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    • 42. 发明授权
    • Semiconductor process
    • 半导体工艺
    • US08546234B2
    • 2013-10-01
    • US13154427
    • 2011-06-06
    • Wen-Chieh WangYi-Nan ChenHsien-Wen Liu
    • Wen-Chieh WangYi-Nan ChenHsien-Wen Liu
    • H01L21/20
    • H01L29/66621H01L21/26506H01L21/26513H01L27/10876
    • A semiconductor process is provided. A mask layer is formed on a substrate and has a first opening exposing a portion of the substrate. Using the mask layer as a mask, a dry etching process is performed on the substrate to form a second opening therein. The second opening has a bottom portion and a side wall extending upwards and outwards from the bottom portion, wherein the bottom portion is exposed by the first opening and the side wall is covered by the mask layer. Using the mask layer as a mask, a vertical ion implantation process is performed on the bottom portion. A conversion process is performed, so as to form converting layers on the side wall and the bottom portion of the second opening, wherein a thickness of the converting layer on the side wall is larger than a thickness of the converting layer on the bottom portion.
    • 提供半导体工艺。 在衬底上形成掩模层,并且具有暴露衬底的一部分的第一开口。 使用掩模层作为掩模,在基板上进行干蚀刻处理,以在其中形成第二开口。 第二开口具有底部和从底部向上并向外延伸的侧壁,其中底部由第一开口暴露,并且侧壁被掩模层覆盖。 使用掩模层作为掩模,在底部进行垂直离子注入工艺。 进行转换处理,以在第二开口的侧壁和底部形成转换层,其中侧壁上的转换层的厚度大于底部上的转换层的厚度。
    • 44. 发明申请
    • SEMICONDUCTOR PROCESS
    • 半导体工艺
    • US20120309192A1
    • 2012-12-06
    • US13154427
    • 2011-06-06
    • Wen-Chieh WangYi-Nan ChenHsien-Wen Liu
    • Wen-Chieh WangYi-Nan ChenHsien-Wen Liu
    • H01L21/768
    • H01L29/66621H01L21/26506H01L21/26513H01L27/10876
    • A semiconductor process is provided. A mask layer is formed on a substrate and has a first opening exposing a portion of the substrate. Using the mask layer as a mask, a dry etching process is performed on the substrate to form a second opening therein. The second opening has a bottom portion and a side wall extending upwards and outwards from the bottom portion, wherein the bottom portion is exposed by the first opening and the side wall is covered by the mask layer. Using the mask layer as a mask, a vertical ion implantation process is performed on the bottom portion. A conversion process is performed, so as to form converting layers on the side wall and the bottom portion of the second opening, wherein a thickness of the converting layer on the side wall is larger than a thickness of the converting layer on the bottom portion.
    • 提供半导体工艺。 在衬底上形成掩模层,并具有暴露衬底的一部分的第一开口。 使用掩模层作为掩模,在基板上进行干蚀刻处理,以在其中形成第二开口。 第二开口具有底部和从底部向上并向外延伸的侧壁,其中底部由第一开口暴露,并且侧壁被掩模层覆盖。 使用掩模层作为掩模,在底部进行垂直离子注入工艺。 进行转换处理,以在第二开口的侧壁和底部形成转换层,其中侧壁上的转换层的厚度大于底部上的转换层的厚度。
    • 45. 发明授权
    • Semiconductor process
    • 半导体工艺
    • US08309459B1
    • 2012-11-13
    • US13175882
    • 2011-07-03
    • Wen-Chieh WangYi-Nan ChenHsien-Wen Liu
    • Wen-Chieh WangYi-Nan ChenHsien-Wen Liu
    • H01L21/44
    • H01L21/76897H01L29/78H01L2221/1063
    • A semiconductor process is provided. A substrate is provided in an etching apparatus, wherein first conductive patterns, a barrier layer and a patterned insulating layer are formed thereon. The first openings are formed between the first conductive patterns, the barrier layer covers surfaces of the first conductive patterns and the first openings, and the patterned insulating layer is formed on the first conductive patterns and has a plurality of second openings. The second openings expose the barrier layer on top corners of the first conductive patterns. Polymer layers are formed on the barrier layer, wherein a thickness of the polymer layer on the top corners of the first conductive pattern is larger than a thickness of the polymer layer on bottom portions of the first openings. An etching process is performed to remove the polymer layer and the barrier layer disposed on the bottom portions of the first openings.
    • 提供半导体工艺。 在蚀刻装置中设置有基板,其中在其上形成第一导电图案,势垒层和图案化绝缘层。 第一开口形成在第一导电图案之间,阻挡层覆盖第一导电图案和第一开口的表面,并且图案化绝缘层形成在第一导电图案上并且具有多个第二开口。 第二开口暴露第一导电图案的顶角上的阻挡层。 聚合物层形成在阻挡层上,其中第一导电图案的顶角上的聚合物层的厚度大于第一开口的底部上的聚合物层的厚度。 执行蚀刻工艺以去除设置在第一开口的底部上的聚合物层和阻挡层。
    • 48. 发明授权
    • Rotatable display mounting structure
    • 可旋转显示安装结构
    • US06985356B2
    • 2006-01-10
    • US10750768
    • 2004-01-05
    • Wen-Chieh Wang
    • Wen-Chieh Wang
    • G06F1/16
    • G06F1/1637G06F1/162G06F1/1679Y10S248/92
    • A rotatable display mounting structure is disclosed to include a hollow frame, a display pivotally mounted inside the hollow frame, positioning structures provided at the display, positioning devices formed in the hollow frame and adapted to engage with the positioning structures and to hold the display in the hollow frame in position after rotation of the display in the hollow frame vertically (or horizontally). The positioning structures are respectively extended from the outer left side of the display to the outer right side of the display, and the positioning devices are respectively extended from the left-side frame bar of the hollow frame to the right-side frame bar of the hollow frame, so that the positioning structures and the positioning devices, when matched, form a shielding structure to stop light from passing through the gap between the display and the hollow frame.
    • 公开了一种可旋转的显示器安装结构,其包括中空框架,枢转地安装在中空框架内的显示器,设置在显示器处的定位结构,形成在中空框架中的定位装置,并且适于与定位结构接合并将显示器保持在 垂直(或水平)在中空框架中旋转显示器后的空心框架。 定位结构分别从显示器的左外侧延伸到显示器的右外侧,并且定位装置分别从中空框架的左侧框架杆延伸到右侧框架杆 使得当匹配时,定位结构和定位装置形成屏蔽结构以阻止光通过显示器和中空框架之间的间隙。