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41. 发明申请

US20060115047A1 X-RAY APPARATUS WITH DUAL MONOCHROMATORS 有权
标题翻译：具有双重单色器的X射线设备
公开(公告)号：US20060115047A1
公开(公告)日：2006-06-01
申请号：US11000053
申请日：2004-12-01
申请人： Boris Yokhin
发明人： Boris Yokhin
IPC分类号： G01N23/20 , G01N23/201
CPC分类号： G01N23/201
摘要： X-ray apparatus, consisting of a single X-ray tube which is adapted to generate X-rays and a first optic which is adapted to focus a first portion of the X-rays onto a region of a sample via a first beam path, thereby generating first scattered X-rays from the region. The apparatus also includes a second optic which is adapted to focus a second portion of the X-rays onto the region of the sample via a second beam path, different from the first beam path, thereby generating second scattered X-rays from the region. A detector assembly simultaneously collects the first and the second scattered X-rays.
摘要翻译： X射线装置由适于产生X射线的单个X射线管和适于将X射线的第一部分经由第一光束路径聚焦到样品的区域上的第一光学元件组成，从而从该区域产生第一散射X射线。该装置还包括第二光学器件，其适于通过不同于第一光束路径的第二光束路径将X射线的第二部分聚焦到样品的区域上，从而从该区域产生第二散射X射线。检测器组件同时收集第一和第二散射X射线。

42. 发明授权

US07804934B2 Accurate measurement of layer dimensions using XRF 有权
标题翻译：使用XRF精确测量层的尺寸
公开(公告)号：US07804934B2
公开(公告)日：2010-09-28
申请号：US12272050
申请日：2008-11-17
申请人： Dileep Agnihotri , Jeremy O'Dell , Isaac Mazor , Boris Yokhin
发明人： Dileep Agnihotri , Jeremy O'Dell , Isaac Mazor , Boris Yokhin
IPC分类号： G01N23/223 , G01T1/36
CPC分类号： G01B15/02 , G01N23/223 , G01N2223/076 , H01L22/12
摘要： A method for inspection of a sample includes directing an excitation beam to impinge on an area of a planar sample that includes a feature having sidewalls perpendicular to a plane of the sample, the sidewalls having a thin film thereon. An intensity of X-ray fluorescence (XRF) emitted from the sample responsively to the excitation beam is measured, and a thickness of the thin film on the sidewalls is assessed based on the intensity. In another method, the width of recesses in a surface layer of a sample and the thickness of a material deposited in the recesses after polishing are assessed using XRF.
摘要翻译：用于检查样品的方法包括引导激发光束撞击平面样品的区域，该平面样品的区域包括具有垂直于样品平面的侧壁的特征，该侧壁在其上具有薄膜。测量响应于激发光束从样品发射的X射线荧光强度（XRF），并且基于强度来评估侧壁上的薄膜的厚度。在另一种方法中，使用XRF来评估样品的表面层中的凹陷的宽度和抛光后沉积在凹部中的材料的厚度。

43. 发明授权

US07680243B2 X-ray measurement of properties of nano-particles 有权
标题翻译：纳米颗粒的X射线测量性质
公开(公告)号：US07680243B2
公开(公告)日：2010-03-16
申请号：US11896909
申请日：2007-09-06
申请人： Boris Yokhin , Alexander Tokar , Alexander Krokhmal , Asher Peled , Dileep Agnihotri
发明人： Boris Yokhin , Alexander Tokar , Alexander Krokhmal , Asher Peled , Dileep Agnihotri
IPC分类号： G01N23/223 , G01N23/201
CPC分类号： G01N23/2206 , G01N2223/054 , G01N2223/076
摘要： A method for analyzing a sample includes directing one or more beams of X-rays to impinge on an area of a surface of the sample on which a layer of nano-particles of a selected element has been formed. Secondary X-ray radiation from the area is detected responsively to the one or more beams. A distribution of the nano-particles on the surface is characterized based on the detected radiation.
摘要翻译：用于分析样品的方法包括引导一个或多个X射线束照射到已经形成了所选元素的纳米颗粒层的样品的表面的区域上。响应于一个或多个光束检测来自该区域的二次X射线辐射。基于检测到的辐射来表征纳米颗粒在表面上的分布。

44. 发明申请

US20090067573A1 X-ray measurement of properties of nano-particles 有权
标题翻译：纳米颗粒的X射线测量性质
公开(公告)号：US20090067573A1
公开(公告)日：2009-03-12
申请号：US11896909
申请日：2007-09-06
申请人： Boris Yokhin , Alexander Tokar , Alexander Krokhmal , Asher Peled , Dileep Agnihotri
发明人： Boris Yokhin , Alexander Tokar , Alexander Krokhmal , Asher Peled , Dileep Agnihotri
IPC分类号： G01N23/223
CPC分类号： G01N23/2206 , G01N2223/054 , G01N2223/076
摘要： A method for analyzing a sample includes directing one or more beams of X-rays to impinge on an area of a surface of the sample on which a layer of nano-particles of a selected element has been formed. Secondary X-ray radiation from the area is detected responsively to the one or more beams. A distribution of the nano-particles on the surface is characterized based on the detected radiation.
摘要翻译：用于分析样品的方法包括引导一个或多个X射线束照射到已经形成了所选元素的纳米颗粒层的样品的表面的区域上。响应于一个或多个光束检测来自该区域的二次X射线辐射。基于检测到的辐射来表征纳米颗粒在表面上的分布。

