会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 48. 发明授权
    • Integratedly molded ink jet printer head manufacturing method
    • 一体成型喷墨打印头制造方法
    • US06874871B2
    • 2005-04-05
    • US10095386
    • 2002-03-12
    • Sang Kyeong Yun
    • Sang Kyeong Yun
    • B41J2/045B41J2/055B41J2/14B41J2/16
    • B41J2/1628B41J2/161B41J2/1623B41J2/1629B41J2/1631B41J2/1642B41J2/1643B41J2/1645B41J2/1646B41J2002/14306Y10S29/016Y10T29/42Y10T29/49401
    • A method for manufacturing ink jet printer head and the ink jet printer head made thereby are disclosed which method comprises a step to provide silicon wafer; a step to form restrictor plate over the silicon wafer by doping impurity component; a step to form nozzle plate under the silicon wafer by doping impurity component, electroplating a metal or forming a polysilicon layer; a step to form nozzle by etching after patterning the above nozzle plate; a step to form channel going through the restrictor plate and the silicon wafer by etching after patterning the restrictor plate and the silicon wafer; a step to form restrictor at the restrictor plate by etching after patterning the restrictor plate; and a step to form reserver continued to restrictor under the restrictor by etching definite thickness after patterning the silicon wafer; a step to separately form actuator composed of upper electrode, piezoelectric/electrostrictive film, lower electrode, vibration plate, chamber and chamber plate; and a step to bond the restrictor plate and the actuator.
    • 公开了一种用于制造喷墨打印头的方法和由此制造的喷墨打印头,该方法包括提供硅晶片的步骤; 通过掺杂杂质成分在硅晶片上形成限流板的步骤; 通过掺杂杂质成分,电镀金属或形成多晶硅层,在硅晶片下形成喷嘴板的步骤; 图案化上述喷嘴板之后通过蚀刻形成喷嘴的步骤; 在限制板和硅晶片图案化之后通过蚀刻形成通道经过限制板和硅晶片的步骤; 通过在限制板图案化之后通过蚀刻在限流板上形成限流器的步骤; 以及在图案化硅晶片之后通过蚀刻确定的厚度来形成储存器在限流器下继续限制的步骤; 分别形成由上电极,压电/电致伸缩膜,下电极,振动板,腔室和腔室板组成的致动器的步骤; 以及结合限流板和致动器的步骤。
    • 49. 发明授权
    • Membraneless piezoelectric/electrostrictive microactuator and manufacturing method thereof
    • 无膜压电/电致伸缩微致动器及其制造方法
    • US06584708B2
    • 2003-07-01
    • US09845484
    • 2001-04-30
    • Sang Kyeong YunSung June ParkDong Hoon Kim
    • Sang Kyeong YunSung June ParkDong Hoon Kim
    • B41J2045
    • H01L41/0973H01L41/313H01L41/332
    • The present invention relates to a membraneless piezoelectric/electrostrictive microactuator comprising: a chamber; a chamber plate in which the chamber is formed; a lower electrode formed on the chamber plate and covering the chamber; a bonding layer formed between the chamber plate and the lower electrode and bonding the chamber plate and the lower electrode; a piezoelectric/electrostrictive film formed on the lower electrode and vibrating when electrified; and an upper electrode formed on the piezoelectric/electrostrictive film, and a manufacturing method thereof, which is membraneless so that structure is simple so that manufacturing method is simple and production cost is reduced to effect eventually the productivity improvement, so also which produces effect of reliability and yield ratio improvement as it is membraneless so that there occur no deformation, crack or void at the bonding part of vibration plate and piezoelectric/electrostrictive film.
    • 无膜压电/电致伸缩微致动器技术领域本发明涉及一种无膜压电/电致伸缩微致动器,包括:腔室; 形成腔室的室板; 形成在所述室板上并覆盖所述室的下电极; 形成在所述室板和所述下电极之间并且接合所述室板和所述下电极的接合层; 形成在下电极上并在通电时振动的压电/电致伸缩膜; 以及形成在压电/电致伸缩膜上的上电极及其制造方法,其结构简单,制造方法简单,生产成本降低,生产效率提高,因此也是无膜的,因此也产生效果 可靠性和屈服比提高,因为它是无膜的,使得在振动板和压电/电致伸缩膜的接合部分处不发生变形,裂纹或空隙。
    • 50. 发明授权
    • Manufacturing method of ink jet printer head
    • 喷墨打印头的制造方法
    • US06497019B1
    • 2002-12-24
    • US09594644
    • 2000-06-15
    • Sang Kyeong Yun
    • Sang Kyeong Yun
    • G01D1520
    • B41J2/1626B41J2/161B41J2/1631B41J2/1643B41J2/1646Y10T29/42Y10T29/49401
    • A method for manufacturing an ink jet printer head is disclosed which the method comprises steps of providing a substrate; forming a crater layer by photolighography and plating under the substrate; forming a nozzle plate by photolighography and plating under the crater layer; forming a channel plate by photolighography and plating under the nozzle plate; forming a reserver plate by photolighography and plating under the channel plate; forming a restrictor plate by photolighography and plating under the reserver plate; forming a chamber plate by photolighography and plating under the restrictor plate; forming a vibration plate by plating under the chamber plate; removing the substrate; removing all photoresist remaining; forming a piezoelectric/electrostrictive film to actuate when electrified upon the vibration plate; and forming an upper electrode upon the piezoelectric/electrostrictive film.
    • 公开了一种制造喷墨打印头的方法,该方法包括提供基板的步骤; 通过在底物下进行光刻和电镀形成火山口层; 通过光刻技术在火山口层下形成喷嘴板; 在喷嘴板下通过光刻和电镀形成通道板; 在通道板下通过光刻和电镀形成储存板; 通过视网膜和储存板下的电镀形成限流板; 通过在限流板下的电子照相和电镀形成室板; 通过在室板下面电镀形成振动板; 去除衬底; 去除所有残留的光刻胶; 形成压电/电致伸缩膜以在振动板通电时致动; 并在压电/电致伸缩膜上形成上电极。