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41. 发明申请

US20090129981A1 MICROFLUIDIC DEVICE 有权
标题翻译：微流体装置
公开(公告)号：US20090129981A1
公开(公告)日：2009-05-21
申请号：US12268521
申请日：2008-11-11
申请人： Toshinobu Tokita , Kosuke Fujimoto
发明人： Toshinobu Tokita , Kosuke Fujimoto
IPC分类号： B01J19/00 , B01L11/00
CPC分类号： B01J19/0093 , B01J2219/00783 , B01J2219/00833 , B01J2219/00873 , B01J2219/00889 , B01J2219/00891 , B01J2219/00932 , B01L3/502738 , B01L2400/065 , F16K99/0001 , F16K99/0005 , F16K99/0011 , F16K99/0028 , F16K99/0042 , F16K2099/0084
摘要： A microfluidic device includes a microfluidic chip and an ultrasonic stator. A holding portion is formed at the ultrasonic stator to hold the microfluidic chip. The microfluidic chip is formed of a substrate with a very small channel, and a valve is provided movably in the channel. The cross section of an upstream portion of the channel is larger than that of a downstream portion. When the valve is moved to the downstream side, the valve closes and decouples the downstream portion of the channel. When the valve is moved to the upstream side, the upstream and downstream portions of the channel are coupled. The valve is moved by a traveling wave generated by the ultrasonic stator, and the traveling wave is transmitted to the substrate via the holding portion.
摘要翻译：微流体装置包括微流体芯片和超声波定子。在超声波定子上形成保持部来保持微流体芯片。微流体芯片由具有非常小的通道的基底形成，并且阀在通道中可移动地设置。通道的上游部分的横截面大于下游部分的横截面。当阀门移动到下游侧时，阀门关闭并分离通道的下游部分。当阀移动到上游侧时，通道的上游和下游部分被联接。阀由超声波定子产生的行波移动，行波通过保持部传递给基板。

42. 发明授权

US07528930B2 Exposure apparatus and device manufacturing method 失效
标题翻译：曝光装置和装置制造方法
公开(公告)号：US07528930B2
公开(公告)日：2009-05-05
申请号：US11029674
申请日：2005-01-04
申请人： Toshinobu Tokita
发明人： Toshinobu Tokita
IPC分类号： G03B27/52 , G03B27/42
CPC分类号： G03F7/70341 , G03B27/52 , G03F7/70891
摘要： An exposure apparatus includes a projection optical system for projecting a pattern on a reticle onto a substrate, the projection optical system including an optical element closest to the substrate, an illumination optical system for illuminating the reticle using light from a light source, and a temperature controller for controlling a temperature of the optical element and thereby a temperature of a fluid that is filled in a space between the optical element in the projection optical system and the substrate, the exposure apparatus exposing the substrate via said projection optical system and the fluid.
摘要翻译：曝光装置包括用于将掩模版上的图案投影到基板上的投影光学系统，所述投影光学系统包括最靠近所述基板的光学元件，使用来自光源的光照射所述掩模版的照明光学系统，以及温度控制器，用于控制光学元件的温度，从而填充在投影光学系统中的光学元件与基板之间的空间中的流体的温度，曝光装置经由所述投影光学系统和流体曝光基板。

43. 发明授权

US07468780B2 Exposure apparatus and method 失效
标题翻译：曝光装置和方法
公开(公告)号：US07468780B2
公开(公告)日：2008-12-23
申请号：US11742720
申请日：2007-05-01
申请人： Toshinobu Tokita
发明人： Toshinobu Tokita
IPC分类号： G03B27/42 , G03B27/52
CPC分类号： G03F7/70341
摘要： An exposure method including the steps of introducing fluid between a surface of an object to be exposed, and a final surface of a projection optical system, displacing an interface of the fluid arranged between the surface of the object and the final surface of the projection optical system, removing a gas from the fluid having a displaced interface, and projecting a pattern on a mask onto the object via the projection optical system and the fluid.
摘要翻译：一种曝光方法，包括以下步骤：在要曝光的物体的表面和投影光学系统的最终表面之间引入流体，使配置在物体的表面和投影光学的最终表面之间的流体的界面移位从具有位移界面的流体中除去气体，并且通过投影光学系统和流体将掩模上的图案投影到物体上。

