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41. 发明申请

US20050067371A1 Mask forming method, mask forming functional layer, dry etching method, and method of manufacturing an information recording medium 失效
标题翻译：掩模形成方法，掩模形成功能层，干蚀刻方法和信息记录介质的制造方法
公开(公告)号：US20050067371A1
公开(公告)日：2005-03-31
申请号：US10947289
申请日：2004-09-23
申请人： Shuichi Okawa , Kazuhiro Hattori , Katsuyuki Nakada , Mitsuru Takai
发明人： Shuichi Okawa , Kazuhiro Hattori , Katsuyuki Nakada , Mitsuru Takai
IPC分类号： G03F7/11 , B44C1/22 , C23F1/02 , C23F4/00 , G03F7/40 , G11B5/855
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/743 , G11B5/855 , Y10T428/24802
摘要： A mask forming method forms an A mask forming functional layer with an amorphous structure so as to cover an etched body, forms a B mask forming functional layer so as to cover the formed A mask forming functional layer, forms a convex/concave pattern in the formed B mask forming functional layer by carrying out a predetermined process to form a B mask on the A mask forming functional layer, and forms an A mask on the etched body by forming a convex/concave pattern in the A mask forming functional layer by dry etching the A mask forming functional layer using the B mask. By doing so, a convex/concave pattern with extremely small pattern fluctuations can be formed in the A mask forming functional layer.
摘要翻译：掩模形成方法形成具有非晶结构的A掩模形成功能层以覆盖蚀刻体，形成B掩模形成功能层，以覆盖所形成的A掩模形成功能层，在其中形成凸/凹图案通过在A掩模形成功能层上进行预定处理以形成B掩模形成B掩模形成功能层，并且通过在A掩模形成功能层中通过干燥形成凸/凹图案在蚀刻体上形成A掩模使用B掩模蚀刻形成A掩模的功能层。通过这样做，可以在A掩模形成功能层中形成具有极小图案波动的凸/凹图案。

42. 发明授权

US07630156B2 Magnetic recording medium, recording/reproducing apparatus, and stamper for manufacturing a magnetic recording medium 失效
标题翻译：磁记录介质，记录/再现装置和用于制造磁记录介质的压模
公开(公告)号：US07630156B2
公开(公告)日：2009-12-08
申请号：US11972645
申请日：2008-01-11
申请人： Shuichi Okawa , Kazuhiro Hattori , Makoto Moriya
发明人： Shuichi Okawa , Kazuhiro Hattori , Makoto Moriya
IPC分类号： G11B5/09 , G11B5/86 , G11B5/596
CPC分类号： G11B5/59633 , G11B5/59638 , G11B5/865
摘要： On a rotary-type magnetic recording medium, servo patterns are formed in servo pattern regions on one surface and the other surface of a disk-shaped substrate by patterns including recording regions and non-recording regions. In the servo pattern regions on both the one surface and the other surface, plural functional regions are defined in order in a direction of rotation of the magnetic recording medium. In the pattern formed in at least one region out of the plural functional regions on the one surface, the non-recording regions are formed at formation positions on the one surface corresponding to formation positions of the recording regions on the other surface and the recording regions are formed at formation positions on the one surface corresponding to formation positions of the non-recording regions on the other surface.
摘要翻译：在旋转型磁记录介质上，通过包括记录区域和非记录区域的图案在盘形基板的一个表面和另一个表面上的伺服图案区域中形成伺服图案。在一个表面和另一个表面上的伺服图案区域中，在磁记录介质的旋转方向上依次定义多个功能区域。在形成在一个表面上的多个功能区域中的至少一个区域中的图案中，非记录区域形成在对应于另一个表面上的记录区域的形成位置的一个表面上的形成位置处，并且记录区域形成在对应于另一表面上的非记录区域的形成位置的一个表面上的形成位置处。

