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41. 发明授权

US08358488B2 Micro-electromechanical system based switching 有权
标题翻译：基于微机电系统的切换
公开(公告)号：US08358488B2
公开(公告)日：2013-01-22
申请号：US11763739
申请日：2007-06-15
申请人： William James Premerlani , Kanakasabapathi Subramanian , Christopher Fred Keimel , Kathleen Ann O'Brien , John Norton Park
发明人： William James Premerlani , Kanakasabapathi Subramanian , Christopher Fred Keimel , Kathleen Ann O'Brien , John Norton Park
IPC分类号： H02H3/02
CPC分类号： H01H59/0009 , H01H9/30 , H01H9/542 , H01H2071/008
摘要： A current control device is disclosed. The current control device includes control circuitry integrally arranged with a current path and at least one micro electromechanical system (MEMS) switch disposed in the current path. The current control device further includes a hybrid arcless limiting technology (HALT) circuit connected in parallel with the at least one MEMS switch facilitating arcless opening of the at least one MEMS switch, and a pulse assisted turn on (PATO) circuit connected in parallel with the at least one MEMS switch facilitating arcless closing of the at least one MEMS switch.
摘要翻译：公开了一种电流控制装置。电流控制装置包括一体地布置有电流路径的控制电路和设置在电流路径中的至少一个微机电系统（MEMS）开关。电流控制装置还包括与所述至少一个MEMS开关并联连接的混合无电弧限制技术（HALT）电路，其促进所述至少一个MEMS开关的无弧开启，以及脉冲辅助导通（PATO）电路与所述至少一个MEMS开关促进所述至少一个MEMS开关的无弧关闭。

42. 发明授权

US08054589B2 Switch structure and associated circuit 有权
标题翻译：开关结构及相关电路
公开(公告)号：US08054589B2
公开(公告)日：2011-11-08
申请号：US12639060
申请日：2009-12-16
申请人： Arun Virupaksha Gowda , Kathleen Ann O'Brien , John Norton Park , William James Premerlani , Owen Jannis Samuel Schelenz , Kanakasabapathi Subramanian
发明人： Arun Virupaksha Gowda , Kathleen Ann O'Brien , John Norton Park , William James Premerlani , Owen Jannis Samuel Schelenz , Kanakasabapathi Subramanian
IPC分类号： H01H9/42 , H01H73/18
CPC分类号： H01H59/0009 , H01H1/0036 , H01H9/542 , H01H2071/008 , Y10T307/937
摘要： An apparatus, such as a switch module, is provided. The apparatus can include an electromechanical switch structure configured to move between an open configuration and a fully-closed configuration (associated with a minimum characteristic resistance) over a characteristic time. A commutation circuit can be connected in parallel with the electromechanical switch structure, and can include a balanced diode bridge configured to suppress arc formation between contacts of the electromechanical switch structure and a pulse circuit including a pulse capacitor configured to form a pulse signal (in connection with a switching event of the electromechanical switch structure) for causing flow of a pulse current through the balanced diode bridge. The electromechanical switch structure and the balanced diode bridge can be disposed such that a total inductance associated with the commutation circuit is less than or equal to a product of the characteristic time and the minimum characteristic resistance.
摘要翻译：提供了诸如开关模块的装置。该装置可以包括被配置为在特征时间上在打开配置和完全关闭配置（与最小特征电阻相关联）之间移动的机电开关结构。换向电路可以与机电开关结构并联连接，并且可以包括平衡二极管桥，该平衡二极管桥被配置为抑制机电开关结构的触点之间的电弧形成，并且包括脉冲电路，脉冲电路包括构成为形成脉冲信号的脉冲电容具有机电开关结构的切换事件），用于使脉冲电流流过平衡二极管桥。机电开关结构和平衡二极管电桥可以被布置成使得与换向电路相关联的总电感小于或等于特征时间和最小特性电阻的乘积。

