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    • 43. 发明申请
    • Gas supply system and gas supply accumulation unit of semiconductor manufacturing apparatus
    • 半导体制造装置的供气系统和气体供应蓄积单元
    • US20080295963A1
    • 2008-12-04
    • US12068029
    • 2008-01-31
    • Shuji MoriyaKen Nakao
    • Shuji MoriyaKen Nakao
    • C23F1/08C23C16/00C23C14/34
    • C23C16/4402C23C16/4404C23C16/45561C30B25/14C30B31/16H01J37/3244Y02E60/34
    • A gas supply system 200 is a system that supplies a predetermined gas from a gas supply source 210 to a processing part 110 of a semiconductor manufacturing apparatus 100. The gas supply system 200 includes a gas supply passage apparatus 220 that is connected to the gas supply source 210 and the processing part 110. The gas supply passage apparatus 220 is provided with a plurality of fluid controllers (a hand valve 231, a pressure reducing valve 232, a manometer 233, a check valve 234, a first shutoff valve 235, a second shutoff valve 236, a massflow controller 237, and a gas filter 238), and passage structuring members (passage blocks 241 to 249) that are connected to positions between the respective fluid controllers 231 to 238 and form gas passages 221 to 229. The passage structuring members are made of a carbon material. Thus, when a corrosive gas is supplied to the processing part 110, mixture of a metal contaminant into a substrate to be processed W can be prevented as much as possible.
    • 气体供给系统200是将预定气体从气体供给源210供给到半导体制造装置100的处理部110的系统。气体供给系统200包括气体供给通道装置220,其与气体供给 源210和处理部110.气体供给通道装置220设置有多个流体控制器(手动阀231,减压阀232,压力计233,止回阀234,第一截止阀235, 第二截止阀236,质量流量控制器237和气体过滤器238)以及与各个流体控制器231至238之间的位置连接并形成气体通道221至229的通道结构构件(通道块241至249)。 通道结构构件由碳材料制成。 因此,当向处理部110供给腐蚀性气体时,可以尽可能地防止金属污染物混入待处理基板W。
    • 45. 发明申请
    • Developing apparatus
    • 开发设备
    • US20060233573A1
    • 2006-10-19
    • US11402054
    • 2006-04-12
    • Naoto KichijimaKoichi OkudaYasushi ShimizuKenya OgawaShuji MoriyaKazunari Hagiwara
    • Naoto KichijimaKoichi OkudaYasushi ShimizuKenya OgawaShuji MoriyaKazunari Hagiwara
    • G03G15/09
    • G03G15/0907
    • A developing apparatus having: a rotatable developing roller for developing an electrostatic image with a mono-component magnetic developer at a developing position; a non-rotary magnet roll inside the roller; a blade for regulating the amount of the developer at a developer regulating position; and an abutting member abutting against the roller downstream of the developing position and upstream of the developer regulating position, wherein the following expressions are satisfied: |Vs|>|Vdev|, |Br|/|B|≦0.5, and L/(BH×R)≧0.1, where |Vdev|: a DC component Vdev of a voltage applied to the roller, |Vs|: a DC component Vs of a voltage applied to the member, B(G): the magnetic flux density formed on the surface of the roller at the abutting position by the magnet roll, Br(G): the component of the magnetic flux density B(G) perpendicular to the surface of the roller, and L(mm): the abutting width between the roller and the member, BH(rad): the half value width of the component Bθ(G) horizontal to the surface of the roller, and R(mm): the radius of the roller.
