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41. 发明授权

US07135861B2 Movable stage, XY stage, head carriage and tester of magnetic head or magnetic disk 有权
标题翻译：可移动平台，XY平台，头架和磁头或磁盘测试仪
公开(公告)号：US07135861B2
公开(公告)日：2006-11-14
申请号：US10803943
申请日：2004-03-19
申请人： Kyoichi Mori , Fujio Yamasaki , Toshinori Sugiyama
发明人： Kyoichi Mori , Fujio Yamasaki , Toshinori Sugiyama
IPC分类号： G01R33/00 , G01B5/00
CPC分类号： B82Y25/00 , B82Y10/00 , G11B5/012 , G11B5/3909 , G11B5/455 , G11B27/36 , G11B2005/0016 , G11B2220/20
摘要： Pressing means is provided to press a movable base to a surface of a reference base to make the movable base in contact with the surface of the reference base to thereby lock-down the movable base on the surface of the reference base. The movable base is moved while slightly floating with respect to the reference base. A movable floating mechanism is provided to float the movable base from the reference base against pressing force of the pressing means exerted on the movable base to thereby relieve the locking. A floating amount of the movable base from the reference base may be small enough to reduce or substantially remove sliding friction between the movable base and the reference base. For example, the floating amount may be as small as ten to several hundreds microns.
摘要翻译：提供压紧装置以将可移动基座按压到参考基座的表面，以使可动基座与参考基座的表面相接触，从而将可移动基座锁定在参考基座的表面上。可移动基座相对于参考基座稍微漂浮而移动。提供可移动的浮动机构，用于使可动基座从参考基座抵抗施加在可移动基座上的按压装置的压力而浮起，从而减轻锁定。来自参考基座的可移动基座的浮动量可以足够小以减小或基本上消除可移动基座和参考基座之间的滑动摩擦。例如，浮动量可以小到十到几百微米。

42. 发明授权

US06888918B2 Surface inspection method and surface inspection apparatus 有权
标题翻译：表面检查方法和表面检查装置
公开(公告)号：US06888918B2
公开(公告)日：2005-05-03
申请号：US10715767
申请日：2003-11-18
申请人： Izuo Horai , Kenji Aikou , Kyoichi Mori
发明人： Izuo Horai , Kenji Aikou , Kyoichi Mori
IPC分类号： G01B11/30 , G01N21/88 , G01N21/95 , G01N23/223 , G01B15/06
CPC分类号： G01N23/223 , G01B11/30 , G01N21/88 , G01N2021/8861 , G01N2223/076
摘要： An optical inspection unit inspects a surface of an object under inspection optically. A processing unit detects defects on the surface of the object under inspection and their features according to inspection results from the optical inspection unit, detects positions of the detected defects on the surface of the object under inspection, and classifies the detected defects according to their features. The processing unit selects the defects, on which a X-ray analysis should be performed, according to predetermined conditions about the features or the classification results of the defects. Alternatively, the processing unit displays the positions and the classification results of the defects, and an operator picks the defects, on which the X-ray analysis should be performed. A X-ray inspection unit performs the X-ray analyses on the selected or picked defects.
摘要翻译：光学检查单元在光学上检查被检查物体的表面。处理单元根据来自光学检查单元的检查结果来检测被检查物体的表面上的缺陷及其特征，检测检测对象表面上检测到的缺陷的位置，并根据其特征对检测到的缺陷进行分类。处理单元根据关于缺陷的特征或分类结果的预定条件选择应执行X射线分析的缺陷。或者，处理单元显示缺陷的位置和分类结果，并且操作者选择应执行X射线分析的缺陷。 X射线检查单元对所选或选择的缺陷进行X射线分析。

43. 发明授权

US5423111A Magnetic disk tester 失效
标题翻译：磁盘测试仪
公开(公告)号：US5423111A
公开(公告)日：1995-06-13
申请号：US110787
申请日：1993-08-23
申请人： Kyoichi Mori
发明人： Kyoichi Mori
IPC分类号： B24B39/06 , G11B5/012 , G11B5/82 , G11B33/10 , B24B49/00 , B24B51/00
CPC分类号： B24B39/06 , G11B33/10 , G11B5/012 , G11B5/82 , Y10T29/47 , Y10T82/11
摘要： A magnetic disk tester according to the present invention comprises a first head moving mechanism for fixedly mounting a first certification testing head and a burnishing head perpendicularly of a moving direction thereof and a second head moving mechanism for fixedly mounting a second certification testing head and a glide testing head perpendicularly of a moving direction thereof. The burnishing head and the glide testing head are switched by the first certification testing head and the second certification testing head, respectively, by moving a spindle in an orthogonal direction to the head moving direction.
摘要翻译：根据本发明的磁盘测试器包括：第一头移动机构，用于固定地安装第一认证测试头和垂直于其移动方向的抛光头;以及第二头移动机构，用于固定安装第二认证测试头和滑动测试头垂直于其移动方向。抛光头和滑行测试头通过分别沿着与头移动方向正交的方向移动主轴而由第一认证测试头和第二认证测试头切换。

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