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    • 42. 发明申请
    • GAS SHOWER MODULE
    • 气体淋浴模块
    • US20100126418A1
    • 2010-05-27
    • US12369990
    • 2009-02-12
    • Ming-Tung CHIANGJung-Chen ChienJung-Chen HoChih-Yung Huang
    • Ming-Tung CHIANGJung-Chen ChienJung-Chen HoChih-Yung Huang
    • C23C16/54
    • C23C16/45565C23C16/45559C23C16/45561
    • A gas shower module for gas deposition chamber with gas channel is disclosed, which comprises: a distributor with at least one diffusion cell positioned therein along first axial direction and a plurality of inlets respectively connecting to the gas channel and the diffusion cell; and a shower with at least one shower channel positioned therein along second axial direction, gas-inlet passages connected to the diffusion cell and the shower channel, and gas-outlet passages connected to the shower channel and gas deposition chamber; wherein the distributor is connected to the shower so that the diffusion cell will be connected to the shower channel through gas-inlet passages and the first axial direction is not be parallel to the second axial direction.
    • 公开了一种具有气体通道的气体沉积室的气体淋浴组件,其包括:分配器,其具有沿着第一轴向方向定位在其中的至少一个扩散单元和分别连接到气体通道和扩散单元的多个入口; 以及具有沿着第二轴向位于其中的至少一个淋浴通道的淋浴,连接到扩散池和淋浴通道的气体入口通道,以及连接到淋浴通道和气体沉积室的气体出口通道; 其中所述分配器连接到所述淋浴器,使得所述扩散单元将通过气体入口通道连接到所述淋浴通道,并且所述第一轴向方向不平行于所述第二轴向方向。