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41. 发明授权

US07900512B2 Angular rate sensor 有权
标题翻译：角速度传感器
公开(公告)号：US07900512B2
公开(公告)日：2011-03-08
申请号：US11878441
申请日：2007-07-24
申请人： Kazuhiko Kano , Akihiko Teshigahara , Kazuki Arakawa , Kazushi Asami
发明人： Kazuhiko Kano , Akihiko Teshigahara , Kazuki Arakawa , Kazushi Asami
IPC分类号： G01P9/04
CPC分类号： G01C19/5698
摘要： An angular rate sensor comprises a piezoelectric film having a first and a second surfaces forming an x-y plane and utilizes a perturbation mass coherently vibrating elastic acoustic waves on which a Coriolis force acts when the angular rate sensor undergoes a rotary motion about an x-direction. A first elastic acoustic wave is excited in the piezoelectric film by a driving transducer and a second elastic acoustic wave generated by the Coriolis force proportional to an angular rate of the rotary motion of the angular rate sensor itself is detected by the detecting transducer. The angular rate sensor further comprises at least a first electrode disposed on the first surface of the piezoelectric film for discharging a surface charge caused due to piezoelectric effect at the lower surface of the film in which the first elastic acoustic wave is excited.
摘要翻译：角速率传感器包括具有形成x-y平面的第一和第二表面的压电膜，并且当角速率传感器经历围绕x方向的旋转运动时，利用科里奥利力作用的扰动质量相干振动的弹性声波。第一弹性声波通过驱动传感器在压电膜中激发，并且由与角速率传感器本身的旋转运动的角速度成比例的科里奥利力产生的第二弹性声波由检测换能器检测。角速率传感器还包括至少第一电极，其设置在压电膜的第一表面上，用于在其中激发第一弹性声波的膜的下表面处排出由于压电效应引起的表面电荷。

42. 发明申请

US20110041605A1 Angular rate sensor 有权
公开(公告)号：US20110041605A1
公开(公告)日：2011-02-24
申请号：US12923971
申请日：2010-10-19
申请人： Kazuhiko Kano , Akihiko Teshigahara , Kazuki Arakawa , Kazushi Asami
发明人： Kazuhiko Kano , Akihiko Teshigahara , Kazuki Arakawa , Kazushi Asami
IPC分类号： G01C19/56
CPC分类号： G01C19/5698
摘要： An angular rate sensor comprises a piezoelectric film having a first and a second surfaces forming an x-y plane and utilizes a perturbation mass coherently vibrating elastic acoustic waves on which a Coriolis force acts when the angular rate sensor undergoes a rotary motion about an x-direction. A first elastic acoustic wave is excited in the piezoelectric film by a driving transducer and a second elastic acoustic wave generated by the Coriolis force proportional to an angular rate of the rotary motion of the angular rate sensor itself is detected by the detecting transducer. The angular rate sensor further comprises at least a first electrode disposed on the first surface of the piezoelectric film for discharging a surface charge caused due to piezoelectric effect at the lower surface of the film in which the first elastic acoustic wave is excited.

43. 发明申请

US20110041604A1 Angular rate sensor 审中-公开
公开(公告)号：US20110041604A1
公开(公告)日：2011-02-24
申请号：US12923970
申请日：2010-10-19
申请人： Kazuhiko Kano , Akihiko Teshigahara , Kazuki Arakawa , Kazushi Asami
发明人： Kazuhiko Kano , Akihiko Teshigahara , Kazuki Arakawa , Kazushi Asami
IPC分类号： G01C19/56
CPC分类号： G01C19/5698
摘要： An angular rate sensor comprises a piezoelectric film having a first and a second surfaces forming an x-y plane and utilizes a perturbation mass coherently vibrating elastic acoustic waves on which a Coriolis force acts when the angular rate sensor undergoes a rotary motion about an x-direction. A first elastic acoustic wave is excited in the piezoelectric film by a driving transducer and a second elastic acoustic wave generated by the Coriolis force proportional to an angular rate of the rotary motion of the angular rate sensor itself is detected by the detecting transducer. The angular rate sensor further comprises at least a first electrode disposed on the first surface of the piezoelectric film for discharging a surface charge caused due to piezoelectric effect at the lower surface of the film in which the first elastic acoustic wave is excited.