43. 发明申请

US20110140546A1 SWITCH STRUCTURE AND ASSOCIATED CIRCUIT 有权
标题翻译：开关结构及相关电路
公开(公告)号：US20110140546A1
公开(公告)日：2011-06-16
申请号：US12639060
申请日：2009-12-16
申请人： Arun Virupaksha Gowda , Kathleen Ann O'Brien , John Norton Park , William James Premerlani , Owen Jannis Samuel Schelenz , Kanakasabapathi Subramanian
发明人： Arun Virupaksha Gowda , Kathleen Ann O'Brien , John Norton Park , William James Premerlani , Owen Jannis Samuel Schelenz , Kanakasabapathi Subramanian
IPC分类号： H01H9/54
CPC分类号： H01H59/0009 , H01H1/0036 , H01H9/542 , H01H2071/008 , Y10T307/937
摘要： An apparatus, such as a switch module, is provided. The apparatus can include an electromechanical switch structure configured to move between an open configuration and a fully-closed configuration (associated with a minimum characteristic resistance) over a characteristic time. A commutation circuit can be connected in parallel with the electromechanical switch structure, and can include a balanced diode bridge configured to suppress arc formation between contacts of the electromechanical switch structure and a pulse circuit including a pulse capacitor configured to form a pulse signal (in connection with a switching event of the electromechanical switch structure) for causing flow of a pulse current through the balanced diode bridge. The electromechanical switch structure and the balanced diode bridge can be disposed such that a total inductance associated with the commutation circuit is less than or equal to a product of the characteristic time and the minimum characteristic resistance.
摘要翻译：提供了诸如开关模块的装置。该装置可以包括被配置为在特征时间上在打开配置和完全关闭配置（与最小特征电阻相关联）之间移动的机电开关结构。换向电路可以与机电开关结构并联连接，并且可以包括平衡二极管桥，该平衡二极管桥被配置为抑制机电开关结构的触点之间的电弧形成，并且包括脉冲电路，脉冲电路包括构成为形成脉冲信号的脉冲电容具有机电开关结构的切换事件），用于使脉冲电流流过平衡二极管桥。机电开关结构和平衡二极管电桥可以被布置成使得与换向电路相关联的总电感小于或等于特征时间和最小特性电阻的乘积。

44. 发明申请

US20080308254A1 MICRO-ELECTROMECHANICAL SYSTEM BASED SWITCHING IN HEATING-VENTILATION-AIR-CONDITIONING SYSTEMS 有权
标题翻译：加热通风系统中基于微机电系统的切换
公开(公告)号：US20080308254A1
公开(公告)日：2008-12-18
申请号：US11763631
申请日：2007-06-15
申请人： William James Premerlani , Kanakasabapathi Subramanian , Daniel Takashi Nakano
发明人： William James Premerlani , Kanakasabapathi Subramanian , Daniel Takashi Nakano
IPC分类号： F25B29/00
CPC分类号： F24F11/30
摘要： HVAC systems implementing micro-electromechanical system based switching devices. Exemplary embodiments include a HVAC system, including a load motor, a main breaker micro electromechanical system (MEMS) switch, and a variable frequency drive (VFD) disposed between and electrically coupled to the load motor and the main breaker MEMS switch.
摘要翻译： HVAC系统实现基于微机电系统的开关设备。示例性实施例包括HVAC系统，其包括负载电动机，主断路器微机电系统（MEMS）开关和设置在负载电动机和主断路器MEMS开关之间并且电耦合到负载电动机和主断路器MEMS开关的变频驱动器（VFD）。

45. 发明授权

US08101898B2 Optically gated MEMS switch 有权
标题翻译：光电门控MEMS开关
公开(公告)号：US08101898B2
公开(公告)日：2012-01-24
申请号：US12408937
申请日：2009-03-23
申请人： Glen Peter Koste , Kathleen Ann O'Brien , Kanakasabapathi Subramanian , John Norton Park
发明人： Glen Peter Koste , Kathleen Ann O'Brien , Kanakasabapathi Subramanian , John Norton Park
IPC分类号： G01J1/44 , H01J40/14
CPC分类号： H03K17/941 , H01H59/0009
摘要： An optically powered MEMS gate driver includes a photovoltaic converter configured to receive a light signal from a light source and output a DC supply voltage for a MEMS gate driver in response thereto. The MEMS gate driver further includes a DC to DC converter electrically coupled to the photovoltaic converter and configured to output a line level DC voltage in response to the DC supply voltage. An electrical circuit, also included as a portion of the MEMS gate driver is electrically coupled to both the photovoltaic converter and the DC to DC converter is configured to receive the supply voltage and the line level voltage and to output a line level drive signal in response thereto. The optically powered MEMS gate driver is self-contained within a common EMI enclosure thus providing isolation between the gate driver and command signal electronics.
摘要翻译：光学驱动的MEMS栅极驱动器包括光电转换器，其被配置为从光源接收光信号，并响应于此向MEMS栅极驱动器输出DC电源电压。 MEMS栅极驱动器还包括电耦合到光伏转换器并被配置为响应于DC电源电压输出线路电平DC电压的DC-DC转换器。还包括作为MEMS栅极驱动器的一部分的电路电耦合到光伏转换器和DC-DC转换器两者被配置为接收电源电压和线路电平电压并且响应地输出线路电平的驱动信号到此。光学驱动的MEMS栅极驱动器是独立于普通的EMI外壳内，从而提供栅极驱动器和命令信号电子器件之间的隔离。

