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    • 42. 发明授权
    • Method and apparatus for observing and inspecting defects
    • 观察和检查缺陷的方法和装置
    • US07499162B2
    • 2009-03-03
    • US11475667
    • 2006-06-26
    • Yukihiro ShibataShunji MaedaKazuo YamaguchiMinoru YoshidaAtsushi YoshidaKenji OkaKenji Watanabe
    • Yukihiro ShibataShunji MaedaKazuo YamaguchiMinoru YoshidaAtsushi YoshidaKenji OkaKenji Watanabe
    • G01J4/00
    • G01N21/21G01N21/9501G01N21/956G01N21/95607G02B21/0016
    • A defect inspecting apparatus includes a sample mounting device for mounting a sample; lighting and detecting apparatus for illuminating a patterned sample mounted on a mount and detecting the optical image of the reflected light obtained therefrom. Also included is a display for displaying the optical image detected by this lighting and detecting apparatus; an optical parameter setting device for setting and displaying optical parameters for the lighting and detecting apparatus on the display; and optical parameter adjusting apparatus for adjusting optical parameters set for the lighting and detecting apparatus according to the optical parameters set by the optical parameter setting apparatus; a storage device for storing comparative image data; and a defect detecting device for detecting defects from patterns formed on the sample by comparing the optical image detected by the optical image detecting apparatus with the comparative image data stored in the storage.
    • 缺陷检查装置包括用于安装样品的样品安装装置; 照明和检测装置,用于照亮安装在安装件上的图案样品,并检测由其获得的反射光的光学图像。 还包括用于显示由该照明和检测装置检测的光学图像的显示器; 用于在显示器上设置和显示照明和检测装置的光学参数的光学参数设置装置; 以及光学参数调整装置,用于根据由所述光学参数设定装置设定的光学参数来调整对所述照明和检测装置设定的光学参数; 用于存储比较图像数据的存储装置; 以及缺陷检测装置,用于通过将由光学图像检测装置检测的光学图像与存储在存储器中的比较图像数据进行比较来检测在样本上形成的图案的缺陷。
    • 43. 发明授权
    • Image forming apparatus and image forming method with cleaner portion
    • 具有清洁部分的图像形成装置和图像形成方法
    • US07477863B2
    • 2009-01-13
    • US11701435
    • 2007-02-02
    • Takeshi WatanabeMasashi TakahashiMinoru YoshidaShoko Shimmura
    • Takeshi WatanabeMasashi TakahashiMinoru YoshidaShoko Shimmura
    • G03G21/00
    • G03G21/0064G03G2215/0119
    • A color image forming apparatus includes an intermediate transfer member, a first forming portion having a first transfer unit, a second forming portion provided downstream from the first forming portion, a third forming portion provided downstream from the second forming portion, a fourth forming portion provided downstream from the third forming portion, and a control portion. The control portion controls a bias of at least one of the corresponding developing unit and the corresponding transfer unit, when transfer of the toner image from the intermediate transfer member to the recording medium is completed, so that a toner-image residue toner material resting on the intermediate transfer member is returned to the corresponding developing unit through the image bearing member of at least one of the first to fourth forming portions.