44. 发明授权

US06415664B2 Angular velocity sensor capable of preventing unnecessary oscillation 有权
标题翻译：角速度传感器能够防止不必要的振动
公开(公告)号：US06415664B2
公开(公告)日：2002-07-09
申请号：US09778737
申请日：2001-02-08
申请人： Takao Iwaki , Kazuhiko Kano , Toshiki Isogai
发明人： Takao Iwaki , Kazuhiko Kano , Toshiki Isogai
IPC分类号： G01P900
CPC分类号： G01C19/5719
摘要： An angular velocity sensor has a weight portion that can be drive-oscillated in a driving direction and be oscillated in a detecting direction when an angular velocity is applied, and unnecessary oscillation suppressing electrodes that can generate an electrostatic force to be applied to the weight portion in the detecting direction. The electrostatic force prevents the weight portion from being drive-oscillated in a direction other than the driving direction. As a result, unnecessary oscillation of the weight portion can be prevented even when the angular velocity sensor has a processing error.
摘要翻译：角速度传感器具有可以沿着驱动方向驱动振荡并且当施加角速度时沿检测方向振动的重量部分，以及可产生施加到重物部分的静电力的不必要的振动抑制电极在检测方向。静电力防止重物部分沿除驱动方向以外的方向驱动振荡。结果，即使当角速度传感器具有处理误差时也可以防止重量部分的不必要的振动。

45. 发明授权

US6028332A Semiconductor type yaw rate sensor 失效
标题翻译：半导体型偏航率传感器
公开(公告)号：US6028332A
公开(公告)日：2000-02-22
申请号：US106018
申请日：1998-06-29
申请人： Kazuhiko Kano , Makiko Fujita , Yoshinori Ohtsuka
发明人： Kazuhiko Kano , Makiko Fujita , Yoshinori Ohtsuka
IPC分类号： G01L1/18 , G01C19/56 , G01P15/00 , G01P15/08 , G01P15/12 , G01P15/14 , H01L29/84 , H01L29/82
CPC分类号： G01C19/5719 , G01P15/0802 , G01P2015/0814 , Y10S73/01
摘要： A semiconductor type yaw rate sensor has a substrate, a beam structure formed from a semiconductor material and having at least one anchor portion disposed on the substrate, a weighted portion located above the substrate a predetermined gap therefrom, and a beam portion which extends from the anchor portion and supports the weighted portion. A movable electrode is formed onto the weighted portion, and a fixed electrode is formed on the substrate in such a manner that the fixed electrode faces the movable electrode. When a drive voltage is applied between the movable electrode and the fixed electrode, the beam structure is forcibly caused to vibrate in a direction that is horizontal relative to a substrate surface plane. In this yaw rate sensor, a strain gauge to monitor forced vibration of the beam structure is formed in the beam portion. As a result, the forced vibration of the beam structure can be monitored with a simple structure.
摘要翻译：半导体型偏航率传感器具有基板，由半导体材料形成的梁结构，并且具有设置在基板上的至少一个锚固部分，位于基板上方的预定间隙的加权部分以及从基板延伸的梁部分锚固部分并支撑加权部分。可移动电极形成在加权部分上，并且固定电极以固定电极面向可动电极的方式形成在基板上。当在可动电极和固定电极之间施加驱动电压时，梁结构被强制地沿相对于基板表面的水平方向振动。在该横摆率传感器中，在梁部形成有用于监视梁结构的强制振动的应变仪。结果，可以以简单的结构监视梁结构的强制振动。

