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    • 43. 发明授权
    • Polishing pad, polishing apparatus having the same, and bonding apparatus
    • 抛光垫,具有该抛光垫的研磨装置和粘合装置
    • US07090572B2
    • 2006-08-15
    • US11300291
    • 2005-12-15
    • Toshiyuki Ito
    • Toshiyuki Ito
    • B24B19/00
    • B24B37/26
    • A plurality of projections and grooves are formed on a polishing member. The grooves are formed in grid pattern. A portion on which the grooves and the projections are formed (polishing portion) has a substantially circular shape in a plane view. Around the polishing portion, an outer peripheral portion having a fixed height is provided. The height of the outer peripheral portion is equal to the height of bottom portions of the grooves. Ends of each of the grooves extend to the outer peripheral portion, which allows slurry and the like entering the grooves to flow outside via the outer peripheral portion. When a polishing pad thus structured is to be bonded to a surface plate, adhesive is applied or a double-stick tape is affixed to a rear surface of a base member, and thereafter, the polishing pad is put in place on the surface plate. Next, the polishing portion is pressed to the surface plate from an upper side, and subsequently the outer peripheral portion is pressed to the surface plate from the upper side.
    • 在研磨部件上形成有多个突起和槽。 凹槽以网格图案形成。 其上形成有凹槽和突起的部分(抛光部分)在平面图中具有大致圆形形状。 在抛光部周围设有具有固定高度的外周部。 外周部的高度等于槽的底部的高度。 每个凹槽的端部延伸到外周部分,这允许浆料等进入凹槽经由外周部分流出外部。 当将如此构造的抛光垫结合到表面板上时,施加粘合剂或将双面胶带固定到基底构件的后表面上,然后将抛光垫放置在表面板上的适当位置。 接下来,将研磨部从上侧按压到表面板,然后将外周部从上侧按压到表面板。
    • 48. 发明授权
    • Three dimensional woven fabrics of pitch-derived carbon fibers
    • 沥青衍生碳纤维的三维机织织物
    • US4975262A
    • 1990-12-04
    • US319201
    • 1989-03-06
    • Yoshinori SutoHideyuki NakajimaToshiyuki ItoSanji Arisawa
    • Yoshinori SutoHideyuki NakajimaToshiyuki ItoSanji Arisawa
    • D03D15/12D01F9/14D01F9/145D03D25/00
    • D01F9/145
    • Three dimensional woven fabrics containing bent parts of a small radius of curvature which bent parts comprise easily graphitized pitch-derived carbon fibers obtained by thermosetting treatment and light carbonization treatment carried out after melt-spinning of high softening point pitch and having a tensile strength of 15 250 Kgf/mm.sup.2, an elongation of 0.5-8.0% and modulus of elasticity of 400-40,000 Kgf/mm.sup.2 and a capability of increasing both of their tensile strength and modulus of elasticity to 1.1 times or greater than the above-mentioned values by additional heat treatment carried out under a relaxed state to have a tensile strength of 150 Kgf/mm.sup.2 or greater and a modulus of elasticity of 40,000 Kgf/mm.sup.2 or greater. They are superior in abrasion resistance, flexion-resisting property and scratch-resisting property and useful as one component of fiber composite materials in reinforcing plastics, metals, cements, ceramics, carbon materials, etc.
    • 包含弯曲部分的小曲率半曲率的弯曲部分的三维机织织物包括容易石墨化的沥青衍生的碳纤维,其通过热固化处理获得,并且在高软化点沥青熔融纺丝之后进行轻碳化处理,并且抗拉强度为15 250Kgf / mm2,伸长率为0.5-8.0%,弹性模量为400-40,000Kgf / mm2,并且将其拉伸强度和弹性模量都增加到上述值的1.1倍以上的能力 在松弛状态下进行热处理,拉伸强度为150kgf / mm 2以上,弹性模量为40,000Kgf / mm2以上。 它们具有优异的耐磨性,抗弯曲性和耐刮擦性,并且可用作增强塑料,金属,水泥,陶瓷,碳材料等中的纤维复合材料的一种组分。