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41. 发明授权

US07038830B2 Micro-oscillation element 有权
标题翻译：微振荡元件
公开(公告)号：US07038830B2
公开(公告)日：2006-05-02
申请号：US10926053
申请日：2004-08-26
申请人： Osamu Tsuboi , Norinao Kouma , Hisao Okuda , Hiromitsu Soneda , Satoshi Ueda , Ippei Sawaki , Yoshitaka Nakamura
发明人： Osamu Tsuboi , Norinao Kouma , Hisao Okuda , Hiromitsu Soneda , Satoshi Ueda , Ippei Sawaki , Yoshitaka Nakamura
IPC分类号： G02B26/08 , G02B26/00
CPC分类号： G02B26/0841
摘要： A micro-oscillation element includes a frame, a movable functional part, a driving mechanism, a beam extending from the functional part to the driving mechanism, and a torsion connector for connecting the frame and the beam to each other. The connector defines a rotational axis about which the functional part rotates. The rotational axis crosses the longitudinal direction of the beam. The beam is shorter than the functional part in the longitudinal direction of the rotational axis.
摘要翻译：微振荡元件包括框架，可动功能部件，驱动机构，从功能部件延伸到驱动机构的梁，以及用于将框架和梁彼此连接的扭转连接器。连接器限定了功能部件绕其旋转的旋转轴线。旋转轴线与梁的纵向方向交叉。光束比旋转轴的纵向方向上的功能部分短。

42. 发明申请

US20050277217A1 Method for manufacturing micro-structural unit 有权
公开(公告)号：US20050277217A1
公开(公告)日：2005-12-15
申请号：US11207871
申请日：2005-08-22
申请人： Norinao Kouma , Osamu Tsuboi , Hisao Okuda , Hiromitsu Soneda , Mi Xiaoyu , Satoshi Ueda , Ippei Sawaki , Yoshitaka Nakamura
发明人： Norinao Kouma , Osamu Tsuboi , Hisao Okuda , Hiromitsu Soneda , Mi Xiaoyu , Satoshi Ueda , Ippei Sawaki , Yoshitaka Nakamura
IPC分类号： B81C1/00 , B81B3/00 , H01L21/00 , H01L29/84
CPC分类号： B81C1/00626 , B81B2201/0235 , B81B2201/042 , B81B2203/0136 , B81B2203/04
摘要： A method for manufacturing a micro-structural unit is provided. By the method, micro-machining is performed on a material substrate including first through third conductive layers and two insulating layers, one of which is interposed between the first and the second conductive layers, and the other between the second and the third conductive layers. The method includes several etching steps performed on the layers of the material substrate that are different in thickness.

43. 发明申请

US20050200986A1 Micro-actuation element provided with torsion bars 有权
标题翻译：配有扭杆的微动元件
公开(公告)号：US20050200986A1
公开(公告)日：2005-09-15
申请号：US11101519
申请日：2005-04-08
申请人： Osamu Tsuboi , Yoshihiro Mizuno , Satoshi Ueda , Ippei Sawaki , Hisao Okuda , Fumio Yamagishi , Hiromitsu Soneda , Norinao Kouma
发明人： Osamu Tsuboi , Yoshihiro Mizuno , Satoshi Ueda , Ippei Sawaki , Hisao Okuda , Fumio Yamagishi , Hiromitsu Soneda , Norinao Kouma
IPC分类号： G02B26/08 , H02N1/00
CPC分类号： G02B26/0841 , G02B26/085 , H02N1/008
摘要： The micro-actuation element (X1) includes a movable unit (111), a frame (112) and a coupler (113) for connecting these, where the unit, the frame and the coupler are integrally formed in a material substrate having a multi-layer structure that consists of electroconductive layers (110a-110c), such as a core conduction layer (110b), and insulation layers (110d, 110e) intervening between the electroconductive layers (110a-110c). The movable unit (111) includes a first structure originating in the core conduction layer (110b). The frame (112) includes a second structure originating in the core conduction layer (110b). The coupler (113) includes a plurality of electrically separated torsion bars (113a, 113b) that originate in the core conduction layer (110b) and are connected continuously to the first structure and the second structure.
摘要翻译：微致动元件（X 1）包括可移动单元（111），框架（112）和用于连接它们的耦合器（113），其中单元，框架和耦合器一体形成在具有由导电层（110a-110c），例如芯导电层（110b）和介于导电层（110a-110c）之间的绝缘层（110d，110e））组成的多层结构，。可移动单元（111）包括源于芯导电层（110b）的第一结构。框架（112）包括源于芯导电层（110b）的第二结构。耦合器（113）包括多个电分离的扭力杆（113a，113b），其产生在芯导电层（110b）中并连续地连接到第一结构和第二结构。