46. 发明授权

US08256289B2 Angular rate sensor 有权
标题翻译：角速度传感器
公开(公告)号：US08256289B2
公开(公告)日：2012-09-04
申请号：US12923971
申请日：2010-10-19
申请人： Kazuhiko Kano , Akihiko Teshigahara , Kazuki Arakawa , Kazushi Asami
发明人： Kazuhiko Kano , Akihiko Teshigahara , Kazuki Arakawa , Kazushi Asami
IPC分类号： G01P9/04
CPC分类号： G01C19/5698
摘要： An angular rate sensor comprises a piezoelectric film having a first and a second surfaces forming an x-y plane and utilizes a perturbation mass coherently vibrating elastic acoustic waves on which a Coriolis force acts when the angular rate sensor undergoes a rotary motion about an x-direction. A first elastic acoustic wave is excited in the piezoelectric film by a driving transducer and a second elastic acoustic wave generated by the Coriolis force proportional to an angular rate of the rotary motion of the angular rate sensor itself is detected by the detecting transducer. The angular rate sensor further comprises at least a first electrode disposed on the first surface of the piezoelectric film for discharging a surface charge caused due to piezoelectric effect at the lower surface of the film in which the first elastic acoustic wave is excited.
摘要翻译：角速率传感器包括具有形成x-y平面的第一和第二表面的压电膜，并且当角速率传感器经历围绕x方向的旋转运动时，利用科里奥利力作用的扰动质量相干振动的弹性声波。第一弹性声波通过驱动传感器在压电膜中激发，并且由与角速率传感器本身的旋转运动的角速度成比例的科里奥利力产生的第二弹性声波由检测换能器检测。角速率传感器还包括至少第一电极，其设置在压电膜的第一表面上，用于在其中激发第一弹性声波的膜的下表面处排出由于压电效应引起的表面电荷。

47. 发明授权

US08253302B2 Surface acoustic wave element, method of producing the same, and method of changing resonation frequency of the same 失效
标题翻译：表面声波元件及其制造方法以及改变其谐振频率的方法
公开(公告)号：US08253302B2
公开(公告)日：2012-08-28
申请号：US12656523
申请日：2010-02-02
申请人： Kazuki Arakawa , Kazuhiko Kano , Shingo Jinno
发明人： Kazuki Arakawa , Kazuhiko Kano , Shingo Jinno
IPC分类号： H01L41/08 , H03H9/25
CPC分类号： H03H9/02645 , H03H9/02685 , H03H9/02708 , H03H9/02724 , H03H9/02748 , H03H9/02803
摘要： A surface acoustic wave element includes a piezoelectric member, a comb-teeth electrode, and a reflector. The comb-teeth electrode is arranged on the piezoelectric member. The reflector is arranged on the piezoelectric member. The reflector reflects a surface acoustic wave transmitted from the comb-teeth electrode. The reflector has a plurality of areas, and each of the areas has a frequency to make a reflection efficiency the largest. At least two of the frequencies of the areas are made different from each other.
摘要翻译：表面声波元件包括压电元件，梳齿电极和反射器。梳齿电极配置在压电元件上。反射器设置在压电元件上。反射器反射从梳齿电极传播的表面声波。反射器具有多个区域，并且每个区域具有使反射效率最大的频率。这些区域的至少两个频率彼此不同。

48. 发明授权

US08181521B2 Yaw rate sensor using surface acoustic wave 失效
标题翻译：偏航速率传感器采用表面声波
公开(公告)号：US08181521B2
公开(公告)日：2012-05-22
申请号：US12292709
申请日：2008-11-25
申请人： Kazuki Arakawa , Kazuhiko Kano , Akihiko Teshigahara
发明人： Kazuki Arakawa , Kazuhiko Kano , Akihiko Teshigahara
IPC分类号： G01P3/00
CPC分类号： G01C19/5698
摘要： A yaw rate sensor has two sets of exciting electrodes, perturbative weights and two sets of detecting electrodes on a surface of a piezoelectric substrate. The exciting electrodes excite first surface acoustic waves transmitted through the surface of the substrate in a propagation direction. The weights are oscillated by the waves and excite a second surface acoustic wave, transmitted through the surface of the substrate in a detection direction orthogonal to the propagation direction, in response to a yaw applied to the weights. The detecting electrodes measure an intensity of the second surface acoustic wave to detect the yaw rate. The sets of exciting electrodes are symmetrically placed with respect to a driving axis extending straight along the propagation direction. The group of weights is symmetric with respect to the driving axis.
摘要翻译：横摆率传感器在压电基板的表面上具有两组激励电极，扰动重量和两组检测电极。励磁电极在传播方向上激发透过基板表面的第一表面声波。权重由波振荡，并且响应于施加到权重的偏航，激发在与传播方向正交的检测方向上透射通过基板的表面的第二表面声波。检测电极测量第二声表面波的强度以检测横摆率。激励电极组相对于沿着传播方向直线延伸的驱动轴对称地放置。重量组相对于驱动轴对称。

