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41. 发明申请

US20110024852A1 MEMS DEVICE AND MEMS SPRING ELEMENT 有权
标题翻译： MEMS器件和MEMS弹簧元件
公开(公告)号：US20110024852A1
公开(公告)日：2011-02-03
申请号：US12756305
申请日：2010-04-08
申请人： Chuan-Wei WANG , Sheng-Ta Lee , Hsin-Hui Hsu
发明人： Chuan-Wei WANG , Sheng-Ta Lee , Hsin-Hui Hsu
IPC分类号： H01L29/84
CPC分类号： B81B3/0072 , B81B2201/025 , B81B2203/0118
摘要： A micro electromechanical system (MEMS) spring element is disposed on a substrate, and includes a fixing portion and a moveable portion. The fixing portion is fixed on the substrate, and includes an insulating layer, a plurality of metal-fixing layers and a plurality of supporting-fixing layers. The insulating layer is disposed on the substrate. The metal-fixing layers are disposed above the insulating layer. The supporting-fixing layers are connected between the metal-fixing layers. The moveable portion has a first end and a second end. The first end is connected with the fixing portion, and the second end is suspended above the substrate. The moveable portion includes a plurality of metal layers and at least a supporting layer. The supporting layer is connected between the adjacent metal layers, and a hollow region is formed between the supporting layer and the adjacent metal layers. The deformation of the MEMS spring element generated because of the different thermal expansion may be avoided and the working performance of the MEMS spring element can be improved.
摘要翻译：微机电系统（MEMS）弹簧元件设置在基板上，并且包括固定部分和可移动部分。固定部固定在基板上，具有绝缘层，多个金属固定层和多个支撑固定层。绝缘层设置在基板上。金属固定层设置在绝缘层的上方。支撑固定层连接在金属固定层之间。可移动部分具有第一端和第二端。第一端与固定部分连接，第二端悬挂在基板上。可移动部分包括多个金属层和至少一个支撑层。支撑层连接在相邻的金属层之间，并且在支撑层和相邻金属层之间形成中空区域。可以避免由于不同的热膨胀而产生的MEMS弹簧元件的变形，并且可以提高MEMS弹簧元件的工作性能。

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