化结构。此外，设置在平板电极（26）中的孔的直径D和平板电极（26）与样品之间的距离L设定为D / L <1的关系。 5满足。

45. 发明申请

US20070181805A1 Scanning electron microscope having a monochromator 有权
标题翻译：具有单色仪的扫描电子显微镜
公开(公告)号：US20070181805A1
公开(公告)日：2007-08-09
申请号：US11649882
申请日：2007-01-05
申请人： Wataru Mori , Makoto Ezumi , Yoichi Ose
发明人： Wataru Mori , Makoto Ezumi , Yoichi Ose
IPC分类号： G21K7/00
CPC分类号： H01J37/28 , H01J37/05 , H01J37/153 , H01J2237/057 , H01J2237/1501 , H01J2237/216
摘要： A scanning electron microscope having a monochromator that can automatically adjust an electron beam entering the monochromator and operating conditions of the monochromator. The scanning electron microscope having a monochromator is equipped with, between an electron source and the monochromator, a first focusing lens for adjusting focusing of the electron beam entering the monochromator and a first astigmatism correcting lens for correcting astigmatism of the electron beam entering the monochromator. The microscope further includes a means of obtaining an image of an electron-beam adjustment sample disposed where the electron beam in the monochromator is focused, and based on the obtained image, driving the first focusing lens and the first astigmatism correcting lens so that the focusing and astigmatism of the electron beam entering the monochromator are adjusted.
摘要翻译：具有可自动调节进入单色仪的电子束和单色仪的操作条件的单色仪的扫描电子显微镜。具有单色仪的扫描电子显微镜在电子源和单色仪之间配备有用于调节进入单色仪的电子束的聚焦的第一聚焦透镜和用于校正进入单色仪的电子束的像散的第一散光校正透镜。显微镜还包括获得设置在单色仪中的电子束被聚焦的电子束调节样本的图像的装置，并且基于获得的图像，驱动第一聚焦透镜和第一散光校正透镜，使得聚焦并且调节进入单色仪的电子束的散光。

46. 发明授权

US07825377B2 Electron beam apparatus with aberration corrector 有权
标题翻译：具有像差校正器的电子束装置
公开(公告)号：US07825377B2
公开(公告)日：2010-11-02
申请号：US12153068
申请日：2008-05-13
申请人： Takeshi Kawasaki , Takaho Yoshida , Yoichi Ose , Hideo Todokoro
发明人： Takeshi Kawasaki , Takaho Yoshida , Yoichi Ose , Hideo Todokoro
IPC分类号： G21K1/08 , H01J3/14
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J37/1471 , H01J37/153 , H01J37/265 , H01J37/28 , H01J37/302 , H01J2237/1501 , H01J2237/1534 , H01J2237/21 , H01J2237/2487 , H01J2237/2817 , H01J2237/31793
摘要： An electron beam apparatus with an aberration corrector using multipole lenses is provided. The electron beam apparatus has a scan mode for enabling the operation of the aberration corrector and a scan mode for disabling the operation of the aberration corrector and the operation of each of the aberration corrector, a condenser lens, and the like is controlled such that the object point of an objective lens does not change in either of the scan modes. If a comparison is made between the secondary electron images of a specimen in the two modes, the image scaling factor and the focus remain unchanged and evaluation and adjustment can be performed by distinctly recognizing only the effect of the aberration corrector. This reduces the time required to adjust an optical axis which has been long due to an axial alignment defect inherent in the aberration corrector and an axial alignment defect in a part other than the aberration corrector which are indistinguishably intermingled with each other.
摘要翻译：提供具有使用多极透镜的像差校正器的电子束装置。电子束装置具有能够进行像差校正器的操作的扫描模式和用于禁止像差校正器的操作的扫描模式，并且每个像差校正器，聚光透镜等的操作被控制，使得物镜的物体在任一种扫描模式下都不会改变。如果在两种模式中的样本的二次电子图像之间进行比较，则图像缩放因子和焦点保持不变，并且可以通过清楚地仅识别像差校正器的效果来进行评估和调整。这减少了由于像差校正器固有的轴向对准缺陷而长时间调整光轴所需的时间以及像差校正器之外的不同于彼此混合的部分的轴向对准缺陷所需的时间。

47. 发明申请

US20090008551A1 Electron beam apparatus with aberration corrector 有权
标题翻译：具有像差校正器的电子束装置
公开(公告)号：US20090008551A1
公开(公告)日：2009-01-08
申请号：US12153068
申请日：2008-05-13
申请人： Takeshi Kawasaki , Takaho Yoshida , Yoichi Ose , Hideo Todokoro
发明人： Takeshi Kawasaki , Takaho Yoshida , Yoichi Ose , Hideo Todokoro
IPC分类号： G01N23/00
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J37/1471 , H01J37/153 , H01J37/265 , H01J37/28 , H01J37/302 , H01J2237/1501 , H01J2237/1534 , H01J2237/21 , H01J2237/2487 , H01J2237/2817 , H01J2237/31793
摘要： An electron beam apparatus with an aberration corrector using multipole lenses is provided. The electron beam apparatus has a scan mode for enabling the operation of the aberration corrector and a scan mode for disabling the operation of the aberration corrector and the operation of each of the aberration corrector, a condenser lens, and the like is controlled such that the object point of an objective lens does not change in either of the scan modes. If a comparison is made between the secondary electron images of a specimen in the two modes, the image scaling factor and the focus remain unchanged and evaluation and adjustment can be performed by distinctly recognizing only the effect of the aberration corrector. This reduces the time required to adjust an optical axis which has been long due to an axial alignment defect inherent in the aberration corrector and an axial alignment defect in a part other than the aberration corrector which are indistinguishably intermingled with each other.
摘要翻译：提供具有使用多极透镜的像差校正器的电子束装置。电子束装置具有能够进行像差校正器的操作的扫描模式和用于禁止像差校正器的操作的扫描模式，并且每个像差校正器，聚光透镜等的操作被控制，使得物镜的物体在任一种扫描模式下都不会改变。如果在两种模式中的样本的二次电子图像之间进行比较，则图像缩放因子和焦点保持不变，并且可以通过清楚地仅识别像差校正器的效果来进行评估和调整。这减少了由于像差校正器固有的轴向对准缺陷而长时间调整光轴所需的时间以及像差校正器之外的不同于彼此混合的部分的轴向对准缺陷所需的时间。

