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    • 41. 发明授权
    • Projection exposure apparatus
    • 投影曝光装置
    • US06384898B1
    • 2002-05-07
    • US09722310
    • 2000-11-28
    • Jiro InoueKazuaki Suzuki
    • Jiro InoueKazuaki Suzuki
    • G03B2742
    • G03F7/70691G03B27/42
    • Light from an alignment illumination system having a flash lamp is bent by a beam splitter to be illuminated onto an alignment mark on a wafer through a microscope optical system. An alignment signal treatment system reads output values from wafer stage interfermoters at the same time the flashing light is emitted from the flash lamp of the alignment illumination system. Since an image of the alignment mark focused on an imaging element is generated only when the flashing light is emitted, X, Y coordinate values representing a position of a wafer stage upon emission of the flashing light indicate X, Y coordinate values of the position of the wafer stage at the time when the image of the alignment mark is measured by the imaging element. An imaging element such as a CCD images a wafer alignment mark multiple times in synchronization with emission of pulse light while shifting a wafer stage. A plurality of image data are sampled and stored. A position of the wafer stage upon emission of the pulse light is measured by interferometers and stored. When the plurality of image data are added, a shift amount of the wafer stage is taken into consideration. For example, if the shift amount of the wafer stage within a time period between two successive light emissions corresponds to two pixels, the image data are deviated by two pixels. The signal may also be deviated by interpolation calculation.
    • 来自具有闪光灯的对准照明系统的光由分束器弯曲以通过显微镜光学系统照射到晶片上的对准标记上。 对准信号处理系统从对准照明系统的闪光灯发出闪烁的光的同时从晶片台接口机读取输出值。 由于仅在发出闪光时才产生对准标记的图像,所以在发出闪光时表示晶片台的位置的X,Y坐标值表示X,Y的坐标值, 在通过成像元件测量对准标记的图像时的晶片台。 诸如CCD的成像元件在移动晶片台的同时与脉冲光的发射同步地多次成像晶片对准标记。 对多个图像数据进行采样和存储。 在发射脉冲光时晶片台的位置由干涉仪测量并被存储。 当添加多个图像数据时,考虑晶片台的偏移量。 例如,如果在两次连续的发光之间的时间段内的晶片载台的移动量对应于两个像素,则图像数据偏离两个像素。 该信号也可能通过插值计算而偏离。
    • 43. 发明授权
    • Thickness extensional vibration mode piezoelectric resonator
    • 厚度拉伸振动模式压电谐振器
    • US06232698B1
    • 2001-05-15
    • US09089562
    • 1998-06-03
    • Hiroaki KaidaMitsuhiro YamadaJiro Inoue
    • Hiroaki KaidaMitsuhiro YamadaJiro Inoue
    • H01L4108
    • H03H9/178H03H9/0207
    • An energy-trap thickness extensional vibration mode piezoelectric resonator uses a harmonic of a thickness extensional vibration mode and effectively suppresses generation of unwanted spurious vibrations. The energy-trap thickness extensional vibration mode piezoelectric resonator includes a piezoelectric strip, first and second excitation electrodes located on opposite surfaces of the piezoelectric strip, and an internal electrode disposed inside the piezoelectric strip. The first and second excitation electrodes are located on opposite ends of the piezoelectric strip in an overlapping arrangement. The internal electrode is located opposite to the first and second excitation electrodes. The first and second excitation electrodes overlap each other over a length of l such that l/d is not greater than about 6, where d=t/n.
    • 能量陷阱厚度延伸振动模式压电谐振器使用厚度延伸振动模式的谐波,并有效地抑制不需要的寄生振动的产生。 能量阱厚度延伸振动模式压电谐振器包括压电条,位于压电条的相对表面上的第一和第二激励电极以及设置在压电条内的内部电极。 第一和第二激励电极以重叠布置位于压电条的相对端上。 内部电极与第一和第二激励电极相对。 第一和第二激发电极在l的长度上彼此重叠,使得l / d不大于约6,其中d = t / n。
    • 45. 发明授权
    • Door lock actuator unit
    • 门锁执行器单元
    • US5746076A
    • 1998-05-05
    • US559943
    • 1995-11-17
    • Jiro Inoue
    • Jiro Inoue
    • E05B85/24E05B17/22E05B47/00E05B77/46E05B79/08E05B81/06E05B81/34E05B81/54E05B81/72E05B83/36
    • E05B81/06E05B77/34E05B81/16E05B81/34E05B81/44E05B81/54E05B81/72E05B81/74E05B85/02Y10S292/23Y10T292/1047Y10T292/1082Y10T70/7062
    • An actuator unit for shifting a lock lever of a vehicle door lock device between a locked position and an unlocked position comprises a housing having a reversible motor, an inside lever disposed inside the housing and being shiftable by the motor, and a key lever disposed inside the housing. The inside lever has a first shaft whose outer end extends through the housing and is connected to the lock lever. The key lever has a second shaft whose outer end extends through the housing and is connected to a door key cylinder. The first and second shafts being coaxial with each other but protruding in opposite directions. The inside lever has a third shaft coaxial with the first shaft and the key lever has a hole for supporting the third shaft. The actuator unit has first detecting means provided inside the housing for detecting a position of the inside lever, and second detecting means provided inside the housing for detecting a position of the key lever.
    • 用于将车门锁装置的锁定杆在锁定位置和解锁位置之间移动的致动器单元包括具有可逆电动机的壳体,设置在壳体内部并且可由电动机移动的内杆,以及设置在内部的钥匙杆 住房。 内杆具有第一轴,其外端延伸穿过壳体并连接到锁定杆。 钥匙杆具有第二轴,其外端延伸穿过壳体并连接到门钥匙筒。 第一和第二轴彼此同轴但在相反的方向上突出。 内杆具有与第一轴同轴的第三轴,并且键杆具有用于支撑第三轴的孔。 致动器单元具有设置在壳体内部的第一检测装置,用于检测内侧杆的位置;以及第二检测装置,设置在壳体内部,用于检测钥匙杆的位置。