43. 发明授权

US07531103B2 Mask forming method, mask forming functional layer, dry etching method, and method of manufacturing an information recording medium 失效
标题翻译：掩模形成方法，掩模形成功能层，干蚀刻方法和信息记录介质的制造方法
公开(公告)号：US07531103B2
公开(公告)日：2009-05-12
申请号：US10947289
申请日：2004-09-23
申请人： Shuichi Okawa , Kazuhiro Hattori , Katsuyuki Nakada , Mitsuru Takai
发明人： Shuichi Okawa , Kazuhiro Hattori , Katsuyuki Nakada , Mitsuru Takai
IPC分类号： B44C1/22
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/743 , G11B5/855 , Y10T428/24802
摘要： A mask forming method forms an A mask forming functional layer with an amorphous structure so as to cover an etched body, forms a B mask forming functional layer so as to cover the formed A mask forming functional layer, forms a convex/concave pattern in the formed B mask forming functional layer by carrying out a predetermined process to form a B mask on the A mask forming functional layer, and forms an A mask on the etched body by forming a convex/concave pattern in the A mask forming functional layer by dry etching the A mask forming functional layer using the B mask. By doing so, a convex/concave pattern with extremely small pattern fluctuations can be formed in the A mask forming functional layer.
摘要翻译：掩模形成方法形成具有非晶结构的A掩模形成功能层以覆盖蚀刻体，形成B掩模形成功能层，以覆盖所形成的A掩模形成功能层，在其中形成凸/凹图案通过在A掩模形成功能层上进行预定处理以形成B掩模形成B掩模形成功能层，并且通过在A掩模形成功能层中通过干燥形成凸/凹图案在蚀刻体上形成A掩模使用B掩模蚀刻形成A掩模的功能层。通过这样做，可以在A掩模形成功能层中形成具有极小图案波动的凸/凹图案。

44. 发明授权

US07480924B2 Magnetic recording and reproducing device and magnetic recording medium 失效
标题翻译：磁记录和再现装置和磁记录介质
公开(公告)号：US07480924B2
公开(公告)日：2009-01-20
申请号：US11056976
申请日：2005-02-14
申请人： Kazuhiro Hattori , Yoshikazu Soeno , Mitsuru Takai , Shuichi Okawa
发明人： Kazuhiro Hattori , Yoshikazu Soeno , Mitsuru Takai , Shuichi Okawa
IPC分类号： G11B7/09
CPC分类号： B82Y10/00 , G11B5/012 , G11B5/65 , G11B5/74 , G11B5/743 , G11B5/855 , G11B2005/0002 , G11B2005/0005 , G11B2005/001 , G11B2005/0021 , G11B2005/0029
摘要： A magnetic recording and reproducing device includes: a magnetic recording medium in which a magnetic recording layer is formed in a concavo-convex pattern so that tracks are formed by convex portions of a predetermined track width and arranged in parallel in the track width direction; a heating head for heating the magnetic recording medium to partially reduce coercivity of the tracks; a recording head for applying a recording magnetic field to a heated portion of the magnetic recording medium to record magnetic data on the tracks; and a reproducing head for detecting a reproducing magnetic field of the tracks. In this configuration, an effective recording area has an effective recording width that is equal to or more than the track width, and equal to or less than a sum of the track width and a doubled value of width of concave portions between the tracks.
摘要翻译：磁记录和再现装置包括：磁记录介质，其中磁记录层形成为凹凸图案，使得轨道由预定轨道宽度的凸部形成并沿轨道宽度方向平行布置; 用于加热磁记录介质以部分地降低轨道的矫顽力的加热头; 记录头，用于将记录磁场施加到磁记录介质的加热部分，以将磁数据记录在轨道上; 以及用于检测轨道的再现磁场的再现头。在该配置中，有效记录区域具有等于或大于轨道宽度的有效记录宽度，并且等于或小于轨道宽度和轨迹之间的凹部宽度的双倍值之和。

45. 发明申请

US20070023704A1 PATTERN DRAWING METHOD, STAMPER MANUFACTURING METHOD, AND PATTERN DRAWING APPARATUS 失效
标题翻译：图案绘图方法，冲压器制造方法和图案绘图装置
公开(公告)号：US20070023704A1
公开(公告)日：2007-02-01
申请号：US11457545
申请日：2006-07-14
申请人： Katsuyuki Nakada , Kazuhiro Hattori , Shuichi Okawa
发明人： Katsuyuki Nakada , Kazuhiro Hattori , Shuichi Okawa
IPC分类号： G21K5/10
CPC分类号： H01J37/3026 , B82Y10/00 , B82Y40/00 , G11B5/82 , G11B5/855 , H01J37/3174
摘要： A pattern drawing method capable of drawing a pattern such that opposite ends of a formation region on an inner periphery side and an outer periphery side are substantially linearly formed. A drawing beam is intermittently irradiated N times onto a generally belt-shaped exposure area extending in a direction of rotation of the substrate from one end to the other end of the belt-shaped exposure area in the direction of rotation of the substrate, the belt-shaped exposure area being defined within a formation region, in which one of the convex or concave portions is to be formed, to thereby irradiate the drawing beam onto N generally belt-shaped irradiation areas extending in the direction of rotation of the substrate.
摘要翻译：一种图形绘制方法，其能够绘制使内周侧和外周侧的形成区域的相对端基本线性地形成的图案。拉伸梁被间歇地照射N次到沿着基板的旋转方向延伸的大致带状的曝光区域，从基板的旋转方向的带状曝光区域的一端到另一端，带形状的曝光区域被限定在其中要形成一个凸部或凹部的形成区域内，从而将拉伸光束照射到在基板的旋转方向上延伸的N个大致带状的照射区域上。

