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    • 44. 发明授权
    • Wafer edge deposition elimination
    • 晶圆边缘沉积消除
    • US06231674B1
    • 2001-05-15
    • US09481124
    • 2000-01-11
    • Aihua ChenKarl A. LittauDashun S. Zhou
    • Aihua ChenKarl A. LittauDashun S. Zhou
    • C23C1600
    • C23C16/458C23C16/45521C23C16/4583C23C16/4585C23C16/46Y10S156/916
    • This invention provides a method and apparatus for substantially eliminating deposition on the edge of a wafer supported on a pedestal in a processing chamber. Process gas flow onto the wafer surface is inhibited from reaching the wafer edge and backside, by means of a shadow ring placed over the wafer without touching it. Deposition on the edge and backside of the wafer are therefore substantially eliminated. The shadow ring defines a cavity which circumscribes the wafer edge, into which purge gas is flowed. This purge gas flows out from the cavity through the gap between the shadow ring and the upper surface of the wafer. Alignment pins are placed on the wafer supporting surface of the pedestal. These pins have sloping surfaces and are arranged to guide the wafer to a centered position on the pedestal when the wafer is placed on the pedestal. These pins also serve to align the shadow ring to the pedestal and thence to the wafer. The shadow ring has a plurality of keyed formations which mate to the pins, and as the shadow ring and pedestal are brought together, the pins serve to align the shadow ring. This precise rotational alignment and centering of the shadow ring results in substantial elimination of edge deposition. The keyed formations have elliptical cross-sections to provide for radial movement of the pins with respect to the keyed formations due to thermal expansion.
    • 本发明提供一种用于基本上消除在处理室中的基座上支撑的晶片的边缘上的沉积的方法和装置。 通过放置在晶片上的阴影环而不接触晶片表面的工艺气体流被抑制到达晶片边缘和背面。 因此,基本上消除了在晶片的边缘和背面上的沉积。 阴影环限定了围绕晶片边缘的空腔,吹扫气体流入该空腔。 该清洗气体通过阴影环和晶片的上表面之间的间隙从腔体流出。 对准销被放置在基座的晶片支撑表面上。 这些销具有倾斜表面并且被布置成当晶片被放置在基座上时将晶片引导到基座上的居中位置。 这些引脚还用于将阴影环对准基座,从而将其对准晶片。 阴影环具有与销相配合的多个键状结构,并且当阴影环和基座被聚集在一起时,销用于对准阴影环。 阴影环的这种精确的旋转对准和定心导致边缘沉积的显着消除。 键合结构具有椭圆形横截面,以提供由于热膨胀而使销相对于键合地层的径向移动。
    • 45. 发明授权
    • CO2 capture during compressed air energy storage
    • 在压缩空气储存过程中CO2捕获
    • US08156725B2
    • 2012-04-17
    • US11962959
    • 2007-12-21
    • Karl A. LittauRaphael Stumpp
    • Karl A. LittauRaphael Stumpp
    • F02C7/08
    • F02C6/16Y02E60/15
    • A compressed air energy storage system and method of capturing CO2 during compressed air energy storage the system and method including a gas inlet pipe, at least one air compressor stage attached to the gas inlet pipe and adapted for compression of a gas, a heat transfer system to cool the gas during or after compression, the heat being recycled throughout the system, at least one absorption bed for separating CO2 from the compressed gas attached to the heat transfer system, at least one compressed gas reservoir having an inlet and an outlet, the reservoir attached at its inlet to the absorption bed, at least one preheater stage attached to the outlet of the compressed gas reservoir for heating a compressed gas after storage in the compressed gas reservoir, and at least one gas expander attached to the preheater stage and adapted for the expansion of the compressed gas.