46. 发明授权

US08093971B2 Micro-electromechanical system switch 有权
标题翻译：微机电系统开关
公开(公告)号：US08093971B2
公开(公告)日：2012-01-10
申请号：US12340775
申请日：2008-12-22
申请人： Xuefeng Wang , Alex David Corwin , Bo Li , Kanakasabapathi Subramanian , Kuna Venkat Satya Rama Kishore
发明人： Xuefeng Wang , Alex David Corwin , Bo Li , Kanakasabapathi Subramanian , Kuna Venkat Satya Rama Kishore
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01H1/0036 , H01H2001/0078 , H01H2001/0084 , Y10T29/49105
摘要： A micro electromechanical system switch having an electrical pathway is presented. The switch includes a first portion and a second portion. The second portion is offset to a zero overlap position with respect to the first portion when the switch is in open position (or in the closed position depending on the switch architecture). The switch further includes an actuator for moving the first portion and the second portion into contact.
摘要翻译：提出了具有电路径的微机电系统开关。开关包括第一部分和第二部分。当开关处于打开位置时（或根据开关结构处于闭合位置），第二部分相对于第一部分偏移到零重叠位置。开关还包括用于使第一部分和第二部分移动接触的致动器。

47. 发明申请

US20110127853A1 Method and Apparatus for Switching Electrical Power 有权
标题翻译：用于切换电力的方法和装置
公开(公告)号：US20110127853A1
公开(公告)日：2011-06-02
申请号：US12629309
申请日：2009-12-02
申请人： Lincoln Mamoru Fujita , Kanakasabapathi Subramanian
发明人： Lincoln Mamoru Fujita , Kanakasabapathi Subramanian
IPC分类号： H02B1/24
CPC分类号： G01D4/004 , H01H1/0036 , H01H59/0009 , Y02B90/242 , Y02B90/244 , Y04S20/322 , Y04S20/327 , Y10T307/74 , Y10T307/832 , Y10T307/865
摘要： A current control device is described. The current control device includes at least one line socket configured to couple to a first power system. The current control device also includes at least one load socket configured to couple to a second power system and at least one micro-electromechanical system (MEMS) switching device coupled between the at least one line socket and the at least one load socket. The at least one MEMS switching device is configured to selectably couple the first power system to the second power system.
摘要翻译：描述电流控制装置。电流控制装置包括配置成耦合到第一电力系统的至少一个线路插座。电流控制装置还包括配置成耦合到第二电力系统的至少一个负载插座和耦合在所述至少一个线路插座和所述至少一个负载插座之间的至少一个微机电系统（MEMS）开关装置。所述至少一个MEMS开关装置被配置为将所述第一电力系统可选择地耦合到所述第二电力系统。

