专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

41. 发明申请

US20120219032A1 EXTENDABLE ELECTRODE FOR GAS DISCHARGE LASER 有权
标题翻译：用于气体放电激光器的可扩展电极
公开(公告)号：US20120219032A1
公开(公告)日：2012-08-30
申请号：US13469009
申请日：2012-05-10
申请人： Richard L. Sandstrom , Tae (Mark) H. Chung , Richard C. Ujazdowski
发明人： Richard L. Sandstrom , Tae (Mark) H. Chung , Richard C. Ujazdowski
IPC分类号： H01S3/097
CPC分类号： H01S3/038 , H01S3/0381 , H01S3/09705 , H01S3/0971 , H01S3/225 , H01S3/2366
摘要： A movable electrode assembly for use in a laser system, includes a first electrode having a first discharge surface, a second electrode having a second discharge surface. The second electrode being arranged opposite from the first electrode. The second discharge surface being spaced apart from the first discharge surface by a discharge gap. A discharge gap adjuster interfaced with at least one of the second electrode or the first electrode, the discharge gap adjuster configured to adjust the discharge gap. A method of adjusting a discharge gap is also disclosed.
摘要翻译：一种用于激光系统的可动电极组件，包括具有第一放电表面的第一电极，具有第二放电表面的第二电极。第二电极布置成与第一电极相对。第二放电表面与第一放电表面间隔开放电间隙。放电间隙调节器与第二电极或第一电极中的至少一个接合，放电间隙调节器被配置为调节放电间隙。还公开了一种调节放电间隙的方法。

42. 发明授权

US07856044B2 Extendable electrode for gas discharge laser 有权
标题翻译：气体放电激光可扩展电极
公开(公告)号：US07856044B2
公开(公告)日：2010-12-21
申请号：US11787463
申请日：2007-04-16
申请人： Richard L. Sandstrom , Tae (Mark) H. Chung , Richard C. Ujazdowski
发明人： Richard L. Sandstrom , Tae (Mark) H. Chung , Richard C. Ujazdowski
IPC分类号： H01S3/097
CPC分类号： H01S3/038 , H01S3/0381 , H01S3/09705 , H01S3/0971 , H01S3/225 , H01S3/2366
摘要： Disclosed herein are systems and methods for extending one or both of the discharge electrodes in a transverse discharge gas laser chamber in which one or both the electrodes are subject to a dimensional change due to erosion. Electrode extension can be performed to increase the chamber life, increase laser performance over the life of the chamber, or both. Operationally, the inter-electrode spacing may be adjusted to maintain a specific target gap distance between the electrodes or to optimize a specific parameter of the laser output beam such as bandwidth, pulse-to-pulse energy stability, beam size, etc.
摘要翻译：本文公开了用于在横向放电气体激光室中延伸一个或两个放电电极的系统和方法，其中一个或两个电极由于侵蚀而经受尺寸变化。可以执行电极延伸以增加室的寿命，在室的寿命或两者都增加激光器性能。可操作地，可以调整电极间间隔以维持电极之间的特定目标间隙距离或者优化激光输出光束的特定参数，例如带宽，脉冲到脉冲能量稳定性，光束尺寸等。

43. 发明申请

US20110058580A1 EXTENDABLE ELECTRODE FOR GAS DISCHARGE LASER 有权
标题翻译：用于气体放电激光器的可扩展电极
公开(公告)号：US20110058580A1
公开(公告)日：2011-03-10
申请号：US12945719
申请日：2010-11-12
申请人： Richard L. Sandstrom , Tae (Mark) H. Chung , Richard C. Ujazdowski
发明人： Richard L. Sandstrom , Tae (Mark) H. Chung , Richard C. Ujazdowski
IPC分类号： H01S3/097 , H01S3/00
CPC分类号： H01S3/038 , H01S3/0381 , H01S3/09705 , H01S3/0971 , H01S3/225 , H01S3/2366
摘要： A movable electrode assembly for use in laser system includes a first electrode, a second electrode arranged opposite from the first electrode, the second electrode being spaced apart from the first electrode by a discharge gap and a discharge gap adjuster interfaced with at least one of the second electrode or the first electrode, the discharge gap adjuster configured to adjust the discharge gap. A movable electrode assembly for integration into a housing of a laser system includes a first electrode having a discharge surface, a second electrode having a discharge surface, such that the discharge surface of the first electrode and the discharge surface of the second electrode face each other in a spaced apart setting that defines a desired discharge gap, and a mechanism for moveably adjusting the spaced apart setting toward the desired discharge gap. A method of adjusting a discharge gap is also disclosed.
摘要翻译：用于激光系统的可移动电极组件包括第一电极，与第一电极相对设置的第二电极，第二电极通过放电间隙与第一电极间隔开，放电间隙调节器与至少一个第二电极或第一电极，放电间隙调节器被配置为调节放电间隙。用于集成到激光系统的壳体中的可动电极组件包括具有放电表面的第一电极，具有放电表面的第二电极，使得第一电极的放电表面和第二电极的放电表面彼此面对在间隔开的设置中限定期望的放电间隙，以及用于可移动地将间隔开的设置调节到期望的放电间隙的机构。还公开了一种调节放电间隙的方法。