    • 一种显影装置,具有:用于在显影位置用单组分磁性显影剂显影静电图像的可旋转显影辊; 辊内的非旋转磁辊; 用于调节显影剂调节位置处的显影剂量的刀片; 和抵抗构件抵接在显影位置下游和显影剂调节位置上游的滚子,其中满足以下表达式:| Vs |> | Vdev |,| Br | / | B | <= 0.5和L / (BHxR)> = 0.1,其中| Vdev |:施加到辊的电压的DC分量Vdev | Vs |:施加到部件的电压的DC分量Vs,B(G):形成的磁通密度 在磁辊的邻接位置的辊表面上,Br(G):垂直于辊表面的磁通密度B(G)的分量,L(mm): 辊和构件BH(rad):水平面与辊表面的部件Btheta(G)的半值宽度,R(mm):辊的半径。
    • 46. 发明申请
    • Developing apparatus
    • 开发设备
    • US20060233572A1
    • 2006-10-19
    • US11402022
    • 2006-04-12
    • Kenya OgawaYasushi ShimizuShuji MoriyaKazunari HagiwaraNaoto KichijimaKoichi Okuda
    • Kenya OgawaYasushi ShimizuShuji MoriyaKazunari HagiwaraNaoto KichijimaKoichi Okuda
    • G03G15/09
    • G03G15/0921
    • A developing apparatus having a rotatable developing sleeve having an elastic layer on the surface thereof for carrying a mono-component magnetic developer and urged against a photosensitive drum to develop an electrostatic image formed on the drum with the developer, a non-rotary magnet provided inside the sleeve for magnetically attracting the developer to the sleeve, and a blade having an abutting portion abutting against the sleeve in a counter direction for regulating the amount of the developer on the sleeve, a step portion spaced apart from the abutting portion, and a separating portion provided upstream of the step portion in the rotation direction of the sleeve, wherein the surface of the sleeve to which the separating portion is opposed includes a position satisfying |Br|/|B|≧0.5, where B(G): the magnitude of magnetic flux density formed on the surface of the sleeve, and Br(G): a component of the magnetic flux density in a direction perpendicular to the surface of the sleeve.
    • 一种具有可旋转显影套筒的显影装置,其表面上具有弹性层,用于承载单组分磁性显影剂并且被推压到感光鼓上以使显影剂形成在鼓上形成静电图像,内部设置有非旋转磁体 用于将显影剂磁性地吸引到套筒的套筒,以及具有抵靠部件的反向部分的对置部分的对置部分,用于调节套筒上显影剂的量,与抵接部分间隔开的台阶部分, 在所述套筒的所述旋转方向上游侧设置有所述套筒的与所述分离部相对的表面的位置包括满足| Br | / | B |> = 0.5的位置,其中B(G): 在套筒表面上形成的磁通密度的大小和Br(G):垂直于套筒表面的方向上的磁通密度的分量 。
    • 47. 发明申请
    • Developing apparatus
    • 开发设备
    • US20050214031A1
    • 2005-09-29
    • US11091823
    • 2005-03-29
    • Kazunari HagiwaraKouichi OkudaYasushi ShimizuKenya OgawaHikaru OsadaShuji Moriya
    • Kazunari HagiwaraKouichi OkudaYasushi ShimizuKenya OgawaHikaru OsadaShuji Moriya
    • G03G15/09G03G15/06G03G15/08G03G21/10G03G21/16
    • G03G15/0921G03G2221/0005
    • A developing apparatus includes a developer carrying member for carrying a developer including one component magnetic toner to develop an electrostatic image formed on an image bearing member with the developer, said developer carrying member including an elastic member contactable to the image bearing member; magnetic field generating means, disposed in said developer carrying member, for generating a magnetic field for attracting the developer to said developer carrying member; and a regulating member for regulating an amount of the developer carried on said developer carrying member, wherein an amount, per unit area, of the developer regulated by said regulating member and applied on said developer carrying member is 5-16 g/m2, and at a position where said regulating member is contacted to said developer carrying member, a magnetic flux density B generated by said magnetic field generating means, and a component Br of the magnetic flux density B normal to a surface of said developer carrying member, satisfy, |Br|/|B|≦0.5.
    • 显影装置包括用于承载包含单组分磁性调色剂的显影剂的显影剂承载构件以使与显影剂形成在图像承载构件上的静电图像显影,所述显影剂承载构件包括可与图像承载构件接触的弹性构件; 设置在所述显影剂承载构件中的用于产生用于将显影剂吸引到所述显影剂承载构件的磁场的磁场产生装置; 以及用于调节载持在所述显影剂承载构件上的显影剂的量的调节构件,其中由所述调节构件调节并施加在所述显影剂承载构件上的由显影剂承载构件调节的显影剂的每单位面积的量为5-16g / m 2 > 2 ,并且在所述调节构件与所述显影剂承载构件接触的位置处,由所述磁场产生装置产生的磁通密度B和与表面垂直的磁通密度B的分量Br 满足<?in-line-formula description =“In-line Formulas”end =“lead”?> | Br | / | B | <= 0.5。<?in-line-formula description = “直线公式”end =“tail”?>