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41. 发明授权

US5343756A Electrostatic capacity type differential pressure detector 失效
标题翻译：静电容量型差压检测器
公开(公告)号：US5343756A
公开(公告)日：1994-09-06
申请号：US917276
申请日：1992-07-23
申请人： Kimihiro Nakamura , Tadanori Yuhara , Toshiyuki Takano , Hironobu Yao
发明人： Kimihiro Nakamura , Tadanori Yuhara , Toshiyuki Takano , Hironobu Yao
IPC分类号： G01L9/00 , G01L9/12
CPC分类号： G01L9/0073
摘要： An electrostatic capacity type differential pressure detector wherein capacitances are formed between a diaphragm as a movable electrode which is subjected to displacement depending on a differential pressure and fixed electrodes which are arranged on opposite sides of the diaphragm. Each of the fixed electrodes has a first electrically conductive plate closely adjoining and confronting a surface of a central portion of the diaphragm. An annular support is joined to the surface of a circumferential edge portion of the diaphragm and is spaced from and surrounds the outer circumferential surface of the first electrically conductive plate. A solid insulator completely fills an annular space between the first electrically conductive plate and the annular support and is spaced from the diaphragm. An insulating plate is commonly joined to each surface of the annular support and the first electrically conductive plate on the side of the annular support and conductive plate opposite the diaphragm; and a second electrically conductive plate is joined to the surface of the insulating plate opposite the diaphragm and is electrically connected with the first electrically conductive plate. There is a pressure introducing hole extending through the first and second electrically conductive plates and through the insulating plate. Both the first electrically conductive plate and the annular support are composed of silicon, the insulator being composed of a glass material which has a thermal expansion coefficient substantially that of silicon.
摘要翻译：一种静电电容型差压检测器，其中电容被形成在作为根据差压的位移的可动电极的膜片和布置在隔膜的相对侧上的固定电极之间。每个固定电极具有紧密邻接并面对隔膜的中心部分的表面的第一导电板。环形支撑件连接到隔膜的周向边缘部分的表面，并且与第一导电板的外周表面间隔开并且围绕第一导电板的外周表面。固体绝缘体完全填充第一导电板和环形支撑件之间的环形空间并且与隔膜间隔开。绝缘板通常连接到环形支撑件的每个表面，并且第一导电板在与隔膜相对的环形支撑件和导电板的侧面上; 并且第二导电板接合到与隔膜相对的绝缘板的表面，并与第一导电板电连接。存在延伸穿过第一和第二导电板并通过绝缘板的压力引入孔。第一导电板和环形支撑件都由硅组成，绝缘体由具有基本上为硅的热膨胀系数的玻璃材料组成。

42. 发明授权

US5056369A Capacitive differential pressure detector 失效
标题翻译：电容式差压检测器
公开(公告)号：US5056369A
公开(公告)日：1991-10-15
申请号：US507843
申请日：1990-04-12
申请人： Mitsuru Tamai , Tadanori Yuhara , Kimihiro Nakamura , Kazuaki Kitamura , Toshiyuki Takano , Teizo Takahama , Mikihiko Matsuda , Shinichi Souma
发明人： Mitsuru Tamai , Tadanori Yuhara , Kimihiro Nakamura , Kazuaki Kitamura , Toshiyuki Takano , Teizo Takahama , Mikihiko Matsuda , Shinichi Souma
IPC分类号： G01L13/06 , G01L9/00
CPC分类号： G01L9/0073
摘要： The present invention is directed to a capacitive differential pressure detector comprising a diaphragm disposed between two electrodes. In a first embodiment, each of the electrodes comprises two conductive plates with an insulator disposed therebetween. Step-like portions are formed in the conductive plate nearest the diaphragm. In a second embodiment, the plate nearest the diaphragm is insulative with a conductive film formed thereon. In a third embodiment, at least one groove is formed in the plate nearest the diaphragm. The groove is formed in a surface of the plate which faces the diaphragm. The groove also intersects a pressure guide hole. In a fourth embodiment, a substrate is disposed on a surface of the plate farthest from said diaphragm. In a fifth embodiment, an insulating layer has the same coefficient of thermal expansion as the conductive plates. In a sixth embodiment, the diaphragm is etched in order to form a circular flexible part, a centrally disposed displacing part, and a bonding part.
摘要翻译：本发明涉及一种电容差压检测器，其包括设置在两个电极之间的隔膜。在第一实施例中，每个电极包括两个导电板，绝缘体位于它们之间。在最靠近隔膜的导电板中形成阶梯状部分。在第二实施例中，最靠近隔膜的板是绝缘的，其上形成有导电膜。在第三实施例中，在最靠近隔膜的板中形成至少一个凹槽。凹槽形成在板的面向隔膜的表面中。凹槽还与压力导向孔相交。在第四实施例中，基板设置在距所述隔膜最远的板的表面上。在第五实施例中，绝缘层具有与导电板相同的热膨胀系数。在第六实施例中，为了形成圆形柔性部分，中心设置的位移部分和接合部分，蚀刻隔膜。

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