44. 发明申请

US20080013589A1 Window assembly for a gas discharge laser chamber 审中-公开
标题翻译：气体放电激光室窗组件
公开(公告)号：US20080013589A1
公开(公告)日：2008-01-17
申请号：US11488879
申请日：2006-07-17
申请人： John T. Melchior , Richard C. Ujazdowski , James K. Howey
发明人： John T. Melchior , Richard C. Ujazdowski , James K. Howey
IPC分类号： H01S3/08
CPC分类号： H01S3/034 , H01S3/0346 , H01S3/225
摘要： A window assembly for a pressurized laser discharge chamber is disclosed and may include a housing that is formed with a recess. The assembly may also include an optic having a first side that is exposed to chamber pressure and an opposed second side, and a compliant member that may be positioned in the recess to space the second side of the optic from the housing under normal chamber operating pressures. For the assembly, the compliant member may be compressible to allow the optic to mechanically abut the assembly housing during a chamber overpressure.
摘要翻译：公开了一种用于加压激光放电室的窗组件，并且可以包括形成有凹部的壳体。组件还可以包括具有暴露于腔室压力的第一侧面和相对的第二侧面的光学元件，以及柔性构件，其可以定位在凹部中，以在正常室操作压力下将光学元件的第二侧与壳体间隔开。对于组件，柔性构件可以是可压缩的，以允许光学器件在腔室超压期间机械地邻接组件壳体。

45. 发明授权

US06801560B2 Line selected F2 two chamber laser system 失效
公开(公告)号：US06801560B2
公开(公告)日：2004-10-05
申请号：US10056619
申请日：2002-01-23
申请人： David S. Knowles , Daniel J. W. Brown , Richard L. Sandstrom , German E. Rylov , Eckehard D. Onkels , Herve A. Besaucele , David W. Myers , Alexander I. Ershov , William N. Partlo , Igor V. Fomenkov , Richard C. Ujazdowski , Richard M. Ness , Scott T. Smith , William G. Hulburd
发明人： David S. Knowles , Daniel J. W. Brown , Richard L. Sandstrom , German E. Rylov , Eckehard D. Onkels , Herve A. Besaucele , David W. Myers , Alexander I. Ershov , William N. Partlo , Igor V. Fomenkov , Richard C. Ujazdowski , Richard M. Ness , Scott T. Smith , William G. Hulburd
IPC分类号： H01S322
CPC分类号： H01S3/2366 , G01J9/00 , G03F7/70025 , G03F7/70041 , G03F7/70575 , G03F7/70933 , H01S3/0057 , H01S3/0071 , H01S3/02 , H01S3/03 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0387 , H01S3/0404 , H01S3/041 , H01S3/08 , H01S3/08004 , H01S3/08009 , H01S3/08036 , H01S3/0943 , H01S3/097 , H01S3/09702 , H01S3/09705 , H01S3/0971 , H01S3/0975 , H01S3/104 , H01S3/105 , H01S3/1305 , H01S3/134 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258 , H01S3/2333
摘要： An injection seeded modular gas discharge laser system capable of producing high quality pulsed laser beams at pulse rates of about 4,000 Hz or greater and at pulse energies of about 5 mJ or greater. Two separate discharge chambers are provided, one of which is a part of a master oscillator producing a very narrow band seed beam which is amplified in the second discharge chamber. The chambers can be controlled separately permitting separate optimization of wavelength parameters in the master oscillator and optimization of pulse energy parameters in the amplifying chamber. A preferred embodiment in a F2 laser system configured as a MOPA and specifically designed for use as a light source for integrated circuit lithography. In the preferred MOPA embodiment, each chamber comprises a single tangential fan providing sufficient gas flow to permit operation at pulse rates of 4000 Hz or greater by clearing debris from the discharge region in less time than the approximately 0.25 milliseconds between pulses. The master oscillator is equipped with a line selection package for selecting the strongest F2 spectral line.

