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    • 45. 发明申请
    • EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE
    • 曝光装置及其制造方法
    • US20120170010A1
    • 2012-07-05
    • US13329747
    • 2011-12-19
    • Keiji YamashitaYasuyuki Tamura
    • Keiji YamashitaYasuyuki Tamura
    • G03B27/42
    • G03F7/70341G03B27/42G03F7/70716
    • An exposure apparatus which projects a pattern of an original onto a substrate via a liquid to expose the substrate, includes a substrate stage which holds the substrate and moves, the substrate stage including a peripheral member arranged to surround a region in which the substrate is arranged, the peripheral member having a holding surface which holds the liquid, wherein a trench which traps the liquid is formed in the peripheral member, and the trench is arranged to surround the region in which the substrate is arranged, and includes a bottom portion, an inner-side surface extending from the holding surface toward the bottom portion, and an outer-side surface, the inner-side surface having a slant which increases stepwise or continuously in a direction away from the holding surface, and the outer-side surface is provided with a spattering preventing portion which prevents spattering of the liquid trapped by the trench.
    • 通过液体将原稿的图案投影到基板上以暴露基板的曝光装置包括:保持基板并移动的基板台,所述基板台包括布置成围绕布置基板的区域的周边部件 所述周边部件具有保持液体的保持面,其中,在所述周缘部件中形成有捕获液体的沟槽,并且所述沟槽被配置为包围所述基板配置的区域,并且包括底部, 从所述保持面朝向所述底部延伸的内侧面,以及外侧面,所述内侧面具有在远离所述保持面的方向上逐步或连续地延伸的倾斜,所述外侧面为 设置有防止由沟槽捕获的液体飞溅的防溅部。
    • 47. 发明申请
    • LIQUID DISCHARGE METHOD AND LIQUID DISCHARGE HEAD
    • 液体排放方法和液体排放头
    • US20090256887A1
    • 2009-10-15
    • US12373231
    • 2007-08-08
    • Takashi InoueYasuyuki Tamura
    • Takashi InoueYasuyuki Tamura
    • B41J2/14B41J2/05
    • B41J2/14137B41J2002/14169B41J2002/1437
    • A liquid discharge method allowing a liquid inside a flow path to be heated by a heat generating element (2), thereby to generate a bubble by using a liquid discharge head including an orifice plate (4) having a discharge port (5), heat generating elements symmetrically disposed on the surface opposite to the liquid discharge surface of the orifice plate with the discharge port as a center, and the flow path communicating with the discharge port, and allowing liquid discharged from the discharge port by a volume change accompanied with a generation of bubble, wherein bubble is allowed to advance into the discharge port, and a top end of bubble is allowed to reach at least up to liquid discharge surface (8) of the orifice plate, and a columnar liquid inside the discharge port sandwiched between bubbles is separated by a contraction force caused by a surface tension toward the center of the discharge port.
    • 一种允许流路内的液体被发热元件(2)加热的液体排出方法,从而通过使用包括具有排出口(5)的孔板(4)的液体排出头产生气泡,加热 发生元件,对称地设置在与排出口为中心的孔板的液体排出面相反的表面上,并且与排出口连通的流路,并且允许从排出口排出的液体伴随着 产生气泡,其中允许气泡进入排出口,并且允许气泡顶端至少达到孔板的液体排出表面(8),并且排出口内部的柱状液体夹在 气泡被表面张力引起的朝向排出口的中心的收缩力分离。
    • 48. 发明授权
    • Ink jet printing apparatus and ink jet printing method
    • 喷墨打印设备和喷墨打印方法
    • US07374265B2
    • 2008-05-20
    • US10998600
    • 2004-11-30
    • Toru YamaneYasuyuki Tamura
    • Toru YamaneYasuyuki Tamura
    • B41J29/38
    • B41J2/04505B41J2/04541B41J2/04543B41J2/04573B41J2/0458B41J2/145B41J2202/20
    • An ink jet printing apparatus and an ink jet printing method are provided which, when printing small ink droplets at high resolution, can make white lines caused by an “end dot deflection” less visually conspicuous. To that end, an ink jet print head used has a plurality of nozzle substrates arranged that an overlapping region in which the printable areas of respective nozzle substrates partly overlap is formed. According to a print density to be achieved, each of the nozzles corresponding to the overlapping region is controlled for ejection/non-ejection of ink. With this method, it is possible to print as many dots as most match the intensity of the “end dot deflection” phenomenon that varies according to the print density. This enables a blank line to be filled with an appropriate number of dots at all times, regardless of the width of the blank line.
    • 提供了一种喷墨打印设备和喷墨打印方法,当以高分辨率打印小墨滴时,可以使由“端点偏转”引起的白线在视觉上不明显。 为此,使用的喷墨打印头具有多个喷嘴基板,该喷嘴基板被布置成使得各个喷嘴基板的可打印区域部分重叠的重叠区域。 根据要实现的打印浓度,控制对应于重叠区域的每个喷嘴以喷射/不喷墨。 利用这种方法,可以打印最多匹配根据打印浓度而变化的“终点偏转”现象的强度的点数。 这使得能够始终以适当数量的点填充空白线,而与空白线的宽度无关。