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41. 发明授权

US10209156B2 Micromachined pressure sensor and method of making the same 有权
公开(公告)号：US10209156B2
公开(公告)日：2019-02-19
申请号：US15380035
申请日：2016-12-15
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
IPC分类号： G01L9/00
摘要： The design and manufacture method of a pressure sensor utilizing thermal field sensing with a thermal isolated membrane of a diaphragm structure is disclosed in the present invention. This device is made with silicon micromachining (a.k.a. MEMS, Micro Electro Mechanical Systems) process for applications of pressure measurement with large dynamic range, high accuracy and high stability during temperature variation. This device is applicable for all types of pressure metrology. The said thermal field pressure sensing device operates with thermistors on a membrane of the diaphragm structure made of silicon nitride with a heat isolation cavity underneath or a single side thermal isolated silicon nitride membrane with a reference cavity. This device can be seamlessly integrated with a thermal flow sensor with the same process.

42. 发明授权

US10066976B2 Vortex flow meter with micromachined sensing elements 有权
公开(公告)号：US10066976B2
公开(公告)日：2018-09-04
申请号：US15177208
申请日：2016-06-08
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
IPC分类号： G01F1/32 , G01F1/684
摘要： The design and structure of a vortex flow meter with large dynamic range utilizing a micro-machined thermal flow sensing device for simultaneously measurement of volumetric flowrate via vortex street frequency as well as mass flowrate is exhibited in this disclosure. The micro-machined thermal flow sensing device is placed at the central point of a channel inside the bluff body where the channel direction is not perpendicular to the direction of fluid flow in the conduit. The thermal flow sensing device is operating in a time-of-flight principle for acquiring the vortex street frequency such that any surface conditions of the device shall not have significant impact to the measured values. With a temperature thermistor on the same micro-machined thermal flow sensing device, the vortex flow meter shall be able to output the fluid temperature as well as the fluid pressure.

43. 发明申请

US20170356772A1 VORTEX FLOW METER WITH MICROMACHINED SENSING ELEMENTS 审中-公开
公开(公告)号：US20170356772A1
公开(公告)日：2017-12-14
申请号：US15177208
申请日：2016-06-08
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
IPC分类号： G01F1/32 , G01F1/684
CPC分类号： G01F1/3218 , G01F1/6845
摘要： The design and structure of a vortex flow meter with large dynamic range utilizing a micro-machined thermal flow sensing device for simultaneously measurement of volumetric flowrate via vortex street frequency as well as mass flowrate is exhibited in this disclosure. The micro-machined thermal flow sensing device is placed at the central point of a channel inside the bluff body where the channel direction is not perpendicular to the direction of fluid flow in the conduit. The thermal flow sensing device is operating in a time-of-flight principle for acquiring the vortex street frequency such that any surface conditions of the device shall not have significant impact to the measured values. With a temperature thermistor on the same micro-machined thermal flow sensing device, the vortex flow meter shall be able to output the fluid temperature as well as the fluid pressure.

44. 发明申请

US20170097252A1 COMPOSITE MEMS FLOW SENSOR ON SILICON-ON-INSULATOR DEVICE AND METHOD OF MAKING THE SAME 审中-公开
公开(公告)号：US20170097252A1
公开(公告)日：2017-04-06
申请号：US14875534
申请日：2015-10-05
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
IPC分类号： G01F1/684 , G01F1/692
CPC分类号： G01F1/6845 , G01F1/692 , G01F1/7084 , G01F7/00
摘要： The present invention disclosed a micromachined composite silicon flow sensor that is comprised of calorimetric and anemometric flow sensing elements, time-of-flight sensing elements as well as independent temperature sensing elements on a silicon-on-insulator device where the device layer is used for the thermal isolation membrane. The disclosed composite silicon flow sensor can measure mass flowrate, volumetric flowrate and flow medium temperature simultaneously, from which a full spectrum of flow parameters including flow pressure can be obtained. The sensor can be further used to alert any changes in physical properties of flow medium during operation. The disclosed manufacture process details the micromachining process of making such a sensor.

45. 发明授权

US09360357B2 Micromachined mass flow sensor with condensation prevention and method of making the same 有权
标题翻译：微加速质量流量传感器，防止凝结，并制作相同的方法
公开(公告)号：US09360357B2
公开(公告)日：2016-06-07
申请号：US13847045
申请日：2013-03-19
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
IPC分类号： G01F1/699 , G01F1/684 , G01F1/692
CPC分类号： G01F1/699 , G01F1/6845 , G01F1/692
摘要： The design and manufacture method of a silicon mass flow sensor made with silicon micromachining (a.k.a. MEMS, Micro Electro Mechanical Systems) process for applications of gas flow measurement with highly humidified or liquid vapors is disclosed in the present invention. The said silicon mass flow sensor operates with an embedded heater and an adjacent control temperature sensor beneath the integrated calorimetric and thermal dissipative sensing thermistors. When the condensation takes place at the surface of the said silicon mass flow sensor, the embedded heater shall be turned on to elevate the temperature of the supporting membrane or substrate for the sensing thermistors. The elevated temperature shall be adjusted to above the vaporization temperature with the feedback data of the adjacent temperature sensor such that the surface condensation due to the presence of the liquid vapors in a gas flow can be effectively eliminated.
摘要翻译：在本发明中公开了使用硅微加工（a.k.a.Microchip，Micro Electro Mechanical Systems）制造的硅质量流量传感器的设计和制造方法，其用于具有高度加湿或液体蒸气的气流测量的应用。所述硅质量流量传感器使用嵌入式加热器和在集成的量热和热耗散感测热敏电阻之下的相邻控制温度传感器来操作。当冷凝发生在所述硅质量流量传感器的表面时，嵌入式加热器应被打开以升高感测热敏电阻的支撑膜或基底的温度。应使用相邻温度传感器的反馈数据将升高的温度调节到高于蒸发温度，以便能够有效地消除气流中存在液体蒸汽的表面冷凝。