44. 发明申请

US20050046504A1 Micro-oscillation element 失效
标题翻译：微振荡元件
公开(公告)号：US20050046504A1
公开(公告)日：2005-03-03
申请号：US10791787
申请日：2004-03-04
申请人： Mi Xiaoyu , Satoshi Ueda , Hisao Okuda , Osamu Tsuboi , Hiromitsu Soneda , Norinao Kouma , Ippei Sawaki , Yoshitaka Nakamura
发明人： Mi Xiaoyu , Satoshi Ueda , Hisao Okuda , Osamu Tsuboi , Hiromitsu Soneda , Norinao Kouma , Ippei Sawaki , Yoshitaka Nakamura
IPC分类号： G02B26/08 , G02B26/10 , H04N1/028 , H04N1/036 , H01S3/10 , H03B5/30
CPC分类号： G02B26/0841
摘要： A micro-oscillation element includes an oscillation section and a frame. The oscillation section is provided with a mirror surface and is connected to the frame via trapezoidal first and second springs. The oscillation section is located between the first spring and the second spring. Each of the first spring and the second spring is deformable along with the oscillation of the oscillation section.
摘要翻译：微振荡元件包括振荡部和框架。振荡部分设有镜面，通过梯形的第一和第二弹簧与框架相连。振荡部分位于第一弹簧和第二弹簧之间。第一弹簧和第二弹簧中的每一个与振荡部的振动一起是可变形的。

45. 发明授权

US08471152B2 Microstructure and microstructure manufacture method 有权
标题翻译：微结构和微结构制造方法
公开(公告)号：US08471152B2
公开(公告)日：2013-06-25
申请号：US13091728
申请日：2011-04-21
申请人： Yoshihiro Mizuno , Norinao Kouma , Hisao Okuda , Hiromitsu Soneda , Tsuyoshi Matsumoto , Osamu Tsuboi
发明人： Yoshihiro Mizuno , Norinao Kouma , Hisao Okuda , Hiromitsu Soneda , Tsuyoshi Matsumoto , Osamu Tsuboi
IPC分类号： H05K1/03
CPC分类号： B81C1/00698 , Y10T29/49117
摘要： A microstructure comprises a laminate structure having a first conductor, a second conductor, and an intervening insulator located between the first and the second conductors. The first conductor includes opposite faces in relation to the second conductor, side faces, and edge parts which form the boundaries of the aforementioned opposite faces and side faces. The second conductor includes an extended face extending beyond the edge parts exceeding the first conductor. The insulation film includes an area covering at least part of an edge part and/or at least part of a side face.
摘要翻译：微结构包括具有第一导体，第二导体和位于第一和第二导体之间的中间绝缘体的层压结构。第一导体包括相对于第二导体的相对面，侧面和形成上述相对面和侧面的边界的边缘部分。第二导体包括延伸超过超过第一导体的边缘部分的延伸面。绝缘膜包括覆盖边缘部分的至少一部分和/或侧面的至少一部分的区域。

46. 发明授权

US08202382B2 Method for manufacturing micro movable element 有权
标题翻译：微型可动元件制造方法
公开(公告)号：US08202382B2
公开(公告)日：2012-06-19
申请号：US12509584
申请日：2009-07-27
申请人： Norinao Kouma , Osamu Tsuboi , Yoshihiro Mizuno , Hiromitsu Soneda , Hisao Okuda , Tsuyoshi Matsumoto , Ippei Sawaki
发明人： Norinao Kouma , Osamu Tsuboi , Yoshihiro Mizuno , Hiromitsu Soneda , Hisao Okuda , Tsuyoshi Matsumoto , Ippei Sawaki
IPC分类号： B32B37/12
CPC分类号： B81C1/00825 , B81B2201/042 , B81B2203/0154 , G02B6/3518 , G02B6/3556 , G02B26/0841 , H04Q2213/13003
摘要： A method for manufacturing a micro movable element includes: forming a movable section, a frame, and a connecting section connecting the movable section with the frame on a substrate; bonding a film to a surface of the substrate in forming the movable section, the frame, and the connecting section; and patterning the film to form a support structure being bridged between the movable section and the frame.
摘要翻译：微型可动元件的制造方法包括：在基板上形成可动部，框架和将可动部与框架连接的连接部，在形成可移动部分，框架和连接部分的过程中将薄膜粘合到基板的表面上; 以及图案化所述膜以形成桥接在所述可移动部分和所述框架之间的支撑结构。

