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    • 43. 发明申请
    • Trench semiconductor device having gate oxide layer with mulitiple thicknesses and processes of fabricating the same
    • 沟槽半导体器件具有多个厚度的栅极氧化物层及其制造方法
    • US20050215013A1
    • 2005-09-29
    • US11137151
    • 2005-05-25
    • Richard WilliamsWayne Grabowski
    • Richard WilliamsWayne Grabowski
    • H01L21/336H01L21/76H01L21/8242H01L29/08H01L29/10H01L29/423H01L29/78
    • H01L29/7813H01L29/0847H01L29/0878H01L29/1095H01L29/4232H01L29/42368H01L29/4238H01L29/66734H01L29/7397H01L29/7808H01L29/7811H01L29/7828H01L29/8083
    • The a trench semiconductor device such as a power MOSFET the high electric field at the corner of the trench is diminished by increasing the thickness of the gate oxide layer at the bottom of the trench. Several processes for manufacturing such devices are described. In one group of processes a directional deposition of silicon oxide is performed after the trench has been etched, yielding a thick oxide layer at the bottom of the trench. Any oxide which deposits on the walls of the trench is removed before a thin gate oxide layer is grown on the walls. The trench is then filled with polysilicon in or more stages. In a variation of the process a small amount of photoresist is deposited on the oxide at the bottom of the trench before the walls of the trench are etched. Alternatively, polysilicon can be deposited in the trench and etched back until only a portion remains at the bottom of the trench. The polysilicon is then oxidized and the trench is refilled with polysilicon. The processes can be combined, with a directional deposition of oxide being followed by a filling and oxidation of polysilicon. A process of forming a “keyhole” shaped gate electrode includes depositing polysilicon at the bottom of the trench, oxidizing the top surface of the polysilicon, etching the oxidized polysilicon, and filling the trench with polysilicon.
    • 诸如功率MOSFET的沟槽半导体器件通过增加沟槽底部的栅极氧化物层的厚度来减小沟槽拐角处的高电场。 描述了用于制造这种设备的几个过程。 在一组工艺中,在蚀刻沟槽之后进行氧化硅的定向沉积,在沟槽的底部产生厚的氧化物层。 沉积在沟槽壁上的任何氧化物在薄的栅极氧化物层生长在壁上之前被去除。 然后在多层或多层中填充沟槽。 在该方法的变化中,在蚀刻沟槽的壁之前,在沟槽底部的氧化物上沉积少量的光致抗蚀剂。 或者,多晶硅可以沉积在沟槽中并被回蚀,直到只有一部分保留在沟槽的底部。 然后将多晶硅氧化,并用多晶硅再填充沟槽。 该方法可以组合,随着氧化物的定向沉积,随后是多晶硅的填充和氧化。 形成“键孔”形栅电极的工艺包括在沟槽的底部沉积多晶硅,氧化多晶硅的顶表面,蚀刻氧化的多晶硅,并用多晶硅填充沟槽。
    • 47. 发明申请
    • Compositions and methods for the identification and selection of nucleic acids and polypeptides
    • 用于鉴定和选择核酸和多肽的组合物和方法
    • US20050089913A1
    • 2005-04-28
    • US10960453
    • 2004-10-07
    • Richard Williams
    • Richard Williams
    • C12N15/10A61K48/00C07H21/02C12Q1/68
    • C12N15/1034C12N15/1062G01N33/58G01N33/6845G01N2458/10
    • This invention relates generally to systems and methods for identifying and selecting, desired proteins or nucleic acid molecules by linking mRNA, with known or unknown sequences, to its translated protein to form a cognate pair. The cognate pair is selected based upon desired properties of the protein or the nucleic acid. This method also includes the evolution of a desired protein or nucleic acid molecule by amplifying the nucleic acid portion of the selected cognate pair, introducing variation into the nucleic acid, translating the nucleic acid, attaching the nucleic acid to its protein to form a second cognate pair, and re-selecting this cognate pair based upon desired properties. Modified mRNAs operable to crosslink to tRNAs are also provided. Methods of producing a psoralen monoadduct or a crosslink are also provided.
    • 本发明一般涉及通过将mRNA与已知或未知序列连接到其翻译的蛋白质以形成同源对来鉴定和选择所需蛋白质或核酸分子的系统和方法。 基于蛋白质或核酸的所需性质选择同源对。 该方法还包括通过扩增所选择的同源对的核酸部分,引入核酸的变异,翻译核酸,将核酸连接到其蛋白质以形成第二个同源物,从而演化期望的蛋白质或核酸分子 并且基于所需的属性重新选择该同源对。 还提供了可操作以交联至tRNA的修饰的mRNA。 还提供了补骨脂素单加成物或交联剂的制备方法。