    • 一种在压缩空气能量储存期间捕获CO 2的压缩空气能量存储系统和方法,该系统和方法包括气体入口管,至少一个连接到气体入口管并适于压缩气体的空气压缩机级, 在压缩期间或之后冷却气体,热量在整个系统中循环,至少一个吸收床,用于将CO 2与附着到传热系统的压缩气体分离,至少一个具有入口和出口的压缩气体储存器, 在其吸入床的入口处附接的储存器,附接到压缩气体储存器的出口的至少一个预热器级,用于在压缩气体储存器中储存之后加热压缩气体;以及至少一个气体膨胀器,其连接到预热器级并适应 用于膨胀压缩气体。
    • 46. 发明授权
    • Methods for forming multiple-layer electrode structures for silicon photovoltaic cells
    • 用于形成硅光伏电池的多层电极结构的方法
    • US07833808B2
    • 2010-11-16
    • US12054034
    • 2008-03-24
    • Baomin XuKarl A. LittauDavid K. Fork
    • Baomin XuKarl A. LittauDavid K. Fork
    • H01L21/00H01L31/00
    • H01L31/022425H01L31/18Y02E10/50
    • Methods for forming a photovoltaic cell electrode structure, wherein the photovoltaic cell includes a semiconductor substrate having a passivation layer thereon, includes providing a plurality of contact openings through the passivation layer to the semiconductor substrate, selectively plating a contact metal into the plurality of contact openings to deposit the contact metal, depositing a metal containing material on the deposited contact metal, and firing the deposited contact metal and the deposited metal containing material. The metal containing material may include a paste containing a silver or silver alloy along with a glass frit and is substantially free to completely free of lead. The methods may also use light activation of the passivation layer or use seed layers to assist in the plating.
    • 用于形成光伏电池电极结构的方法,其中所述光伏电池包括其上具有钝化层的半导体衬底,包括提供穿过所述钝化层到所述半导体衬底的多个接触开口,选择性地将接触金属电镀到所述多个接触开口 沉积接触金属,在沉积的接触金属上沉积含金属的材料,并焙烧沉积的接触金属和沉积的含金属的材料。 含金属的材料可以包括含有银或银合金以及玻璃料的糊状物,并且基本上没有完全不含铅。 所述方法还可以使用钝化层的光激活或使用种子层来辅助镀覆。
    • 47. 发明申请
    • Two-Part Solar Energy Collection System With Replaceable Solar Collector Component
    • 具有可更换太阳能收集器组件的两部分太阳能收集系统
    • US20100206357A1
    • 2010-08-19
    • US12611873
    • 2009-11-03
    • Karl A. LittauPatrick Y. MaedaPatrick C. Cheung
    • Karl A. LittauPatrick Y. MaedaPatrick C. Cheung
    • H01L31/052
    • H01L31/0547F24S23/74F24S30/422F24S2020/10H02S20/23H02S20/32H02S40/22Y02B10/12Y02B10/20Y02E10/45Y02E10/47Y02E10/52
    • A two-part solar energy collection system for installation on a planar support surface (e.g., a rooftop) includes a permanent positioning component including a base structure and a replaceable solar collector component including solar energy collection elements fixedly mounted on a support frame. Each collection element includes an optical element arranged to focus solar radiation onto a focal line, and a linearly-arranged solar energy collector (e.g., PV cells) fixedly maintained on the focal line. The replaceable solar collector component is secured to a rotating platform of the base structure such that the focal lines of the solar energy collection elements are maintained in a plane that is substantially parallel to the support surface, and the rotating platform and replaceable solar collector component are collectively pivoted by a positioning system around a rotational axis to align the PV cells) parallel to the received sunlight beams.
    • 用于安装在平面支撑表面(例如,屋顶)上的两部分太阳能收集系统包括永久定位部件,其包括基座结构和可替换的太阳能收集器部件,其包括固定地安装在支撑框架上的太阳能收集元件。 每个收集元件包括被布置成将太阳辐射聚焦到焦线上的光学元件和固定地保持在焦线上的线性排列的太阳能收集器(例如,PV电池)。 可替换的太阳能收集器部件被固定到基部结构的旋转平台,使得太阳能收集元件的焦线保持在基本上平行于支撑表面的平面中,并且旋转平台和可更换的太阳能收集器部件 通过围绕旋转轴线的定位系统共同枢转以使PV电池对准)平行于所接收的太阳光束。
    • 48. 发明申请
    • NOVEL PRINTED FUEL CELL WITH INTEGRATED GAS CHANNELS
    • 具有集成气体通道的新型印刷燃料电池
    • US20100136383A1
    • 2010-06-03
    • US12325159
    • 2008-11-29
    • Karl A. Littau
    • Karl A. Littau
    • H01M4/88
    • H01M8/1007H01M4/8814H01M4/8825H01M8/006H01M8/0258H01M8/0289H01M8/0297H01M8/1097H01M2008/1095Y02P70/56
    • A method of manufacturing a fuel cell includes applying a sacrificial material periodically to a surface of an anode substrate, wherein at least some areas of the anode substrate have no sacrificial material. A first gas diffusion layer is applied to the sacrificial material, and a first catalyst material is applied to the first gas diffusion layer. An electrolyte material is applied to the anode substrate and the first gas diffusion layer, with the catalyst material, wherein a first surface of the electrolyte material is in operative association with the anode substrate, and the first gas diffusion layer. A second catalyst material is applied to the second surface of the electrolyte material. A second gas diffusion layer is applied to the electrolyte material on a second surface of the electrolyte material, with the catalyst material, wherein a first surface of the second gas diffusion layer is in contact with the second surface of the electrolyte material with the catalyst material. A cathode is applied to the second gas diffusion layer with the second catalyst material, and the sacrificial material is then removed from the surface of the anode substrate to create integrated gas channels for the manufactured fuel cell.