47. 发明授权

US08018118B2 Micro-oscillation element provided with weight portion, and array utilizing the same 有权
标题翻译：具有重量部分的微振动元件和利用其的阵列
公开(公告)号：US08018118B2
公开(公告)日：2011-09-13
申请号：US12145063
申请日：2008-06-24
申请人： Osamu Tsuboi , Norinao Kouma , Hiromitsu Soneda , Hisao Okuda , Yoshihiro Mizuno , Tsuyoshi Matsumoto , Ippei Sawaki
发明人： Osamu Tsuboi , Norinao Kouma , Hiromitsu Soneda , Hisao Okuda , Yoshihiro Mizuno , Tsuyoshi Matsumoto , Ippei Sawaki
IPC分类号： H02N1/00 , G02B26/08
CPC分类号： B81B3/0078 , B81B2201/033 , B81B2201/042 , B81B2203/0136 , B81B2203/0181 , B81B2203/058 , G02B26/0841
摘要： A micro-oscillation element includes a base frame, an oscillating portion, and a link portion connecting the base frame and the oscillating portion to each other. The oscillating portion has a movable functional portion, a first driving electrode connected to the movable functional portion, and a weight portion joined to the first driving electrode. The link portion defines an axis of the oscillating motion of the oscillating portion. The second driving electrode, fixed to the base frame, generates driving force for the oscillating motion in cooperation with the first driving electrode.
摘要翻译：微振荡元件包括基架，振荡部和将基架和振荡部彼此连接的连杆部。振荡部分具有可移动功能部分，连接到可移动功能部分的第一驱动电极和连接到第一驱动电极的配重部分。连杆部分限定摆动部分的摆动运动的轴线。固定在基架上的第二驱动电极与第一驱动电极协作产生用于振荡运动的驱动力。

48. 发明授权

US07906822B2 Packaged device and method of manufacturing the same 失效
标题翻译：封装装置及其制造方法
公开(公告)号：US07906822B2
公开(公告)日：2011-03-15
申请号：US12164670
申请日：2008-06-30
申请人： Yoshihiro Mizuno , Norinao Kouma , Hisao Okuda , Hiromitsu Soneda , Tsuyoshi Matsumoto , Osamu Tsuboi
发明人： Yoshihiro Mizuno , Norinao Kouma , Hisao Okuda , Hiromitsu Soneda , Tsuyoshi Matsumoto , Osamu Tsuboi
IPC分类号： H01L29/84
CPC分类号： H01L23/055 , B81B7/0038 , B81B2201/0235 , G01P1/023 , G01P15/0802 , H01L23/564 , H01L24/05 , H01L24/16 , H01L24/48 , H01L24/49 , H01L24/73 , H01L25/0657 , H01L2224/0401 , H01L2224/05553 , H01L2224/05554 , H01L2224/16 , H01L2224/48091 , H01L2224/48227 , H01L2224/48235 , H01L2224/484 , H01L2224/49175 , H01L2224/73257 , H01L2224/8192 , H01L2224/8592 , H01L2924/00014 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01014 , H01L2924/01033 , H01L2924/01047 , H01L2924/01075 , H01L2924/10161 , H01L2924/1461 , H01L2924/15153 , H01L2924/15165 , H01L2924/16195 , H01L2924/06 , H01L2924/00 , H01L2224/45099 , H01L2224/05599
摘要： A packaged device includes a package having an inner surface defining a closed internal space, a device chip fixed to the package in the internal space, and a parylene film covering at least a part of the inner surface of the package and/or at least a part of a surface of the device chip.
摘要翻译：封装装置包括具有限定封闭内部空间的内表面的封装，固定在内部空间中的封装的器件芯片和覆盖封装的内表面的至少一部分的聚对二甲苯膜和/或至少一个器件芯片表面的一部分。