46. 发明授权

US06212211B1 Shock wave dissipating laser chamber 有权
标题翻译：冲击波消散激光室
公开(公告)号：US06212211B1
公开(公告)日：2001-04-03
申请号：US09169195
申请日：1998-10-09
申请人： James H. Azzola , Paul R. Marsden , Richard C. Ujazdowski
发明人： James H. Azzola , Paul R. Marsden , Richard C. Ujazdowski
IPC分类号： H01S300
CPC分类号： H01S3/036
摘要： A laser chamber with a circuitous gas return path dissipates shock waves. In one embodiment, the laser chamber includes a heat exchanger with a large surface area that defines an aerodynamic passage through which gas circulates in the laser chamber. The passage through which the gas circulates directs shock waves away from the discharge region so that the shock waves may dissipate elsewhere in the laser chamber. In addition, the large surface area of the heat exchanger efficiently cools the thermally energetic gas within the laser chamber. In another embodiment, ancillary chambers that are fluidically coupled to the main laser chamber are provided to permit shock waves to be directed away from the discharge area and to be dissipated within the ancillary chambers. Openings to the ancillary chambers are positioned such that shock waves generated by the electrode structure of the laser chamber may propagate directly into the ancillary chamber, where the shock waves then dissipate. Flow guides, such as blowers or flow vanes, may be provided in the ancillary chambers to generate a circulation of gas within the ancillary chambers that will support the laser chamber's flow of gas at the openings to the ancillary chambers. Thus, the circulating gas within the laser chamber remains uniform and stable.
摘要翻译：具有迂回气体返回路径的激光室消散冲击波。在一个实施例中，激光室包括具有大表面积的热交换器，该热交换器限定气体通道，气体在激光腔中循环通过。气体循环通过的通道将冲击波引导到放电区域，使得冲击波可以在激光室中的其他地方消散。此外，热交换器的大表面积有效地冷却激光室内的热能气体。在另一个实施例中，提供流体耦合到主激光室的辅助室，以允许冲击波被引导离开排放区域并在辅助腔室内消散。定位到辅助室的开口使得由激光室的电极结构产生的冲击波可以直接传播到辅助室中，其中冲击波然后消散。可以在辅助室中设置流动引导件，例如鼓风机或流动叶片，以在辅助腔室内产生气体的循环，这将支持激光腔在开口处的辅助腔室中的气体流。因此，激光室内的循环气体保持均匀且稳定。

47. 发明授权

US5978405A Laser chamber with minimized acoustic and shock wave disturbances 失效
标题翻译：激光室具有最小化的声波和冲击波干扰
公开(公告)号：US5978405A
公开(公告)日：1999-11-02
申请号：US36158
申请日：1998-03-06
申请人： Tibor Juhasz , Richard C. Ujazdowski , Herve A. Besaucele , Robert G. Ozarski , James H. Azzola
发明人： Tibor Juhasz , Richard C. Ujazdowski , Herve A. Besaucele , Robert G. Ozarski , James H. Azzola
IPC分类号： H01S3/038 , H01S3/032 , H01S3/036 , H01S3/225 , H01S3/22
CPC分类号： H01S3/036
摘要： A laser chamber has angled reflectors that reflect acoustic and shock waves away from the laser discharge area to minimize acoustic and shock wave disturbances. The angled reflector may have different configurations to assist in the dissipation of the acoustic and shock waves. For example, the angled reflector may have a modulated reflective surface, such as having grooves or holes defined within the surface. Further, the angled reflector may have a reflective surface with acoustic and shock wave absorbing properties. The reflective surface with absorbent properties may be a felt metal or have multiple layered porous surfaces. In addition, the walls of the laser chamber may be modulated to assist in the dissipation of the acoustic waves and shock waves through absorption, scattering, and by generating interference within the reflected waves. Multiple layered porous surfaces may be used along the walls to absorb and scatter incident waves. The walls of the laser chamber may also be covered with an acoustic and shock wave absorbing material, such as felt metal. In other embodiments, the walls of the laser chamber are modulated with grooves, such as triangular or rectangular horizontal grooves, which scatter incident waves and generate interference within reflected waves.
摘要翻译：激光室具有倾斜的反射器，其将声波和冲击波反射离开激光放电区域，以最小化声波和冲击波干扰。成角度的反射器可以具有不同的构造以辅助声波和冲击波的消散。例如，成角度的反射器可以具有调制的反射表面，例如在表面内限定有凹槽或孔。此外，成角度的反射器可以具有具有声波和冲击波吸收特性的反射表面。具有吸收性能的反射表面可以是毡状金属或具有多层多孔表面。此外，可以调制激光室的壁，以通过吸收，散射和在反射波内产生干涉来帮助消除声波和冲击波。沿着壁可以使用多层多孔表面来吸收和散射入射波。激光室的壁也可以用诸如毛毡金属的声波和冲击波吸收材料覆盖。在其他实施例中，激光室的壁由诸如三角形或矩形水平凹槽的凹槽调制，这些凹槽散射入射波并在反射波内产生干涉。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式