46. 发明授权

US08994552B2 MEMS utility meters with exchangeable metrology unit 有权
标题翻译：具有可更换计量单元的MEMS功率表
公开(公告)号：US08994552B2
公开(公告)日：2015-03-31
申请号：US13662520
申请日：2012-10-28
申请人： Changming Jiang , Yong Feng , Sugang Jiang , Chih-Chang Chen , Liji Huang
发明人： Changming Jiang , Yong Feng , Sugang Jiang , Chih-Chang Chen , Liji Huang
IPC分类号： G01F5/00 , G08C15/06 , H04Q9/00
CPC分类号： H04Q9/00 , H04Q2209/43 , H04Q2209/60
摘要： An all-electronic utility gas meter using with micromachined (a.k.a. MEMS Micro Electro Mechanical Systems) silicon sensor to measure gas metrology data for custody transfer or tariff in city gas metering application is disclosed in the present invention. The meter has two separate metrology units. One of the units is located in the main flow channel with the insertion probing configuration while the other is configured as a bypass unit assembly with the main metrology unit. The bypass metrology unit can perform independent metrology tasks and can be exchanged onsite during service, maintenance or repair without dismantle the meter from the service pipeline. The bypass metrology unit also can be used to compare the measured data from time to time and performance self-diagnosis that shall help the performance and data authentication during the meter field service. Both of the units can be powered by battery or external sources. The units can be connected to network as well as provide internal plural storages for data transmission and safety.
摘要翻译：在本发明中公开了一种使用微机械（即微机电MEMS机电系统）硅传感器来测量用于城市燃气计量应用中的监管转移或关税的气体计量数据的全电气公用事业气体计量器。仪表有两个独立的计量单位。其中一个单元位于具有插入探测配置的主流道中，而另一个被配置为与主计量单元的旁路单元组件。旁路计量单元可以执行独立的计量任务，并可在维修，维护或维修期间进行现场交换，而无需将仪表从服务管道拆除。旁路计量单元还可用于比较不时测量的数据和性能自我诊断，这将有助于仪表现场服务期间的性能和数据认证。这两个单元可以由电池或外部来源供电。这些单元可以连接到网络，并提供用于数据传输和安全的内部多个存储。

47. 发明申请

US20140318960A1 MICROMACHINED OXYGEN SENSOR AND METHOD OF MAKING THE SAME 有权
标题翻译：微孔氧传感器及其制造方法
公开(公告)号：US20140318960A1
公开(公告)日：2014-10-30
申请号：US13870914
申请日：2013-04-25
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
IPC分类号： G01N27/407
CPC分类号： G01N27/4073 , G01N27/4071 , G01N27/409
摘要： The design and manufacture method of an oxygen concentration sensor made with silicon micromachining (a.k.a. MEMS, Micro Electro Mechanical Systems) process for applications of oxygen measurement with fast response time and low power consumption is disclosed in the present invention. The said silicon oxygen concentration sensor operates with an yttrium stabilized zirconia oxide amperometric cell supported on a membrane made of silicon nitride with a heat isolation cavity underneath or a silicon nitride membrane with silicon plug for mechanical strength enforcement.
摘要翻译：在本发明中公开了用硅微加工（a.k.a.MicroSystem，Micro Electro Mechanical Systems）制造的氧浓度传感器的设计和制造方法，该方法用于具有快速响应时间和低功耗的氧测量应用。所述硅氧浓度传感器用支撑在由氮化硅制成的膜上的钇稳定的氧化锆氧化物电流计单元进行操作，或者具有用于机械强度实施的硅插头的氮化硅膜。

