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    • 45. 发明授权
    • Dual zone wafer test apparatus
    • 双区晶圆测试仪
    • US06441606B1
    • 2002-08-27
    • US09690564
    • 2000-10-17
    • John CaldwellJames NuxollRobert Totorica
    • John CaldwellJames NuxollRobert Totorica
    • G01R3102
    • G01R1/0491G01R31/2831G01R31/2891
    • A wafer cassette includes a stationary dual-zone temperature control base and a removable wafer cassette top. The top includes a main cassette support structure, onto which wafer test electronics, a test interface connector, a wafer interconnect assembly, a wafer test area, a flex film interconnect, and a wafer chuck with evacuation chamber and electric wafer heater, and at least one rough alignment fixture are mounted. A wafer to be tested is inserted, with a pressure-isolating seal, between the wafer chuck and the wafer test area. The base is a stationary fixed portion which includes a first support compartment, a second support compartment and thermal circuits, each of which includes fluid inlet and outlet connections. The fixed portion further includes a heater interconnect to provide connection and external access for a heater element, as well as a vacuum interconnect line to provide external connection to the evacuation chamber. The first and second support compartments are adjacently spaced, and each contains at least one of each of the thermal circuits.
    • 晶片盒包括固定的双区域温度控制基座和可移除的晶片盒顶部。 顶部包括主盒支撑结构,晶片测试电子器件,测试接口连接器,晶片互连组件,晶片测试区域,柔性膜互连和具有抽真空室和电晶片加热器的晶片卡盘,并且至少 安装一个粗略对准夹具。 在晶片卡盘和晶片测试区域之间插入具有隔离密封的被测试晶片。 基座是固定的固定部分,其包括第一支撑室,第二支撑室和热回路,每个包括流体入口和出口连接。 固定部分还包括加热器互连件,用于为加热器元件提供连接和外部通路,以及真空互连线,以提供到抽真空室的外部连接。 第一和第二支撑室相邻间隔开,并且每个包含每个热回路中的至少一个。