44. 发明申请

US20080100588A1 TACTILE-FEEDBACK DEVICE AND METHOD 审中-公开
标题翻译：触觉反馈装置和方法
公开(公告)号：US20080100588A1
公开(公告)日：2008-05-01
申请号：US11877444
申请日：2007-10-23
申请人： Atsushi Nogami , Naoki Nishimura , Toshinobu Tokita , Yoshihiko Iwase
发明人： Atsushi Nogami , Naoki Nishimura , Toshinobu Tokita , Yoshihiko Iwase
IPC分类号： G06F3/041
CPC分类号： G06F3/016
摘要： A tactile-feedback device configured to enable a user to perceive a state of contact with a virtual object includes a plurality of stimulation generating units attached to a user body and a control unit configured to cause the plurality of stimulation generating units to generate stimulations different from each other when the user body is in contact with different surfaces of the virtual object.
摘要翻译：被配置为使得用户能够感知与虚拟对象的接触状态的触觉反馈装置包括附接到用户主体的多个刺激产生单元和被配置为使多个刺激产生单元产生与当用户主体与虚拟对象的不同表面接触时，彼此相对。

45. 发明授权

US07177006B2 Exposure apparatus and method 失效
标题翻译：曝光装置和方法
公开(公告)号：US07177006B2
公开(公告)日：2007-02-13
申请号：US11022033
申请日：2004-12-23
申请人： Toshinobu Tokita
发明人： Toshinobu Tokita
IPC分类号： G03B27/52 , G03B27/42 , G03B27/72 , G03B27/32
CPC分类号： G03F7/70341
摘要： An exposure method includes the steps of introducing fluid to a space between a surface of an object to be exposed, and a final surface of a projection optical system, projecting a pattern on a mask onto the object via the projection optical system and the fluid, wherein the introducing step includes the steps of filling the fluid in the space between the surface of the object and the final surface of the projection optical system, and wherein the filling step changes a capillary attraction of the fluid different from the capillary attraction that operates during the projection step.
摘要翻译：曝光方法包括以下步骤：将待曝光物体的表面和投影光学系统的最终表面之间的空间引入到通过投影光学系统和流体将掩模上的图案投射到物体上的步骤; 其中所述引入步骤包括以下步骤：将所述流体填充在所述物体的表面与所述投影光学系统的最终表面之间的空间中，并且其中所述填充步骤改变与所述流体不同的毛细管吸引力的毛细吸引力投影步骤。

46. 发明授权

US06972844B2 Microprocessing apparatus, semiconductor device manufacturing apparatus, and device manufacturing method 有权
标题翻译：微处理装置，半导体装置制造装置及装置的制造方法
公开(公告)号：US06972844B2
公开(公告)日：2005-12-06
申请号：US10951957
申请日：2004-09-28
申请人： Toshinobu Tokita
发明人： Toshinobu Tokita
IPC分类号： G03F7/20 , G03F9/00 , H01L21/027 , G01B11/00 , B29C59/16 , B44C1/22 , G01B15/00
CPC分类号： G03F9/7038 , G03F7/70216 , G03F9/7015 , G03F9/703 , G03F9/7034
摘要： An illustrative object of the present invention is to provide a microprocessing apparatus by which an original and a substrate to be processed can be aligned with each other with a higher precision. Disclosed in this connection is an apparatus for transferring a pattern of an original onto a substrate while maintaining the original and the substrate in contact with each other or in close proximity to each other, wherein the apparatus includes an original holding device for holding the original, a substrate holding device for holding the substrate, a reference mark, and a position measuring system for measuring a relative positional relationship between the reference mark and a mark formed on at least one of the original and the substrate.
摘要翻译：本发明的一个说明性的目的是提供一种微处理装置，通过该微处理装置可以使原件和待处理基板以更高的精度相互对准。在这方面公开了一种用于将原稿的图案转移到基板上同时保持原稿和基板彼此接触或彼此靠近的装置，其中该装置包括用于保持原稿的原始保持装置，用于保持基板的基板保持装置，基准标记和位置测量系统，用于测量基准标记与形成在原稿和基板中的至少一个上的标记之间的相对位置关系。

47. 发明申请

US20050105093A1 Microprocessing apparatus, semiconductor device manufacturing apparatus, and device manufacturing method 有权
公开(公告)号：US20050105093A1
公开(公告)日：2005-05-19
申请号：US10951957
申请日：2004-09-28
申请人： Toshinobu Tokita
发明人： Toshinobu Tokita
IPC分类号： G03F7/20 , G03F9/00 , H01L21/027 , G01B11/00
CPC分类号： G03F9/7038 , G03F7/70216 , G03F9/7015 , G03F9/703 , G03F9/7034
摘要： An illustrative object of the present invention is to provide a microprocessing apparatus by which an original and a substrate to be processed can be aligned with each other with a higher precision. Disclosed in this connection is an apparatus for transferring a pattern of an original onto a substrate while maintaining the original and the substrate in contact with each other or in close proximity to each other, wherein the apparatus includes an original holding device for holding the original, a substrate holding device for holding the substrate, a reference mark, and a position measuring system for measuring a relative positional relationship between the reference mark and a mark formed on at least one of the original and the substrate.

