会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 43. 发明申请
    • INSPECTION APPARATUS
    • 检查装置
    • US20130286385A1
    • 2013-10-31
    • US13994755
    • 2011-12-07
    • Yusuke MiyazakiTakahiro JinguKatsuya Suzuki
    • Yusuke MiyazakiTakahiro JinguKatsuya Suzuki
    • G01N21/95
    • G01N21/9501G01N2201/0833
    • To increase the speed of inspection, an inspection apparatus may conduct an inspection by irradiating a wafer surface with a thin light beam and acquiring an image of an irradiated region with a photodetector. However, it is not easy to have the photodetector properly form the image of the irradiated region. This problem is not solved by prior art technologies.The present invention includes an image formation optical system having an optical fiber bundle, and additionally includes a mechanism for rotating the light condensing side of the optical fiber bundle. The present invention enables the photodetector to properly form the image of light scattered from the irradiated region.
    • 为了提高检查速度,检查装置可以通过用薄光束照射晶片表面并用光电检测器获取照射区域的图像来进行检查。 然而,使光电检测器适当地形成照射区域的图像是不容易的。 这个问题不能由现有技术解决。 本发明包括具有光纤束的图像形成光学系统,并且还包括用于旋转光纤束的聚光侧的机构。 本发明使得光电检测器能够适当地形成从照射区域散射的光的图像。