49. 发明授权

US07903313B2 Micro movable element 失效
标题翻译：微动元件
公开(公告)号：US07903313B2
公开(公告)日：2011-03-08
申请号：US12397462
申请日：2009-03-04
申请人： Yoshihiro Mizuno , Norinao Kouma , Hisao Okuda , Hiromitsu Soneda , Tsuyoshi Matsumoto , Osamu Tsuboi
发明人： Yoshihiro Mizuno , Norinao Kouma , Hisao Okuda , Hiromitsu Soneda , Tsuyoshi Matsumoto , Osamu Tsuboi
IPC分类号： G02B26/08
CPC分类号： G02B26/0841
摘要： A micro movable element including a movable portion; first and second driving electrodes; first and second conductor portions electrically connected to the first and second driving electrodes, respectively; an intermediate insulating portion disposed between the first conductor portion and the second conductor portion; and a partly laminated structure portion including the first conductor portion, the intermediate insulating portion and the second conductor portion, wherein the first conductor portion has an opposed face making contact with the intermediate insulating portion, a side face adjacent to the opposed face and an edge portion forming the boundary between the opposed face and the side face, part of the edge portion opposed to the second conductor portion is covered with an insulating film, and parts of the first and second driving electrodes are not covered with an insulating film.
摘要翻译：一种微型可移动元件，包括可动部分; 第一和第二驱动电极; 分别电连接到第一和第二驱动电极的第一和第二导体部分; 设置在所述第一导体部分和所述第二导体部分之间的中间绝缘部分; 以及包括所述第一导体部分，所述中间绝缘部分和所述第二导体部分的部分层压结构部分，其中所述第一导体部分具有与所述中间绝缘部分接触的相对面，与相对面相邻的侧面和边缘形成相对面和侧面之间的边界的部分，与第二导体部分相对的边缘部分的一部分被绝缘膜覆盖，并且第一和第二驱动电极的一部分没有被绝缘膜覆盖。

50. 发明授权

US07893596B2 Micro movable element and micro movable element array 失效
标题翻译：微动元件和微动元件阵列
公开(公告)号：US07893596B2
公开(公告)日：2011-02-22
申请号：US12761123
申请日：2010-04-15
申请人： Osamu Tsuboi , Norinao Kouma , Yoshihiro Mizuno , Hisao Okuda , Hiromitsu Soneda , Tsuyoshi Matsumoto
发明人： Osamu Tsuboi , Norinao Kouma , Yoshihiro Mizuno , Hisao Okuda , Hiromitsu Soneda , Tsuyoshi Matsumoto
IPC分类号： H02N2/00
CPC分类号： B81B3/0086 , B81B2201/033 , B81B2201/042 , B81B2203/0136 , B81B2203/058 , G02B26/0841
摘要： A micro movable device suitable for suppressing deterioration of driving characteristics, and a micro movable device array including such a micro movable device are provided. The micro movable device (X1) of the present invention includes a movable portion including a first driving electrode, a second driving electrode for generating electrostatic attraction between the first driving electrode and the second driving electrode, a first conductor portion (22c) electrically connected to the first driving electrode, a second conductor portion (22b) electrically connected to the second driving electrode, and a third conductor portion (21a) which is not electrically connected to the first and the second driving electrodes and which is bonded to the first conductor portion (22c) via an insulating film (23) and bonded to the second conductor portion (22b) via the insulating film (23).
摘要翻译：提供一种适用于抑制驱动特性的劣化的微型可移动装置，以及包括这种微型可移动装置的微型可移动装置阵列。本发明的微型可移动装置（X1）包括可动部，包括第一驱动电极，用于在第一驱动电极和第二驱动电极之间产生静电吸引力的第二驱动电极，第一导体部分（22c），电连接到第一驱动电极，与第二驱动电极电连接的第二导体部分（22b）和不与第一和第二驱动电极电连接并且连接到第一导体部分的第三导体部分（21a）（22c）经由绝缘膜（23）经由绝缘膜（23）与第二导体部（22b）接合。

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