48. 发明申请

US20100155203A1 MICRO-ELECTROMECHANICAL SYSTEM SWITCH 有权
标题翻译：微电子系统开关
公开(公告)号：US20100155203A1
公开(公告)日：2010-06-24
申请号：US12340775
申请日：2008-12-22
申请人： Xuefeng Wang , Alex David Corwin , Bo Li , Kanakasabapathi Subramanian , Kuna Venkat Satya Rama Kishore
发明人： Xuefeng Wang , Alex David Corwin , Bo Li , Kanakasabapathi Subramanian , Kuna Venkat Satya Rama Kishore
IPC分类号： H01H57/00 , H01H11/00
CPC分类号： H01H59/0009 , H01H1/0036 , H01H2001/0078 , H01H2001/0084 , Y10T29/49105
摘要： A micro electromechanical system switch having an electrical pathway is presented. The switch includes a first portion and a second portion. The second portion is offset to a zero overlap position with respect to the first portion when the switch is in open position (or in the closed position depending on the switch architecture). The switch further includes an actuator for moving the first portion and the second portion into contact.
摘要翻译：提出了具有电路径的微机电系统开关。开关包括第一部分和第二部分。当开关处于打开位置时（或根据开关结构在关闭位置），第二部分相对于第一部分偏移到零重叠位置。开关还包括用于使第一部分和第二部分移动接触的致动器。

49. 发明申请

US20080211347A1 Circuit System With Supply Voltage For Driving An Electromechanical Switch 审中-公开
标题翻译：具有用于驱动机电开关的电源电压的电路系统
公开(公告)号：US20080211347A1
公开(公告)日：2008-09-04
申请号：US11681205
申请日：2007-03-02
申请人： Joshua Isaac Wright , Kanakasabapathi Subramanian , Nicole Christine Reeves , John Norton Park
发明人： Joshua Isaac Wright , Kanakasabapathi Subramanian , Nicole Christine Reeves , John Norton Park
IPC分类号： H01L41/107
CPC分类号： H01H59/0009 , H01H1/0036 , H01H2071/008
摘要： A circuit for controlling operation of a load. In one example, a MEMS switch is positioned in the circuit to place the load in one of a conducting state or a nonconducting state. A piezoelectric transformer provides a relatively high voltage output signal or a relatively low voltage output signal to control movement of the switch between a closed position, placing the load in the conducting state, and an open position. The high voltage output signal includes a frequency component in the resonant frequency range of the transformer. Control circuitry provides an input voltage signal to the piezoelectric transformer to provide the high voltage output signal or the low voltage output signal at the output terminals of the piezoelectric transformer.
摘要翻译：用于控制负载运行的电路。在一个示例中，MEMS开关位于电路中以将负载置于导通状态或非导通状态之一。压电变压器提供相对较高的电压输出信号或相对低电压的输出信号，以控制开关在将负载置于导通状态的关闭位置和打开位置之间的移动。高压输出信号包括变压器谐振频率范围内的频率分量。控制电路向压电变压器提供输入电压信号，以在压电变压器的输出端提供高压输出信号或低压输出信号。

50. 发明授权

US07365437B2 Method of wet etching vias and articles formed thereby 失效
标题翻译：湿法蚀刻通孔和由此形成的制品的方法
公开(公告)号：US07365437B2
公开(公告)日：2008-04-29
申请号：US11337249
申请日：2006-01-23
申请人： Kanakasabapathi Subramanian , Jeffrey Bernard Fortin , Wei-Cheng Tian
发明人： Kanakasabapathi Subramanian , Jeffrey Bernard Fortin , Wei-Cheng Tian
IPC分类号： H01L29/40
CPC分类号： H01L21/30617 , H01L21/76898 , H01L23/481 , H01L2223/54453 , H01L2924/0002 , H01L2924/00
摘要： A method for forming smooth walled, prismatically-profiled through-wafer vias and articles formed through the method. An etch stop material is provided on a wafer, which may be a silicon wafer. A mask material is provided on the etch stop material and patterned in such a way as to lead to the formation of vias that have at least one pair of opposing side walls that run parallel to a plane in the wafer. A wet etchant, such as potassium hydroxide, is used to etch vias in the wafer. The use of a wet etchant leads to the formation of smooth side walls. This method allows an aspect ratio of height versus width of the vias of greater than 75 to 1.
摘要翻译：用于形成通过该方法形成的平滑壁，棱镜通孔晶片通孔和制品的方法。在晶片上提供蚀刻停止材料，晶片可以是<110>硅晶片。在蚀刻停止材料上提供掩模材料，并以这样的方式图案化，以便导致形成通孔，其具有平行于晶片中的111平面延伸的至少一对相对的侧壁。使用诸如氢氧化钾的湿蚀刻剂来蚀刻晶片中的通孔。使用湿蚀刻剂导致形成平滑的侧壁。该方法允许通孔的高度与宽度的长宽比大于75至1。

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