46. 发明授权

US07488429B2 Method of dry etching, method of manufacturing magnetic recording medium, and magnetic recording medium 失效
标题翻译：干蚀刻方法，制造磁记录介质的方法和磁记录介质
公开(公告)号：US07488429B2
公开(公告)日：2009-02-10
申请号：US11156469
申请日：2005-06-21
申请人： Shuichi Okawa , Kazuhiro Hattori , Mikiharu Hibi , Mitsuru Takai
发明人： Shuichi Okawa , Kazuhiro Hattori , Mikiharu Hibi , Mitsuru Takai
IPC分类号： B44C1/22 , G11B5/82 , G11B5/65 , C03C15/00 , C03C25/68 , C23F1/00
CPC分类号： B82Y10/00 , C23F4/00 , G11B5/732 , G11B5/7325 , G11B5/74 , G11B5/743 , G11B5/82 , G11B5/855
摘要： The recording layer (to-be-etched layer), a main mask layer, and a sub mask layer are formed in this order over a substrate, and the sub mask layer is processed into a predetermined concavo-convex pattern. Next, parts of the main mask layer under the concave portions are removed by reactive ion etching using oxygen or ozone as the reactive gas. Parts of the recording layer under the concave portions are also removed by dry etching, whereby the recording layer is shaped into the concavo-convex pattern. The main mask layer is chiefly made of carbon. The sub mask layer is made of a material having an etching rate lower than that of carbon with respect to the reactive ion etching in the step of processing the main mask layer.
摘要翻译：在衬底上依次形成记录层（被蚀刻层），主掩模层和副掩模层，并将子掩模层加工成预定的凹凸图案。接下来，通过使用氧或臭氧作为反应气体的反应离子蚀刻除去凹部下方的主掩模层的一部分。通过干法蚀刻除去凹部下面的记录层的部分，由此将记录层成形为凹凸图案。主掩模层主要由碳制成。在处理主掩模层的步骤中，子掩模层由相对于反应离子蚀刻的蚀刻速率低于碳的蚀刻速率的材料制成。

47. 发明授权

US07470374B2 Manufacturing method and manufacturing apparatus of magnetic recording medium 失效
标题翻译：磁记录介质的制造方法和制造装置
公开(公告)号：US07470374B2
公开(公告)日：2008-12-30
申请号：US10535265
申请日：2004-07-28
申请人： Kazuhiro Hattori , Mitsuru Takai , Shuichi Okawa
发明人： Kazuhiro Hattori , Mitsuru Takai , Shuichi Okawa
IPC分类号： C23F1/00 , H01L21/306
CPC分类号： G11B5/855
摘要： A manufacturing method of a magnetic recording medium, and the like are provided, which can suppress misalignment of a processed shape of divided recording elements and magnetic degradation and can efficiently manufacture a magnetic recording medium having good magnetic characteristics. In the manufacturing method, ion beam etching is used as a dry etching technique for a continuous recording layer 20. Before dry etching of the continuous recording layer 20, a resist layer 26 is removed. As the material for a first mask layer covering the continuous recording layer, diamond like carbon is used.
摘要翻译：提供了一种磁记录介质的制造方法等，其可以抑制分割的记录元件的加工形状的不对准和磁性劣化，并且可以有效地制造具有良好磁特性的磁记录介质。在制造方法中，使用离子束蚀刻作为连续记录层20的干蚀刻技术。在连续记录层20的干蚀刻之前，去除抗蚀剂层26。作为覆盖连续记录层的第一掩模层的材料，使用类金刚石碳。