48. 发明申请

US20140268440A1 Micromachined High Breakdown Voltage ESD Protection Device for Light Emitting Diode and Method of Making the Same 审中-公开
标题翻译：用于发光二极管的微加工高击穿电压ESD保护装置及其制造方法
公开(公告)号：US20140268440A1
公开(公告)日：2014-09-18
申请号：US13795489
申请日：2013-03-12
申请人： Chih-Chang Chen , Liji Huang
发明人： Chih-Chang Chen , Liji Huang
IPC分类号： H02H9/04
CPC分类号： H02H9/046 , H01L27/0248
摘要： This invention relates to a micromachined ESD protection device and its microfabrication method for light emitting diode (LEDs) chips. The LEDs is coupled to the ESD protection device in a shunt connection to absorb and eliminate the electrostatic charges induced by human contact or other voltage spike sources. The ESD protection circuit can prevent the LED from burning down and extend its lifespan. By using a thick polyimide layer as the dielectric film for capacitors in the micromachined ESD protection device at the current invention has the advantages with high breakdown voltage compared to other ESD protection circuits. And furthermore, the device in the current invention is easy for mass production with low manufacturing cost. Another embodiment of the present invention is that the multiple-array arrangement in current micromachined ESD protection device could greatly enhance the liability due to multiple-protection and thus to provide the possibility of multiple-times usage.
摘要翻译：本发明涉及一种用于发光二极管（LED）芯片的微加工ESD保护器件及其微细加工方法。 LED在分流连接中耦合到ESD保护装置，以吸收和消除由人接触或其它电压尖峰源引起的静电电荷。 ESD保护电路可以防止LED燃烧，延长使用寿命。通过使用厚聚酰亚胺层作为本发明的微加工ESD保护器件中的电容器用电介质膜，具有与其它ESD保护电路相比具有高击穿电压的优点。此外，本发明的装置容易进行批量生产，制造成本低。本发明的另一个实施例是当前微加工ESD保护装置中的多阵列布置可以大大增强由于多重保护引起的责任，从而提供多次使用的可能性。

49. 发明申请

US20120024054A1 HIGH ACCURACY BATTERY-OPERATED MEMS MASS FLOW METER 有权
标题翻译：高精度电池操作的MEMS质量流量计
公开(公告)号：US20120024054A1
公开(公告)日：2012-02-02
申请号：US12847881
申请日：2010-07-30
申请人： Liji Huang , Kai Peng , Changming Jiang , Wenhong Deng , Chih-Chang Chen
发明人： Liji Huang , Kai Peng , Changming Jiang , Wenhong Deng , Chih-Chang Chen
IPC分类号： G01F1/692
CPC分类号： G01F1/6845
摘要： With increasing demands on data communication and remote control in current industrial processes or gas measurement applications, development of new technologies would be necessary. The current invention presents a MEMS mass flow meter that are cost compatible with conventional variable area flow meters while providing all digital data process including accumulated flow rate measurements, user programmable flow rate alarm and flow data storage. These in-line meters provide packages in pipe diameter from 4 mm up to 100 mm. It is powered with battery and can be used as a stand-alone hand-held option. The meter is also equipped with the industrial standard RS485 Modbus communication interface for easy network and remote management.
摘要翻译：随着当前工业过程或气体测量应用中对数据通信和远程控制的需求不断增加，新技术的开发将是必要的。本发明提出了一种MEMS质量流量计，其与传统的可变区域流量计成本兼容，同时提供所有数字数据处理，包括累积流量测量，用户可编程流量报警和流量数据存储。这些直列式仪表提供管直径从4 mm到100 mm的包装。它由电池供电，可用作独立的手持选项。该仪表还配有工业标准RS485 Modbus通讯接口，便于网络和远程管理。

50. 发明申请

US20110283812A1 Integrated Micro-machined Air Flow Velocity Meter for Projectile Arms 有权
标题翻译：集成微加工空气流量计的弹丸
公开(公告)号：US20110283812A1
公开(公告)日：2011-11-24
申请号：US12786233
申请日：2010-05-24
申请人： Liji Huang , Wei Ching , Chih-Chang Chen
发明人： Liji Huang , Wei Ching , Chih-Chang Chen
IPC分类号： G01F1/44
CPC分类号： G01F1/692 , F41G1/40 , F41G1/46 , F41G1/473 , G01F1/6845
摘要： An apparatus integrated with micromachined (a.k.a. MEMS, Micro Electro Mechanical Systems) silicon sensor to measure air flow velocity on targeting correction for projectiles arms is disclosed in the present invention. The air flow velocity component perpendicular to the travel direction of bullets with respect to projectile arm body (e.g. bullets, shells, or arrows) has main effect to the targeting accuracy. Such effect is pretty much determined by the wind speed and the projectile travel distance. The integration with MEMS mass flow sensor has made the invented apparatus possible to be compact, low power consumption, low cost and high accuracy. The low power consumption characteristic of MEMS mass flow sensor is especially crucial for making the apparatus of present invention feasible by battery operated.
摘要翻译：在本发明中公开了一种与微机械（即微机电微机电系统）微机电系统集成的装置，用于测量针对射弹臂的目标校正的空气流速。相对于射弹臂体（例如子弹，外壳或箭头），子弹的行进方向垂直的气流速度分量对瞄准精度有主要影响。这种影响几乎取决于风速和射弹行程距离。与MEMS质量流量传感器的集成使得本发明的设备可以紧凑，低功耗，低成本和高精度。 MEMS质量流量传感器的低功耗特性对于通过电池供电使本发明的装置变得可行是特别关键的。

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