    • 彩色图像形成装置包括中间转印部件,具有第一转印单元的第一成形部分和设置在第一成形部分下游的第二成形部分,设置在第二成形部分下游的第三成形部分, 在第三形成部分的下游,以及控制部分。 当调色剂图像从中间转印部件转印到记录介质上时,控制部分控制对应的显影单元和相应的转印单元中的至少一个的偏压,使得调色剂图像残留调色剂材料搁置在 中间转印构件通过第一至第四形成部分中的至少一个的图像承载构件返回到相应的显影单元。
    • 44. 发明授权
    • Method and apparatus for detecting defects of a sample using a dark field signal and a bright field signal
    • 使用暗场信号和亮场信号来检测样本的缺陷的方法和装置
    • US07463350B2
    • 2008-12-09
    • US10981721
    • 2004-11-05
    • Hidetoshi NishiyamaMinoru YoshidaYukihiro ShibataShunji Maeda
    • Hidetoshi NishiyamaMinoru YoshidaYukihiro ShibataShunji Maeda
    • G01N21/00
    • G01N21/95684
    • Disclosed is a method and apparatus for inspecting defects of patterns of a sample at high speed and with high sensitivity while damage of the sample arising from high-power pulsed light is reduced. Light emitted from a pulsed laser light source is transmitted through a pseudo continuous-wave forming optical system having an optical system capable of reducing energy per pulse and yet maintaining the entire amount of light of the pulsed light, a beam formation optical system, and a coherence reduction optical system, and a beam deflected by a deformation illumination optical system is made to reflect on a PBS to be irradiated on a wafer. The apparatus is configured so that the diffracted light from the wafer is focused by an objective lens, transmitted through light modulation units, focused to form a plurality of images on a plurality of image sensors in a visual-field divided parallel detection unit 12, and then defects are detected by a signal processing unit.
    • 公开了一种用于在高功率脉冲光下产生的样品损坏的情况下高速且高灵敏度地检查样品的图案的缺陷的方法和装置。 从脉冲激光光源发出的光通过伪连续波形成光学系统传输,该光学系统具有能够减少每脉冲能量并且仍保持脉冲光的光量,光束形成光学系统和 相干降低光学系统和由变形照明光学系统偏转的光束在PBS上反射以照射在晶片上。 该装置被配置为使得来自晶片的衍射光被物镜聚焦,透镜通过光调制单元被聚焦以在视野分割并行检测单元12中的多个图像传感器上形成多个图像,以及 那么由信号处理单元检测到缺陷。
    • 50. 发明授权
    • Acetyllysine-recognizing monoclonal antibody and process for producing the same
    • 乙酰赖氨酸识别单克隆抗体及其制备方法
    • US07204984B2
    • 2007-04-17
    • US10471475
    • 2002-03-13
    • Yasuhiko KomatsuMinoru Yoshida
    • Yasuhiko KomatsuMinoru Yoshida
    • C12N15/13A61K39/395
    • C07K16/44
    • Anti-acetyllysine monoclonal antibody capable of recognizing Nε-acetyllysine regardless of the types of the adjacent amino acids. Namely, a monoclonal antibody having a light chain comprising a constant region having the amino acid sequence represented by SEQ ID NO:1 and a variable region having the amino acid sequence represented by SEQ ID NO:2 or an amino acid sequence derived from this amino acid sequence by deletion, substitution or addition of one to several amino acids, and a heavy chain comprising a constant region having the amino acid sequence represented by SEQ ID NO:3 and a variable region having the amino acid sequence represented by SEQ ID NO:4 or an amino acid sequence derived from this amino acid sequence by deletion, substitution or addition of one to several amino acids, and being capable of recognizing Nε-acetyllysine in a protein regardless of the types of the adjacent amino acids, i.e., being capable of accepting adjacent amino acids over a broad range; and a process for producing this monoclonal antibody characterized by using a chemically acetylated protein as an antigen.
    • 能够识别Nε - 乙酰赖氨酸的抗乙酰赖氨酸单克隆抗体,不管相邻氨基​​酸的类型如何。 即,具有包含具有由SEQ ID NO:1表示的氨基酸序列的恒定区和具有由SEQ ID NO:2表示的氨基酸序列的可变区的氨基酸序列的轻链的单克隆抗体或由该氨基 通过缺失,取代或添加一至几个氨基酸的酸序列,以及包含具有SEQ ID NO:3所示氨基酸序列的恒定区的重链和具有由SEQ ID NO:3表示的氨基酸序列的可变区。 4或由该氨基酸序列衍生的氨基酸序列,通过缺失,取代或添加一至几个氨基酸,并且能够识别蛋白质中的Nε - 乙酰赖氨酸,而不管 相邻的氨基酸,即能够在宽范围内接受相邻的氨基酸; 其特征在于使用化学乙酰化蛋白作为抗原的该单克隆抗体的制备方法。