48. 发明申请

US20060166506A1 Mask material for reactive ion etching, mask and dry etching method 审中-公开
标题翻译：用于反应离子蚀刻的掩模材料，掩模和干蚀刻方法
公开(公告)号：US20060166506A1
公开(公告)日：2006-07-27
申请号：US10553677
申请日：2004-06-11
申请人： Shuichi Okawa , Kazuhiro Hattori
发明人： Shuichi Okawa , Kazuhiro Hattori
IPC分类号： C23F1/00 , H01L21/461 , B44C1/22 , C03C25/68 , G03F1/00
CPC分类号： G11B5/855 , C23F4/00
摘要： To provide a dry etching method and the like that can precisely process regions targeted for etching of objects to be processed using reactive ion etching that uses carbon monoxide gas, to which a nitrogen-containing compound gas is added, as a reactive gas. A material containing silicon and tantalum is used to form a first mask layer 18 that covers a magnetic thin film layer 16.
摘要翻译：为了提供可以使用使用添加了含氮化合物气体的一氧化碳气体的反应离子蚀刻作为反应性气体来精确地处理目标用于蚀刻待处理物体的区域的干式蚀刻方法等。使用含有硅和钽的材料形成覆盖磁性薄膜层16的第一掩模层18。

49. 发明授权

US07727412B2 Dry etching method 失效
标题翻译：干蚀刻法
公开(公告)号：US07727412B2
公开(公告)日：2010-06-01
申请号：US10542055
申请日：2004-06-11
申请人： Shuichi Okawa , Kazuhiro Hattori , Mitsuru Takai
发明人： Shuichi Okawa , Kazuhiro Hattori , Mitsuru Takai
IPC分类号： C23F1/00
CPC分类号： G11B5/855 , H01F41/34
摘要： A dry etching method and the like that can process a layer to be processed in a fine pattern to have a peripheral portion of an angular shape, are described. This dry etching method forms a step portion 21 along a peripheral portion of a first mask layer 20 that corresponds to an outline of an etching pattern in such a manner that the step portion 21 projects toward an opposite side to a magnetic thin layer 18 (layer to be processed).
摘要翻译：对能够以精细图案进行处理的具有角形的周边部分的干法蚀刻方法等进行说明。这种干蚀刻方法沿着第一掩模层20的周边部分形成台阶部分21，该边缘部分对应于蚀刻图案的轮廓，使得阶梯部分21朝向磁性薄层18的相反侧突出（层待处理）。

50. 发明申请

US20060275692A1 Method for forming concavo-convex pattern, method for manufacturing master disk, method for manufacturing stamper, and method for manufacturing magnetic recording medium 审中-公开
标题翻译：用于形成凹凸图案的方法，用于制造母盘的方法，用于制造压模的方法以及制造磁记录介质的方法
公开(公告)号：US20060275692A1
公开(公告)日：2006-12-07
申请号：US11445336
申请日：2006-06-02
申请人： Shuichi Okawa , Katsuyuki Nakada , Kazuhiro Hattori , Mitsuru Takai
发明人： Shuichi Okawa , Katsuyuki Nakada , Kazuhiro Hattori , Mitsuru Takai
IPC分类号： G03C5/00
CPC分类号： G11B5/855
摘要： A method for forming a concavo-convex pattern that can form a fine and complex concavo-convex pattern such as that corresponding to servo information with high precision, a method for manufacturing a master disk, a method for manufacturing a stamper, and a method for manufacturing a magnetic recording medium using that method for forming a concavo-convex pattern are provided. A resin layer formed over a resin layer supporting member is processed into an irregular concavo-convex pattern in which a dividing convex portion is formed in a part of concave portions of a predetermined basic concavo-convex pattern and at least some of concave portions are divided as compared with corresponding concave portions of the basic concavo-convex pattern. A recording layer (the resin layer supporting member) is etched based on the resin layer to be processed into a concavo-convex pattern obtained by bringing the irregular concavo-convex pattern close to the basic concavo-convex pattern.
摘要翻译：一种用于形成能够以高精度形成与伺服信息相对应的精细复杂凹凸图案的凹凸图案的方法，制造母盘的方法，制造压模的方法，以及用于制造使用这种形成凹凸图案的方法的磁记录介质。形成在树脂层支撑构件上的树脂层被加工成不规则的凹凸图案，其中在预定的基本凹凸图案的凹部的一部分中形成有分割凸部，并且至少部分凹部被分割与基本凹凸图案的相应凹部相比较。基于要加工的树脂层将记录层（树脂层支撑构件）蚀刻成通过使不规则凹凸图案接近基本凹凸图案而获得的凹凸图案。

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