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    • 43. 发明申请
    • MANUFACTURING METHOD OF LIQUID EJECTION HEAD
    • 液体喷射头的制造方法
    • US20090136875A1
    • 2009-05-28
    • US12268740
    • 2008-11-11
    • Masahiko KubotaTamaki SatoAkihiko OkanoMaki KatoKazuhiro AsaiMasaki OhsumiYoshinori Tagawa
    • Masahiko KubotaTamaki SatoAkihiko OkanoMaki KatoKazuhiro AsaiMasaki OhsumiYoshinori Tagawa
    • G03F7/20
    • B41J2/1603B41J2/1628B41J2/1631B41J2/1632B41J2/1639B41J2/1645
    • A manufacturing method of a liquid ejection head including an ejection outlet forming member provided with an ejection outlet for ejecting liquid and a flow passage communicating with the ejection outlet is constituted by the steps of: preparing a substrate on which a flow passage wall forming member for forming a part of a wall of the flow passage and a solid layer having a shape of a part of the flow passage contact each other, wherein the flow passage wall forming member has a height, from a surface of the substrate, substantially equal to that of the solid layer; providing a first layer, on the solid layer and the flow passage wall forming member, formed of a negative photosensitive resin material for forming another part of the wall of the flow passage; exposing to light a portion of the first layer correspondingly to the another part of the wall of the flow passage; providing a second layer, on the exposed first layer, formed of a negative photosensitive resin material to constitute the ejection outlet forming member; exposing to light a portion of the second layer correspondingly to the ejection outlet forming member; and forming the ejection outlet and another part of the flow passage by removing unexposed portions of the first layer and the second layer.
    • 一种液体喷射头的制造方法,包括:喷射出口形成部件,其设置有用于喷射液体的喷射出口和与喷射口连通的流动通道的步骤包括:准备基板,在该基板上形成流路壁形成部件, 形成流路的壁的一部分,并且具有所述流路的一部分形状的固体层彼此接触,其中所述流路壁形成构件具有与所述基板的表面基本相等的高度 的固体层; 在固体层和流路壁形成构件上形成由用于形成流路的壁的另一部分的负型感光性树脂材料形成的第一层; 相对于流动通道的壁的另一部分暴露于第一层的一部分; 在暴露的第一层上形成第二层,由负性感光树脂材料形成以构成喷射出口形成部件; 对应于喷射出口形成构件暴露第二层的一部分; 以及通过去除第一层和第二层的未曝光部分而形成喷射出口和流动通道的另一部分。