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41. 发明申请

US20050211273A1 Method for operating vacuum installations under pressure changes 有权
标题翻译：在压力变化下操作真空装置的方法
公开(公告)号：US20050211273A1
公开(公告)日：2005-09-29
申请号：US11050233
申请日：2005-02-03
申请人： Stefan Hein , Gunter Klemm
发明人： Stefan Hein , Gunter Klemm
IPC分类号： B65H5/02 , B08B5/02 , B08B5/04 , B65H23/025 , B65H27/00 , C23C14/56 , D06C3/06 , D21G1/02 , F16C13/00 , H01L21/02
CPC分类号： B65H27/00 , B65H2404/17 , F16C13/003
摘要： Method for operating vacuum installations under pressure changes between operating pressure and ambient pressure, which comprise in a vacuum chamber (V) installed elements (13, 13a) from the group electronic components, transformers, motors, roller bearings and guide rollers, provided with ventilatable coverings, the guide rollers (12) being provided with roller bearings (24), secured within the coverings on supporting bodies (7, 8). To protect these installed elements (13,13a), including the guide rollers (12) and their roller bearings, against penetration of dust and other particles during the flooding of the vacuum chamber (V), it is proposed that before flooding the vacuum chamber (V) a gas is introduced into the coverings, through which solid bodies from the group dust and particles are blown out of the coverings and the penetration of solid bodies into the coverings is prevented. The approach herein is preferably such that the gas is ducted under regulation through the coverings during the entire flooding process of the vacuum chamber (V).
摘要翻译：用于在工作压力和环境压力之间的压力变化下操作真空设备的方法，其包括在来自组电子部件，变压器，电动机，滚子轴承和导向辊的真空室（V）安装元件（13,13a）中，导向辊（12）设有滚动轴承（24），固定在支撑体（7,8）的覆盖物内。为了保护包括导向辊（12）及其滚子轴承在内的这些安装的元件（13,13a）在真空室（V）的淹没期间防止灰尘和其它颗粒的穿透，建议在真空室室（V）将气体引入到覆盖物中，来自组灰尘和颗粒的固体通过这些气体从覆盖物中吹出，并且防止了固体渗透到覆盖物中。这里的方法优选地使得气体在真空室（V）的整个淹没过程期间通过覆盖物被调节。

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