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    • 49. 发明授权
    • Method and apparatus for correcting astigmatism in scanning electron
microscopes and similar equipment
    • 用于校正扫描电子显微镜和类似设备中散光的方法和装置
    • US4321468A
    • 1982-03-23
    • US167134
    • 1980-07-09
    • Takashi Kimura
    • Takashi Kimura
    • H01J37/153G01N23/00
    • H01J37/153
    • This invention relates to a method of correcting astigmatism in scanning electron microscopes and similar equipment which insures accurate correction of astigmatism simply by matching an astigmatism-correcting image, appearing on part of a Braun tube screen, to a predetermined point (such as a mark) on the screen, instead of depending on skill and perception. The apparatus for correcting astigmatism in scanning electron microscopes and similar equipment according to this invention provides a simple structure to implement the above astigmatism correcting method, connecting the X direction astigmatism correcting system through a first switch to one of the horizontal and vertical scanning systems and the Y direction astigmatism correcting system through the second switch to the other thereof.
    • 本发明涉及一种校正扫描电子显微镜和类似设备中的散光的方法,其通过将出现在Braun管屏幕的一部分上的散光校正图像与预定点(例如标记)匹配来确保对像散的精确校正, 在屏幕上,而不是依赖于技能和感知。 根据本发明的用于校正扫描电子显微镜和类似设备中的像散的装置提供了实现上述散光校正方法的简单结构,其通过第一开关将X方向像散校正系统连接到水平和垂直扫描系统之一, Y方向散光校正系统通过第二个切换到另一个。