    • 一种制造燃料电池的方法包括将牺牲材料周期性地施加到阳极基板的表面,其中阳极基板的至少一些区域不具有牺牲材料。 将第一气体扩散层施加到牺牲材料上,并且将第一催化剂材料施加到第一气体扩散层。 使用催化剂材料将电解质材料施加到阳极基板和第一气体扩散层,其中电解质材料的第一表面与阳极基板和第一气体扩散层可操作地相关联。 将第二催化剂材料施加到电解质材料的第二表面。 在电解质材料的第二表面上与催化剂材料一起将第二气体扩散层施加到电解质材料上,其中第二气体扩散层的第一表面与电解质材料的第二表面与催化剂材料接触 。 用第二催化剂材料将阴极施加到第二气体扩散层,然后从阳极基板的表面去除牺牲材料,以产生用于制造的燃料电池的集成气体通道。
    • 49. 发明申请
    • CO2 CAPTURE DURING COMPRESSED AIR ENERGY STORAGE
    • 压缩空气能量储存期间的CO2捕获量
    • US20090158740A1
    • 2009-06-25
    • US11962959
    • 2007-12-21
    • Karl A. LittauRaphael Stumpp
    • Karl A. LittauRaphael Stumpp
    • F02C6/16
    • F02C6/16Y02E60/15
    • A compressed air energy storage system including a gas inlet pipe, at least one air compressor stage attached to the gas inlet pipe and adapted for compression of a gas, a heat transfer system to cool the gas during or after compression, at least one absorption bed attached to the heat transfer system, at least one compressed gas reservoir having an inlet and an outlet, the compressed gas reservoir being attached at its inlet to the absorption bed, at least one preheater stage that is attached to the outlet of the compressed gas reservoir for heating a compressed gas before expansion but after storage in the compressed gas reservoir, and at least one gas expander that is attached to the preheater stage and is adapted for the expansion of the compressed gas.The disclosure further provides a method of capturing CO2 during compressed air energy storage including compressing a gas in at least one compression stage, cooling a compressed gas during or after the at least one compression stage, separating CO2 from the compressed gas using an absorption bed, storing the compressed gas in a compressed gas reservoir, expanding the compressed gas while deriving work from the gas, preheating the compressed gas prior to expansion by feeding the compressed gas through at least one heat exchanger; and recycling the heat generated during compression throughout the system.
    • 一种压缩空气能量存储系统,包括气体入口管,至少一个连接到气体入口管并适于压缩气体的空气压缩机级,在压缩期间或之后冷却气体的传热系统,至少一个吸收床 附接到传热系统的至少一个压缩气体储存器,具有入口和出口,压缩气体储存器在其入口处附接到吸收床;至少一个预热器级,其连接到压缩气体储存器的出口 用于在膨胀之前但在储存在压缩气体储存器中之后加热压缩气体;以及至少一个气体膨胀器,其附接到预热器级并适于膨胀压缩气体。 本公开还提供了一种在压缩空气能量储存期间捕获CO 2的方法,包括在至少一个压缩级中压缩气体,在至少一个压缩阶段期间或之后冷却压缩气体,使用吸收床将CO 2与压缩气体分离, 将压缩气体储存在压缩气体储存器中,在从气体导出工作的同时膨胀压缩气体,在膨胀之前通过将至少一个热交换器供给压缩气体来预热压缩气体; 并在整个系统中回收压缩过程中产生的热量。