49. 发明申请

US20050001275A1 Semiconductor dynamic quantity sensor 审中-公开
标题翻译：半导体动量传感器
公开(公告)号：US20050001275A1
公开(公告)日：2005-01-06
申请号：US10849259
申请日：2004-05-20
申请人： Makiko Sugiura , Kazuhiko Kano
发明人： Makiko Sugiura , Kazuhiko Kano
IPC分类号： G01P15/125 , G01P15/08 , H01L27/14 , H01L29/84
CPC分类号： G01P15/125 , G01P15/0802 , G01P2015/0814
摘要： An acceleration sensor comprising a spring portion joined to the base portion of a semiconductor substrate and elastically displaced in Y-direction in accordance with an applied acceleration, movable electrodes joined to the spring portion, fixed electrodes disposed to face the movable electrodes and adjusting electrodes for adjusting the spring constant of the spring portion. The spring portion has a pair of beams facing each other in the Y-direction, and is elastically deformed so that the interval between the pair of beams is varied. The adjusting electrodes are respectively equipped at the outside of one of the paired beams and at the outside of the other beam, and electrostatic force can be applied by the adjusting electrodes so that the paired beams are separated from each other.
摘要翻译：一种加速度传感器，包括：接合到半导体基板的基部的弹簧部分，并且根据施加的加速度在Y方向上弹性位移;连接到弹簧部分的可动电极;设置成面对可动电极的固定电极;以及用于调节弹簧部分的弹簧常数。弹簧部分具有在Y方向上彼此面对的一对梁，并且弹性变形，使得一对梁之间的间隔变化。调整电极分别配置在成对梁中的一个的外侧并且在另一个梁的外侧，并且可以通过调节电极施加静电力，使得成对的光束彼此分离。

50. 发明授权

US5895851A Semiconductor yaw rate sensor with a vibrating movable section with vertical and horizontal displacement detection 失效
标题翻译：具有振动可移动部分的垂直和水平位移检测的半导体偏航率传感器
公开(公告)号：US5895851A
公开(公告)日：1999-04-20
申请号：US892431
申请日：1997-07-14
申请人： Kazuhiko Kano , Yoshinori Otsuka , Tadashi Hattori
发明人： Kazuhiko Kano , Yoshinori Otsuka , Tadashi Hattori
IPC分类号： G01C19/56 , G01C19/5719 , G01C19/5726 , G01C19/5755 , G01C19/5769 , G01D3/036 , G01P15/08 , G01P15/12 , H01L29/84 , G01P9/04
CPC分类号： G01C19/5719 , G01D3/036 , G01P15/0802 , G01P15/124
摘要： A yaw rate sensor, which can be structured easily and at low cost and which can also detect exerted acceleration with high accuracy, is obtained. A movable electrode section is provided spaced at a specified gap with respect to a semiconductor substrate; fixed electrodes for excitation use forcibly vibrate the movable electrode section using an electrostatic force; a vertical displacement detection portion detects a vertical displacement of the movable electrode section; a horizontal displacement detection portion detects a horizontal displacement of the movable electrode section; and using at least the detection output of the vertical displacement detection portion, a signal processing circuit obtains a yaw rate detection output. Then, an aging compensation circuit detects an amplitude condition of the movable electrode section using the output of the horizontal displacement detection means; and the forced vibration of the movable electrode section is maintained a vibration at a resonance frequency.
摘要翻译：获得可以容易且低成本地构造并且还可以高精度地检测施加的加速度的偏航率传感器。可移动电极部分相对于半导体衬底以特定的间隙设置; 用于激发的固定电极使用静电力强制振动可动电极部分; 垂直位移检测部分检测可动电极部分的垂直位移; 水平位移检测部检测可动电极部的水平位移; 并且至少使用垂直位移检测部分的检测输出，信号处理电路获得横摆率检测输出。然后，老化补偿电路使用水平位移检测装置的输出来检测可动电极部的振幅状态; 并且可动电极部分的强制振动保持谐振频率的振动。

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