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    • 44. 发明授权
    • ETSOI CMOS with back gates
    • 带后门的ETSOI CMOS
    • US08415743B2
    • 2013-04-09
    • US13114410
    • 2011-05-24
    • Jin CaiRobert H DennardAli Khakifirooz
    • Jin CaiRobert H DennardAli Khakifirooz
    • H01L27/092
    • H01L27/1203
    • A structure has a functional region having a first type of conductivity and a top surface. The functional region is connected to a bias contact. The structure further includes an insulating layer; a semiconductor layer and first and second transistor devices having the same type of conductivity disposed upon the semiconductor layer. The structure further includes a first back gate region adjacent to the top surface and underlying one of the transistor devices, the first back gate region having a second type of conductivity; and a second back gate region adjacent to the top surface and underlying the other one of the transistor devices, the second back gate region having the first type of conductivity. The first transistor device has a first characteristic threshold voltage and the second transistor device has a second characteristic threshold voltage that differs from the first characteristic threshold voltage.
    • 结构具有具有第一类型的导电性的功能区域和顶表面。 功能区域连接到偏置触点。 该结构还包括绝缘层; 半导体层和具有相同类型导电性的第一和第二晶体管器件设置在半导体层上。 所述结构还包括与所述顶表面相邻并且位于所述晶体管器件之一下方的第一后栅极区域,所述第一背栅极区域具有第二类型的导电性; 以及与顶表面相邻并且位于另一个晶体管器件下方的第二背栅极区域,第二背栅极区域具有第一类型的导电性。 第一晶体管器件具有第一特征阈值电压,并且第二晶体管器件具有不同于第一特征阈值电压的第二特征阈值电压。
    • 45. 发明申请
    • ETSOI CMOS With Back Gates
    • ETSOI CMOS后盖
    • US20130005095A1
    • 2013-01-03
    • US13611656
    • 2012-09-12
    • Jin CaiRobert H. DennardAli Khakifirooz
    • Jin CaiRobert H. DennardAli Khakifirooz
    • H01L21/8238
    • H01L27/1203
    • A method to fabricate a structure includes providing a silicon-on-insulator wafer, implanting through a semiconductor layer and an insulating layer a functional region having a first type of conductivity to be adjacent to a top surface of the substrate; implanting within the functional region through the semiconductor layer and the insulating layer an electrically floating back gate region having a second type of conductivity; forming isolation regions in the semiconductor layer; forming first and second transistor devices to have the same type of conductivity over the semiconductor layer such that one of the transistor devices overlies the implanted back gate region and the other one of the transistor devices overlies only the underlying top surface of the functional region not overlapped by the implanted back gate region; and providing an electrical contact to the functional region for applying a bias voltage.
    • 制造结构的方法包括提供绝缘体上硅晶片,通过半导体层和绝缘层注入具有与衬底顶表面相邻的第一导电类型的功能区域; 在功能区域内通过半导体层和绝缘层注入具有第二类导电性的电浮置背栅区; 在半导体层中形成隔离区; 形成第一和第二晶体管器件以在半导体层上具有相同类型的导电性,使得晶体管器件中的一个覆盖在注入的背栅极区域上,另一个晶体管器件仅覆盖不重叠的功能区域的下面的顶部表面 通过植入的背栅区; 以及向所述功能区域提供电接触以施加偏置电压。
    • 46. 发明申请
    • ETSOI CMOS with Back Gates
    • 带后盖的ETSOI CMOS
    • US20120299105A1
    • 2012-11-29
    • US13114410
    • 2011-05-24
    • Jin CaiRobert H. DennardAli Khakifirooz
    • Jin CaiRobert H. DennardAli Khakifirooz
    • H01L27/092H01L21/8238
    • H01L27/1203
    • A structure has a functional region having a first type of conductivity and a top surface. The functional region is connected to a bias contact. The structure further includes an insulating layer; a semiconductor layer and first and second transistor devices having the same type of conductivity disposed upon the semiconductor layer. The structure further includes a first back gate region adjacent to the top surface and underlying one of the transistor devices, the first back gate region having a second type of conductivity; and a second back gate region adjacent to the top surface and underlying the other one of the transistor devices, the second back gate region having the first type of conductivity. The first transistor device has a first characteristic threshold voltage and the second transistor device has a second characteristic threshold voltage that differs from the first characteristic threshold voltage.
    • 结构具有具有第一类型的导电性的功能区域和顶表面。 功能区域连接到偏置触点。 该结构还包括绝缘层; 半导体层和具有相同类型导电性的第一和第二晶体管器件设置在半导体层上。 所述结构还包括与所述顶表面相邻并且位于所述晶体管器件之一下方的第一后栅极区域,所述第一背栅极区域具有第二类型的导电性; 以及与顶表面相邻并且位于另一个晶体管器件下方的第二背栅极区域,第二背栅极区域具有第一类型的导电性。 第一晶体管器件具有第一特征阈值电压,并且第二晶体管器件具有不同于第一特征阈值电压的第二特征阈值电压。
    • 47. 发明授权
    • ETSOI CMOS with back gates
    • 带后门的ETSOI CMOS
    • US08530287B2
    • 2013-09-10
    • US13611656
    • 2012-09-12
    • Jin CaiRobert H DennardAli Khakifirooz
    • Jin CaiRobert H DennardAli Khakifirooz
    • H01L21/84
    • H01L27/1203
    • A method to fabricate a structure includes providing a silicon-on-insulator wafer, implanting through a semiconductor layer and an insulating layer a functional region having a first type of conductivity to be adjacent to a top surface of the substrate; implanting within the functional region through the semiconductor layer and the insulating layer an electrically floating back gate region having a second type of conductivity; forming isolation regions in the semiconductor layer; forming first and second transistor devices to have the same type of conductivity over the semiconductor layer such that one of the transistor devices overlies the implanted back gate region and the other one of the transistor devices overlies only the underlying top surface of the functional region not overlapped by the implanted back gate region; and providing an electrical contact to the functional region for applying a bias voltage.
    • 制造结构的方法包括提供绝缘体上硅晶片,通过半导体层和绝缘层注入具有与衬底顶表面相邻的第一导电类型的功能区域; 在功能区域内通过半导体层和绝缘层注入具有第二类导电性的电浮置背栅区; 在半导体层中形成隔离区; 形成第一和第二晶体管器件以在半导体层上具有相同类型的导电性,使得晶体管器件中的一个覆盖在注入的背栅极区域上,另一个晶体管器件仅覆盖不重叠的功能区域的下面的顶部表面 通过植入的背栅区; 以及向所述功能区域提供电接触以施加偏置电压。