48. 发明授权

US09883806B2 Light irradiating apparatus, control method therefor, and object information acquiring apparatus 有权
公开(公告)号：US09883806B2
公开(公告)日：2018-02-06
申请号：US14113679
申请日：2012-04-25
申请人： Toshinobu Tokita
发明人： Toshinobu Tokita
IPC分类号： A61B5/05 , A61B5/00
CPC分类号： A61B5/0095 , A61B5/6843
摘要： A light irradiating apparatus is used, which is characterized by having: a probe including an irradiating unit which guides light to an object, a housing containing the irradiating unit, and a touch sensor acquiring a contact condition amount between the object and the housing; and a controller controlling irradiation with light from the irradiating unit based on a level of the contact condition amount and a change in the contact condition amount, wherein in a case where the contact condition amount is equal to or more than a first reference value while the change in the contact condition amount which occurs when the housing is pressed against the object is a positive value, the controller performs a control which enables irradiation with light from the irradiating unit when the change in the contact condition amount is equal to or more than a second reference value.

49. 发明申请

US20140046166A1 OBJECT INFORMATION ACQUIRING APPARATUS, CONTROL METHOD THEREOF, AND METHOD FOR DETERMINATION OF CONTACT 审中-公开
标题翻译：获取设备的对象信息，其控制方法及其联系方法
公开(公告)号：US20140046166A1
公开(公告)日：2014-02-13
申请号：US14113665
申请日：2012-04-25
申请人： Toshinobu Tokita
发明人： Toshinobu Tokita
IPC分类号： A61B5/00
CPC分类号： A61B5/0095 , A61B5/4312 , A61B5/6843 , A61B5/6844
摘要： The present invention employs an object information acquiring apparatus having: a photoacoustic probe unit including a light irradiating unit which irradiates light, and a probe which receives a photoacoustic wave generated from an object irradiated with light while transmitting an ultrasound wave to the object and receiving a reflected wave thereof; a processor configured to create image information of the object based on the photoacoustic wave; and a controller configured to control irradiation with light, wherein when a first contact condition is defined as a condition in which the object is irradiated with light while the probe is acoustically matched with the object, the controller determines whether or not the photoacoustic probe unit is in the first contact condition by using the reflected wave and enables irradiation with light when the photoacoustic probe unit is in the first contact condition.
摘要翻译：本发明采用一种对象信息获取装置，其具有：光电探测器单元，其包括照射光的光照射单元，以及探测器，其接收从被照射的光产生的光声，同时向对象发送超声波，并接收反射波; 处理器，其被配置为基于所述光声波创建所述对象的图像信息; 以及控制器，其被配置为控制光的照射，其中当所述第一接触条件被定义为在所述探针与所述物体声学匹配时物体被照射的条件下，所述控制器确定所述光声探测单元是否为在第一接触状态下使用反射波，并且当光声探针单元处于第一接触状态时能够用光照射。

50. 发明授权

US08540637B2 Biological information acquisition apparatus and biological information acquisition method 有权
标题翻译：生物信息采集仪和生物信息采集方法
公开(公告)号：US08540637B2
公开(公告)日：2013-09-24
申请号：US13140816
申请日：2009-12-16
申请人： Toshinobu Tokita , Kazuhiko Fukutani , Takao Nakajima , Katsumi Nakagawa
发明人： Toshinobu Tokita , Kazuhiko Fukutani , Takao Nakajima , Katsumi Nakagawa
IPC分类号： A61B8/00
CPC分类号： A61B5/0095 , A61B5/0091 , A61B5/4312 , A61B8/0825 , A61B8/5207
摘要： When a subject is pressed by a plate and an acoustic wave is received by a probe via the plate, the acoustic wave is refracted because of the difference between a sound velocity in the subject and a sound velocity in the plate. When the refraction is not considered, a reduction in resolution occurs. Weights for signals or virtual wavefronts corresponding to the signals to be added to one another are determined using a thickness of the plate, the sound velocity in the plate, the sound velocity in the subject, positions of image elements (pixels or voxels) for image information, and arrival times of the acoustic wave from an object that is a sound source. The signals or the virtual wavefronts corresponding to the signals are added to one another, thereby acquiring the image information.
摘要翻译：当受试者被板按压并且通过探针经由板接收声波时，由于被检体中的声速和板中的声速之间的差异，声波被折射。当不考虑折射时，会发生分辨率降低。使用板的厚度，板中的声速，被摄体中的声速，图像的像素（像素或体素）的位置来确定对应于要添加到彼此的信号的信号或虚拟波前的权重信息和来自作为声源的物体的声波的到达时间。对应于信号的信号或虚拟波前相互添加，从而获取图像信息。

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