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    • 42. 发明授权
    • Thin film transistor array panel, manufacturing method thereof, and mask therefor
    • 薄膜晶体管阵列面板及其制造方法及其掩模
    • US07709304B2
    • 2010-05-04
    • US11824879
    • 2007-07-02
    • Woon-Yong ParkWon-Hee LeeIl-Gon KimSeung-Taek LimYou-Lee SongSahng-Ik Jun
    • Woon-Yong ParkWon-Hee LeeIl-Gon KimSeung-Taek LimYou-Lee SongSahng-Ik Jun
    • H01L21/00
    • G02F1/136227G02F2001/136236G03F1/00
    • A passivation layer is deposited and a photoresist is formed. The photoresist includes first to third portions with decreased thickness, the second portions located on portions of drain electrodes and data lines and the third portions located on portions of gate lines. A mask for forming the photoresist has rectilinear slits with width and distance of about 0.8-2.0 microns on an area corresponding to the second portions. The passivation layer and an underlying semiconductor layer as well as the photoresist are etched to expose portions of the gate insulating layer under the third portions of the photoresist as well as portions of the passivation layer under the second portions of the photoresist. The exposed portions of the passivation layer and the gate insulating layer are removed to expose the drain electrodes, the gate lines and the data lines as well as portions of the semiconductor layer, which are subsequently removed.
    • 沉积钝化层并形成光致抗蚀剂。 光致抗蚀剂包括具有减小的厚度的第一至第三部分,第二部分位于漏电极和数据线的部分上,第三部分位于栅极线的部分上。 用于形成光致抗蚀剂的掩模具有在对应于第二部分的区域上具有约0.8-2.0微米的宽度和距离的直线狭缝。 蚀刻钝化层和底层半导体层以及光致抗蚀剂以暴露在光致抗蚀剂的第三部分之下的栅绝缘层的部分以及在光致抗蚀剂的第二部分下的钝化层的部分。 去除钝化层和栅极绝缘层的暴露部分,以暴露出漏电极,栅极线和数据线以及随后被去除的部分半导体层。
    • 44. 发明申请
    • Thin film transistor array panel, manufacturing method thereof, and mask therefor
    • 薄膜晶体管阵列面板及其制造方法及其掩模
    • US20070259289A1
    • 2007-11-08
    • US11824879
    • 2007-07-02
    • Woon-Yong ParkWon-Hee LeeIl-Gon KimSeung-Taek LimYou-Lee SongSahng-Ik Jun
    • Woon-Yong ParkWon-Hee LeeIl-Gon KimSeung-Taek LimYou-Lee SongSahng-Ik Jun
    • G03C5/00
    • G02F1/136227G02F2001/136236G03F1/00
    • A passivation layer is deposited and a photoresist is formed. The photoresist includes first to third portions with decreased thickness, the second portions located on portions of drain electrodes and data lines and the third portions located on portions of gate lines. A mask for forming the photoresist has rectilinear slits with width and distance of about 0.8-2.0 microns on an area corresponding to the second portions. The passivation layer and an underlying semiconductor layer as well as the photoresist are etched to expose portions of the gate insulating layer under the third portions of the photoresist as well as portions of the passivation layer under the second portions of the photoresist. The exposed portions of the passivation layer and the gate insulating layer are removed to expose the drain electrodes, the gate lines and the data lines as well as portions of the semiconductor layer, which are subsequently removed.
    • 沉积钝化层并形成光致抗蚀剂。 光致抗蚀剂包括具有减小的厚度的第一至第三部分,第二部分位于漏电极和数据线的部分上,第三部分位于栅极线的部分上。 用于形成光致抗蚀剂的掩模具有在对应于第二部分的区域上具有约0.8-2.0微米的宽度和距离的直线狭缝。 蚀刻钝化层和底层半导体层以及光致抗蚀剂以暴露在光致抗蚀剂的第三部分之下的栅极绝缘层的部分以及在光致抗蚀剂的第二部分下的钝化层的部分。 去除钝化层和栅极绝缘层的暴露部分,以露出漏电极,栅极线和数据线以及随后被去除的部分半导体层。
    • 46. 发明申请
    • Printing head for nano patterning
    • 纳米图案印刷头
    • US20060201355A1
    • 2006-09-14
    • US11417114
    • 2006-05-04
    • Dong-Soo KimWon-Hee LeeTaek-Min LeeDoo-Sun ChoiByung-Oh Choi
    • Dong-Soo KimWon-Hee LeeTaek-Min LeeDoo-Sun ChoiByung-Oh Choi
    • B41K1/38
    • C23C16/00B01L3/0268B01L2400/027B01L2400/0439B33Y30/00B41J2/14B82Y30/00
    • The present invention provides a printing head for nano patterning including a manifold for accommodating a liquid printing material, a cartridge with an injection chamber communicating with the manifold, and a sample holder for patterning installed outside the injection chamber of the cartridge. The printing head comprises a shadow mask which is installed outside the injection chamber to be finely moved in an X-Y direction and has a single injection hole with a relatively very small size; an actuator for finely moving the shadow mask; an injection-inducing unit including a high voltage generator, a power supply electrode that is installed within the injection chamber and receives power from the high voltage generator to generate positive charges, and an opposite electrode for generating negative charges on the sample holder in a state where the shadow mask is interposed between the power supply electrode and the opposite electrode, thereby generating induced discharge from the injection chamber toward the sample holder; and a control unit for controlling the driving of the actuator so that the injection hole of the shadow mask can be moved to patterning positions corresponding to patterning data input in advance. According to the present invention, patterning accuracy can be improved, ultra-fine patterning and patterning of arbitrary shapes can be achieved, and a configuration for injecting the printing material can be simplified.
