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    • 42. 发明授权
    • Method of manufacturing semiconductor device using thermal treatment that features lower speed wafer rotation at low temperatures and higher speed wafer rotation at high temperatures
    • 使用热处理的半导体器件的制造方法,其在低温下具有较低速度的晶片旋转,并且在高温下具有较高速度的晶片旋转
    • US07026260B2
    • 2006-04-11
    • US10755395
    • 2004-01-13
    • Mikio Shimizu
    • Mikio Shimizu
    • H01L21/477
    • H01L21/67248H01L21/324H01L21/8238
    • A technique capable of preventing breakage of a semiconductor wafer in a single-wafer RTP apparatus is provided. Open-loop control is made in a temperature rising process, in which the temperature of the semiconductor wafer is 500° C. or lower, and a revolution speed of the semiconductor wafer is relatively reduced to 100 rpm or lower even if the bowing of the semiconductor wafer occurs. Therefore, a centrifugal force exerted on the semiconductor wafer is reduced, whereby it becomes possible to prevent the semiconductor wafer from dropping from a stage of the single-wafer RTP apparatus. Additionally, closed-loop control is made in the temperature rising process, in which the temperature of the semiconductor wafer is higher than 500° C., and in a main treatment process, and further the revolution speed of the semiconductor wafer is relatively increased. By so doing, the almost uniform in-plane temperature of the semiconductor wafer can be achieved and the bowing of the semiconductor wafer can be prevented.
    • 提供了能够防止单晶片RTP装置中的半导体晶片破损的技术。 在半导体晶片的温度为500℃以下的升温工序中进行开环控制,即使将半导体晶片的弯曲值设定为100rpm以下,半导体晶片的旋转速度相对降低至100rpm以下 发生半导体晶片。 因此,减小了施加在半导体晶片上的离心力,从而可以防止半导体晶片从单晶片RTP装置的阶段落下。 此外,在半导体晶片的温度高于500℃的升温工艺中进行闭环控制,在主处理工艺中,进一步提高半导体晶片的转速。 通过这样做,可以实现半导体晶片的几乎均匀的面内温度,并且可以防止半导体晶片的弯曲。
    • 46. 发明授权
    • Latch for oven
    • 锁定烤箱
    • US06402208B1
    • 2002-06-11
    • US09456147
    • 1999-12-07
    • Mikio Shimizu
    • Mikio Shimizu
    • E05C1910
    • F24C15/022E05B15/0086E05B2047/0069E05C5/00Y10S292/49Y10S292/66Y10S292/69Y10T292/0929Y10T292/0932Y10T292/1039
    • A latch for an oven comprises a support plate mounted within the oven. A bracket member is pivotably supported on the support plate. A handle is fixed to the bracket member and is manually operable to move the latch between the latching and unlatching positions. A latch arm is movably supported on the support plate and connected to the bracket member to be moved between the latching and unlatching positions in accordance with the movement of the bracket member. A spring is connected between the support plate and the bracket member for biasing the bracket member toward the latching or unlatching position, selectively. First and second arcuate guide projections are integrally formed with the support plate beneath the bracket member for guiding the bracket member.
    • 用于烘箱的闩锁包括安装在烤箱内的支撑板。 托架构件可枢转地支撑在支撑板上。 把手固定到支架构件上,并且可手动操作以在闩锁位置和解锁位置之间移动闩锁。 锁定臂可移动地支撑在支撑板上并且连接到支架构件,以根据支架构件的移动在闩锁位置和解锁位置之间移动。 弹簧连接在支撑板和支架构件之间,用于选择性地将支架构件朝向锁定或解锁位置偏压。 第一和第二弓形引导突起与托架构件下方的支撑板一体地形成,用于引导托架构件。