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    • 41. 发明授权
    • Semi-submersible, directionally controlled drilling unit
    • 半潜式,定向控制钻井单位
    • US3974792A
    • 1976-08-17
    • US538393
    • 1975-01-03
    • Anthony John BurnellRobert Grant
    • Anthony John BurnellRobert Grant
    • B63B35/44B63H25/42G05D1/02B63H25/00
    • G05D1/0208B63B1/107B63B35/4413B63H25/42B63B2001/128
    • A drilling unit is disclosed which incorporates a submersible streamlined hull supporting a streamlined upper hull above the surface of the water by support columns and trusses. The unit is directionally controlled by transverse thrusters and in-line propulsion screws in the submersible hull which are operated by a control system to maintain station keeping over the wellhead at an optimum heading for minimizing the effects of environmental forces such as wind, current and wave action. The control system senses the vessel's heading and surge and sway motions with respect to the wellhead reference and converts this information into error signals. The bow and stern thrusters and in-line propulsion screws are then operated to produce thrust forces which reduce the respective errors. In response to the generation of a stern thrust the control system iteratively calculates a change in the bow target point position on the target circle which will make the stern thrust trend toward zero.
    • 公开了一种钻井单元,其包括通过支撑柱和桁架支撑在水表面上方的流线型上船体的潜水流线型船体。 该单元由潜水船体中的横向推进器和在线推进螺杆定向控制,这些螺旋桨由控制系统操作,以将站保持在井口上,以最小化最小化环境力(如风,电流和波浪)的影响 行动。 控制系统检测船舶的航向,相对于井口参考的浪涌和摇摆运动,并将该信息转换为误差信号。 然后操作弓和推进器和在线推进螺钉产生推力,从而减少相应的误差。 响应于产生严厉的推力,控制系统迭代地计算目标圆上的弓目标点位置的变化,这将使得尾部推力趋向零。
    • 47. 发明授权
    • Selective etching of oxides from substrates
    • 从基底中选择性地蚀刻氧化物
    • US07431853B2
    • 2008-10-07
    • US11370541
    • 2006-03-08
    • Paul D. MumbauerPaul RomanRobert Grant
    • Paul D. MumbauerPaul RomanRobert Grant
    • C23F1/00
    • H01L21/31116B81C1/00595B81C1/0092B81C1/00928
    • A method and system for release etching a micro-electrical-mechanical-systems (MEMS) device from a substrate. In one aspect, the invention is a method comprising (a) supporting at least one substrate having a sacrificial oxide and a non-sacrificial material in a process chamber at a pressure and at a temperature; (b) introducing a gas phase mixture comprising a halide-containing species and an alcohol vapor selected from a group consisting of ethanol, 1-propanol, and an aliphatic alcohol having four carbon groups into the process chamber, the gas phase mixture having a volumetric ratio of the halide-containing species to the alcohol vapor of approximately 2 or less; and (c) etching the sacrificial oxide with the gas phase mixture. In another aspect, the invention is a system for carrying out the method.
    • 一种用于从基板释放蚀刻微电子机械系统(MEMS)器件的方法和系统。 在一个方面,本发明是一种方法,其包括(a)在压力和温度下在处理室中支撑具有牺牲氧化物和非牺牲材料的至少一个衬底; (b)将含有卤化物的物质和选自乙醇,1-丙醇和具有四个碳原子的脂族醇的醇蒸气的气相混合物引入处理室,气相混合物具有体积 含卤素物质与醇蒸气的比例约为2或更小; 和(c)用气相混合物蚀刻牺牲氧化物。 另一方面,本发明是一种执行该方法的系统。
    • 50. 发明申请
    • Electrochemical sensor
    • US20070039821A1
    • 2007-02-22
    • US10574640
    • 2004-09-23
    • Robert Grant
    • Robert Grant
    • G01N27/26
    • G01N27/4074G01N33/0047
    • An organic contaminant molecule sensor is described for use in a low oxygen concentration monitored environment. The sensor comprises an electrochemical call comprising a solid state oxygen anion conductor (14) in which oxygen anion conduction occurs at or above a critical temperature Tc, an active measurement electrode (10) formed on a first surface (12) of the conductor for exposure to the monitored environment, the measurement electrode comprising material for catalysing the oxidation of an organic contaminant molecule to carbon dioxide and water, an inert measurement electrode (18), formed on the first surface (12) of the conductor adjacent to and independent from the active measurement electrode, for exposure to the monitored environment, the inert measurement electrode comprising material that is catalytically inert to the oxidation of an organic contaminant molecule, and a reference electrode (20) formed on a second surface (22) of the conductor for exposure to a reference environment, the reference electrode comprising material for catalysing the dissociative adsorption of oxygen. Means (30, 32) are provided for controlling and monitoring the temperature of the cell. Means (34) are also provided for controlling the electrical current Ia flowing between the reference electrode and the active measurement electrode and the electrical current Ii flowing between the reference electrode and the inert measurement electrode, thereby to control the flux of oxygen anions flowing between the reference electrode and the active and inert measurement electrodes respectively. The potential difference between the active measurement electrode and the inert electrode is monitored (36), whereby in the absence of organic contaminant molecules the potential difference Vsense between the active and inert measurement electrodes assumes a base value Vb and in the presence of organic contaminant molecules the potential difference Vsense between the active and inert measurement electrodes assumes a measurement value Vm, the value Vm-Vb being indicative of the concentration of organic contaminant molecules present in the monitored environment.