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    • 42. 发明授权
    • Method and apparatus for forming a diamond film
    • 用于形成金刚石膜的方法和装置
    • US5099788A
    • 1992-03-31
    • US547162
    • 1990-07-03
    • Nobuei ItoMinoru YamamotoSatoshi NakamuraTadashi Hattori
    • Nobuei ItoMinoru YamamotoSatoshi NakamuraTadashi Hattori
    • C23C16/27C23C16/513C23C16/52
    • C23C16/276C23C16/513C23C16/52
    • A method and apparatus for forming a diamond film, has a casing in which vacuum is maintained at a predetermined value. A substrate is disposed within the casing so that the diamond film is formed thereon. A gas plasma generator for generating a gas plasma near the substrate from a plasma source gas and a carbon source gas by an arc discharge is provided within the casing. A detector detects a factor which is related to a change in a surface temperature of the diamond film, and an electronic controller controls in response to the detected factor the surface temperature of the diamond film so as to maintain such temperature near a predetermined optimal value for forming the diamond film. As the surface temperature is maintained near the optimal value by a feedback control, high purity diamond film is obtained irrespective of the thickness or the forming time thereof.
    • 用于形成金刚石膜的方法和装置具有其中真空保持在预定值的壳体。 衬底设置在壳体内,使得金刚石膜形成在其上。 一种用于通过电弧放电从等离子体源气体和碳源气体在基板附近产生气体等离子体的气体等离子体发生器。 检测器检测与金刚石膜的表面温度变化有关的因素,并且电子控制器根据检测到的因素控制金刚石膜的表面温度,以便将这种温度保持在预定的最佳值附近,以便 形成金刚石膜。 当通过反馈控制将表面温度保持在最佳值附近时,无论厚度或其形成时间如何,都可以获得高纯度的金刚石膜。
    • 43. 发明授权
    • Method and device for forming diamond film
    • 用于形成金刚石膜的方法和装置
    • US4851254A
    • 1989-07-25
    • US142813
    • 1988-01-11
    • Minoru YamamotoNobuei ItoHiroshi UesugiTadashi Hattori
    • Minoru YamamotoNobuei ItoHiroshi UesugiTadashi Hattori
    • C23C16/27C23C16/513C30B25/10
    • C23C16/276C23C16/513C30B25/105
    • A device for forming a diamond film has a casing in which a vacuum is maintained to 50 Torr: a positive electrode and a negative electrode are disposed within the casing so that ends of the positive electrode and the negative electrode are opposed to each other through a space: a substrate is disposed near the space between the electrodes, a gas inlet pipe supplies a mixture gas of hydrogen, argon and methane to the space between the electrodes and an arc power supply is connected to the electrodes for supplying a predetermined arc output power thereacross to form an arc discharge column in the space therebetween. By supplying the mixture gas to the arc discharge column of which the temperature is extremely high, the mixture gas is decomposed at a high rate, and a diamond film of high purity grows on the substrate at a high speed.
    • 用于形成金刚石膜的装置具有其中真空保持在50托的壳体:正极和负极设置在壳体内,使得正极和负极的端部通过一个 空间:基板设置在电极之间的空间附近,气体入口管将氢,氩和甲烷的混合气体供应到电极之间的空间,并且电弧源连接到用于提供预定电弧输出功率的电极 在它们之间的空间中形成电弧放电柱。 通过将混合气体供给到温度极高的电弧放电塔,混合气体以高速分解,高纯度的金刚石膜在基板上高速生长。
    • 48. 发明授权
    • Rotation sensor
    • 旋转传感器
    • US07337679B2
    • 2008-03-04
    • US11137500
    • 2005-05-26
    • Tadashi HattoriMasashi Sugimoto
    • Tadashi HattoriMasashi Sugimoto
    • G01B7/30
    • G01D11/245G01P1/026
    • A rotation sensor includes a rotation detector mounted on a holder which is in turn inserted in a casing through its opening. A cover is formed by molding a resin so as to cover the opening of the casing and the portion of the holder protruding from the opening of the casing. A pair of relay terminals extend through a base portion of the holder and a gap defined in the holder, are fixed to a support wall, and connected to respective lead pieces of the detector. A resin cover is formed by molding a resin. When forming the cover, pressure is applied to the holder, thereby causing the holder to bulge axially in the holder. This in turn pushes the relay terminals in the axial direction. But since the relay terminals are fixed to the support wall, the support wall will absorb such pushing force, thereby preventing such pushing from being transmitted to the detector. In order to more effectively absorb such pushing force, the relay terminals may be provided with bent portions in the gap.
    • 旋转传感器包括安装在保持器上的旋转检测器,该保持器又通过其开口插入到壳体中。 通过模制树脂以覆盖壳体的开口和保持器从壳体的开口突出的部分而形成盖。 一对继电器端子延伸穿过保持器的基部并且限定在保持器中的间隙固定到支撑壁上,并连接到检测器的相应引线片。 通过模制树脂形成树脂盖。 当形成盖时,将压力施加到保持器,从而使保持件在保持器中轴向凸出。 这继而沿轴向推动继电器端子。 但是由于中继端子固定在支撑壁上,支撑壁将吸收这种推力,从而防止这种推动传递到检测器。 为了更有效地吸收这种推力,中继端子可以在间隙中设置弯曲部分。
    • 49. 发明授权
    • Rotation sensor
    • 旋转传感器
    • US07190160B2
    • 2007-03-13
    • US11131360
    • 2005-05-18
    • Tadashi Hattori
    • Tadashi Hattori
    • G01B7/30
    • G01P1/026G01D11/245
    • A wheel speed sensor includes a rotation detector mounted in an opening formed in a holder which is in turn inserted in a casing having one end closed. A pair of lead pieces extend from the detector and have connecting portions connected to respective relay terminals. A lid having a projection is fitted in the opening of the holder so that the projection is inserted between the connecting portions. The projection thus separates and insulates the connecting portions from each other. A cover is formed by molding a resin to cover the open end of the casing and the portion of the holder protruding from the open end of the casing.
    • 车轮速度传感器包括安装在形成在保持器中的开口中的旋转检测器,该保持器又插入具有一端封闭的壳体中。 一对引线片从检测器延伸,并具有连接到各个继电器端子的连接部分。 具有突起的盖装配在保持器的开口中,使得突起插入在连接部分之间。 因此突起因此将连接部彼此分离并绝缘。 通过模制树脂以覆盖壳体的开口端和从壳体的开口端突出的保持器的部分来形成盖。
    • 50. 发明授权
    • Positioning stage device
    • US07042576B2
    • 2006-05-09
    • US10349108
    • 2003-01-23
    • Tadashi Hattori
    • Tadashi Hattori
    • G01B11/02
    • G01B9/02027G01B9/02021G01B9/02072
    • A high speed, wide-range, high-accuracy positioning stage device for eliminating errors due to deterministic elements such as variation of surface machining accuracy of a bar mirror and for preventing error accumulation due to indeterminate elements such as air fluctuations when switching between laser interferometers. When an X1 laser interferometer as a first position measurement device and an X2 laser interferometer as a second position measurement device are switched, at a place at which at least two position measurement devices are activated, when a value is handed over from the X1 laser interferometer, which was activated, to the X2 laser interferometer, which is to be activated, errors due to the effect of X-bar mirror flatness and air fluctuations are found by a correction function for the X-bar mirror and/or a table and the average of the measured values, and the value of the X2 laser interferometer is corrected by a correction device such as a calculation device.