    • 本发明提供了一种用于纳米图案化的打印头,包括用于容纳液体印刷材料的歧管,具有与歧管连通的注射室的药筒,以及安装在药筒的注射室外部的图案样品保持器。 打印头包括荫罩,该荫罩安装在注射室的外部以在X-Y方向上微动地移动并具有相对非常小尺寸的单个注射孔; 用于使荫罩微调的致动器; 注射诱导单元,包括高压发生器,安装在注射室内并且从高压发生器接收电力以产生正电荷的电源电极,以及在状态下在样品架上产生负电荷的相对电极 其中荫罩插入在电源电极和相对电极之间,从而从注射室向样品保持器产生感应放电; 以及控制单元,用于控制致动器的驱动,使得荫罩的喷射孔可以移动到与预先输入的图案化数据相对应的图形位置。 根据本发明,可以提高图形精度,可以实现任意形状的超精细图案化和图案化,并且可以简化用于注入打印材料的构造。
    • 47. 发明申请
    • Unitary air conditioning system
    • 单一空调系统
    • US20060032929A1
    • 2006-02-16
    • US11033253
    • 2005-01-12
    • Yoon-Jei HwangSeung-Youp HyunWon-Hee LeeJae-Hoon Sim
    • Yoon-Jei HwangSeung-Youp HyunWon-Hee LeeJae-Hoon Sim
    • F25B13/00F24F3/00
    • F24F3/065F24F3/001F24F2221/54
    • A unitary air conditioning system comprises an outdoor unit including a compressor for compressing refrigerant, an outdoor heat exchanger for heat exchange of refrigerant, and an expander connected to the outdoor heat exchanger, for expanding refrigerant; a duct installed in each zone of a building; a plurality of central blower units, each unit having a heat exchanger connected to the outdoor unit by a refrigerant pipe and a blower for supplying the air heat-exchanged by the heat exchanger to the duct; and a cooling/heating control unit for selectively distributing a refrigerant from the outdoor unit toward the heat exchangers of the plurality of central blower units and controlling cooling or heating operation for each zone of the building. Accordingly, the plurality of blower units are systematically operated according to a load of each zone inside the building, so that the cooling or heating operation can be effectively performed on each zone.
    • 一体式空调系统包括:室外单元,包括用于压缩制冷剂的压缩机,用于制冷剂的热交换的室外热交换器;和连接到室外热交换器的用于膨胀制冷剂的膨胀器; 安装在建筑物的每个区域中的管道; 多个中央鼓风机单元,每个单元具有通过制冷剂管连接到室外单元的热交换器和用于将由热交换器热交换的空气供给到管道的鼓风机; 以及冷却/加热控制单元,用于从室外单元朝向多个中央鼓风机单元的热交换器选择性地分配制冷剂,并且控制建筑物的每个区域的冷却或加热操作。 因此,根据建筑物内部的每个区域的负载,多个鼓风机单元被系统地操作,从而可以在每个区域上有效地执行冷却或加热操作。
    • 50. 发明申请
    • Unitary air-conditioning system and operation control method thereof
    • 一体式空调系统及其运行控制方法
    • US20050257544A1
    • 2005-11-24
    • US11028759
    • 2005-01-05
    • Won-Hee LeeYoon-Jei HwangSeung-Youp Hyun
    • Won-Hee LeeYoon-Jei HwangSeung-Youp Hyun
    • F24F11/00F24F11/02F25B1/00F25B49/00F25D17/00F25D23/12
    • F24F11/83F24F11/77
    • A unitary air-conditioning system includes a thermostat for detecting a set temperature inputted by a user and a room temperature; a temperature detecting unit for detecting a first temperature of an indoor heat exchanger and a second temperature of air introduced into the indoor heat exchanger; a first controller for receiving information on the set temperature, the room temperature, the first temperature and the second temperature, and converting information on the inputted set temperature, the room temperature and the first and second temperatures into a communication signal; a first communicating unit for receiving the converted communication signal and transmitting it; a second communicating unit for receiving the communication signal from the first communicating unit; and a second controller for controlling an operation of compressors based on the communication signal received from the second communicating unit.
    • 一体式空调系统包括用于检测由用户输入的设定温度和室温的恒温器; 温度检测单元,用于检测室内热交​​换器的第一温度和引入室内热交换器的空气的第二温度; 第一控制器,用于接收关于设定温度,室温,第一温度和第二温度的信息,以及将关于输入的设定温度,室温和第一和第二温度的信息转换为通信信号; 第一通信单元,用于接收转换的通信信号并发送; 第二通信单元,用于从第一通信单元接收通信信号; 以及第二控制器,用于基于从第二通信单元接收的通信信号来控制压缩机的操作。