48. 发明授权

US07199365B2 Electron beam apparatus with aberration corrector 有权
公开(公告)号：US07199365B2
公开(公告)日：2007-04-03
申请号：US11220548
申请日：2005-09-08
申请人： Takeshi Kawasaki , Takaho Yoshida , Yoichi Ose , Hideo Todokoro
发明人： Takeshi Kawasaki , Takaho Yoshida , Yoichi Ose , Hideo Todokoro
IPC分类号： G21K1/08 , H01J3/14
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J37/1471 , H01J37/153 , H01J37/265 , H01J37/28 , H01J37/302 , H01J2237/1501 , H01J2237/1534 , H01J2237/21 , H01J2237/2487 , H01J2237/2817 , H01J2237/31793
摘要： An electron beam apparatus with an aberration corrector using multipole lenses is provided. The electron beam apparatus has a scan mode for enabling the operation of the aberration corrector and a scan mode for disabling the operation of the aberration corrector and the operation of each of the aberration corrector, a condenser lens, and the like is controlled such that the object point of an objective lens does not change in either of the scan modes. If a comparison is made between the secondary electron images of a specimen in the two modes, the image scaling factor and the focus remain unchanged and evaluation and adjustment can be performed by distinctly recognizing only the effect of the aberration corrector. This reduces the time required to adjust an optical axis which has been long due to an axial alignment defect inherent in the aberration corrector and an axial alignment defect in a part other than the aberration corrector which are indistinguishably intermingled with each other.

49. 发明申请

US20060016991A1 Electron beam apparatus with aberration corrector 有权
公开(公告)号：US20060016991A1
公开(公告)日：2006-01-26
申请号：US11220548
申请日：2005-09-08
申请人： Takeshi Kawasaki , Takaho Yoshida , Yoichi Ose , Hideo Todokoro
发明人： Takeshi Kawasaki , Takaho Yoshida , Yoichi Ose , Hideo Todokoro
IPC分类号： G21K7/00
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J37/1471 , H01J37/153 , H01J37/265 , H01J37/28 , H01J37/302 , H01J2237/1501 , H01J2237/1534 , H01J2237/21 , H01J2237/2487 , H01J2237/2817 , H01J2237/31793
摘要： An electron beam apparatus with an aberration corrector using multipole lenses is provided. The electron beam apparatus has a scan mode for enabling the operation of the aberration corrector and a scan mode for disabling the operation of the aberration corrector and the operation of each of the aberration corrector, a condenser lens, and the like is controlled such that the object point of an objective lens does not change in either of the scan modes. If a comparison is made between the secondary electron images of a specimen in the two modes, the image scaling factor and the focus remain unchanged and evaluation and adjustment can be performed by distinctly recognizing only the effect of the aberration corrector. This reduces the time required to adjust an optical axis which has been long due to an axial alignment defect inherent in the aberration corrector and an axial alignment defect in a part other than the aberration corrector which are indistinguishably intermingled with each other.

50. 发明授权

US07612336B2 Scanning electron microscope having a monochromator 有权
标题翻译：具有单色仪的扫描电子显微镜
公开(公告)号：US07612336B2
公开(公告)日：2009-11-03
申请号：US11649882
申请日：2007-01-05
申请人： Wataru Mori , Makoto Ezumi , Yoichi Ose
发明人： Wataru Mori , Makoto Ezumi , Yoichi Ose
IPC分类号： H01J37/26
CPC分类号： H01J37/28 , H01J37/05 , H01J37/153 , H01J2237/057 , H01J2237/1501 , H01J2237/216
摘要： A scanning electron microscope having a monochromator that can automatically adjust an electron beam entering the monochromator and operating conditions of the monochromator. The scanning electron microscope having a monochromator is equipped with, between an electron source and the monochromator, a first focusing lens for adjusting focusing of the electron beam entering the monochromator and a first astigmatism correcting lens for correcting astigmatism of the electron beam entering the monochromator. The microscope further includes a means of obtaining an image of an electron-beam adjustment sample disposed where the electron beam in the monochromator is focused, and based on the obtained image, driving the first focusing lens and the first astigmatism correcting lens so that the focusing and astigmatism of the electron beam entering the monochromator are adjusted.
摘要翻译：具有可自动调节进入单色仪的电子束和单色仪的操作条件的单色仪的扫描电子显微镜。具有单色仪的扫描电子显微镜在电子源和单色仪之间配备有用于调节进入单色仪的电子束的聚焦的第一聚焦透镜和用于校正进入单色仪的电子束的像散的第一散光校正透镜。显微镜还包括获得设置在单色仪中的电子束被聚焦的电子束调节样本的图像的装置，并且基于获得的图像，驱动第一聚焦透镜和第一散光校正透镜，使得聚焦并且调节进入单色仪的电子束的散光。

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