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    • 42. 发明申请
    • Copper CMP composition containing ionic polyelectrolyte and method
    • 含有离子聚电解质的铜CMP组成及方法
    • US20090056231A1
    • 2009-03-05
    • US11895896
    • 2007-08-28
    • Daniela WhiteJason J. KeleherJohn Parker
    • Daniela WhiteJason J. KeleherJohn Parker
    • C09K3/14B24B1/00
    • C09K3/1463C09G1/02H01L21/3212
    • The CMP compositions of the invention comprise not more than about 1 percent by weight of a particulate abrasive, a polyelectrolyte, which preferably has a weight average molecular weight of at least about 10,000 grams-per-mole (g/mol), a copper-complexing agent, and an aqueous carrier therefor. The polyelectrolyte can be an anionic polymer (e.g., an acrylate polymer or copolymer) or a cationic polymer (e.g., poly(2-[(methacryloyloxy)ethyl] trimethyl-ammonium halide). When an anionic polyelectrolyte is utilized, the copper-complexing agent preferably comprises an amino polycarboxylate compound (e.g., iminodiacetic acid or a salt thereof). When a cationic polyelectrolyte is utilized, the copper-complexing agent preferably comprises an amino acid (e.g., glycine). Preferably, the particulate abrasive comprises metal oxide such as titanium dioxide or silicon dioxide. Methods of polishing copper-containing substrates with the compositions are also disclosed.
    • 本发明的CMP组合物包含不超过约1重量%的颗粒磨料,聚电解质,其优选具有至少约10,000克/摩尔(g / mol)的重均分子量,铜 - 络合剂及其载体。 聚电解质可以是阴离子聚合物(例如,丙烯酸酯聚合物或共聚物)或阳离子聚合物(例如聚(2 - [(甲基丙烯酰氧基)乙基]三甲基 - 卤化铵)),当使用阴离子聚电解质时,铜络合 药剂优选包含氨基多羧酸盐化合物(例如亚氨基二乙酸或其盐)当使用阳离子聚电解质时,铜络合剂优选包含氨基酸(例如甘氨酸),优选颗粒磨料包含金属氧化物 作为二氧化钛或二氧化硅。还公开了用组合物抛光含铜基材的方法。
    • 44. 发明申请
    • METHOD AND APPARATUS FOR CONCENTRATING A SLURRY
    • 浓缩浆料的方法和装置
    • US20070221575A1
    • 2007-09-27
    • US10590090
    • 2004-10-15
    • John CopelandJohn Parker
    • John CopelandJohn Parker
    • C02F1/26B01D61/00B01D61/12B01D61/14B01D61/18
    • B01D63/084B01D61/14B01D65/003B01D2313/08B01D2313/19B01D2315/04C01P2006/10C09C1/3646C09D17/008
    • The current invention provides improved methods and filter stacks for concentrating a slurry of titanium dioxide. The improved filter stack comprises a series of filter disks and diverter trays arranged in parallel. The present invention provides an improvement over prior art filter stacks by using a substantially complete weld to attach a diverter plate to the diverter trays. The current invention also provides an improved method for pre-conditioning a filter stack. The improved method is designed to pre-condition and gradually prepare the filter stack for production of the desired slurry of titanium dioxide. Further, the current invention provides an improved process for preparing and transporting a slurry of titanium dioxide. Finally, the current invention provides a method for enhancing the lifespan of a filter stack. The method for enhancing the lifespan of the filter stack continuously monitors the flow rate and specific gravity of fluids produced from the filter stack and signals the need for flushing of the filter stack.
    • 本发明提供了用于浓缩二氧化钛浆料的改进方法和过滤层。 改进的过滤器堆叠包括并排布置的一系列过滤盘和转向盘。 本发明通过使用基本上完整的焊接将分流板连接到转向盘来提供对现有技术的过滤器堆叠的改进。 本发明还提供了一种改进的预处理过滤器堆叠的方法。 改进的方法被设计用于预处理和逐渐制备用于生产所需二氧化钛浆料的过滤器堆叠。 此外,本发明提供了制备和输送二氧化钛浆料的改进方法。 最后,本发明提供了一种增强过滤器堆的寿命的方法。 用于提高过滤器堆的寿命的方法连续监测从过滤器堆产生的流体的流速和比重,并且指示需要冲洗过滤器堆叠。