45. 发明授权

US07321652B2 Multi-detector EDXRD 有权
标题翻译：多检测器EDXRD
公开(公告)号：US07321652B2
公开(公告)日：2008-01-22
申请号：US11532162
申请日：2006-09-15
申请人： Boris Yokhin , Alexander Krokhmal , Alex Tokar
发明人： Boris Yokhin , Alexander Krokhmal , Alex Tokar
IPC分类号： G01T1/36
CPC分类号： G01N23/20091
摘要： A method for analysis of a sample includes irradiating an area of the sample with a polychromatic X-ray beam. X-rays scattered from the sample are detected using a plurality of detectors simultaneously in different, respective positions, whereby the detectors generate respective outputs. Energy-dispersive processing is applied to the outputs of the detectors so as to identify one or more X-ray diffraction lines of the sample.
摘要翻译：用于分析样品的方法包括用多色X射线束照射样品的区域。使用多个检测器在不同的各个位置同时检测从样本散射的X射线，由此检测器产生相应的输出。将能量色散处理应用于检测器的输出，以便识别样品的一个或多个X射线衍射线。

46. 发明授权

US07076024B2 X-ray apparatus with dual monochromators 有权
标题翻译：具有双重单色仪的X射线设备
公开(公告)号：US07076024B2
公开(公告)日：2006-07-11
申请号：US11000053
申请日：2004-12-01
申请人： Boris Yokhin
发明人： Boris Yokhin
IPC分类号： G01N23/20
CPC分类号： G01N23/201
摘要： X-ray apparatus, consisting of a single X-ray tube which is adapted to generate X-rays and a first optic which is adapted to focus a first portion of the X-rays onto a region of a sample via a first beam path, thereby generating first scattered X-rays from the region. The apparatus also includes a second optic which is adapted to focus a second portion of the X-rays onto the region of the sample via a second beam path, different from the first beam path, thereby generating second scattered X-rays from the region. A detector assembly simultaneously collects the first and the second scattered X-rays.
摘要翻译： X射线装置由适于产生X射线的单个X射线管和适于将X射线的第一部分经由第一光束路径聚焦到样品的区域上的第一光学元件组成，从而从该区域产生第一散射X射线。该装置还包括第二光学器件，其适于通过不同于第一光束路径的第二光束路径将X射线的第二部分聚焦到样品的区域上，从而从该区域产生第二散射X射线。检测器组件同时收集第一和第二散射X射线。

47. 发明申请

US20060133570A1 Measurement of critical dimensions using X-ray diffraction in reflection mode 有权
$Measurement of critical dimensions using X-ray diffraction in reflection mode$
公开(公告)号：US20060133570A1
公开(公告)日：2006-06-22
申请号：US11018352
申请日：2004-12-22
申请人： Isaac Mazor , Boris Yokhin
发明人： Isaac Mazor , Boris Yokhin
IPC分类号： G01N23/20
CPC分类号： G01N23/20
摘要： A method for X-ray analysis of a sample includes directing a beam of X-rays to impinge on an area of a periodic feature on a surface of the sample and receiving the X-rays scattered from the surface in a reflection mode so as to detect a spectrum of diffraction in the scattered X-rays as a function of azimuth. The spectrum of diffraction is analyzed in order to determine a dimension of the feature.

48. 发明授权

US06947520B2 Beam centering and angle calibration for X-ray reflectometry 有权
标题翻译：用于X射线反射测量的光束对中和角度校准
公开(公告)号：US06947520B2
公开(公告)日：2005-09-20
申请号：US10313280
申请日：2002-12-06
申请人： Boris Yokhin , Isaac Mazor , David Berman
发明人： Boris Yokhin , Isaac Mazor , David Berman
IPC分类号： G01B15/00 , G01B15/08 , G01N23/20 , G01N23/201
CPC分类号： G01B15/00 , G01N23/20
摘要： A method for testing a surface of a sample includes irradiating the surface at a grazing incidence with a beam of radiation having a focal region, whereby the radiation is reflected from the surface. At least one of the focal region and the sample is adjusted through a plurality of adjustment stages within an adjustment range so as to vary a location of the focal region relative to the surface. Respective angular profiles of the radiation reflected from the surface are measured at the plurality of adjustment stages, and the angular profiles are compared in order to select an adjustment within the range at which the surface is in a desired alignment with the beam.
摘要翻译：用于测试样品表面的方法包括用具有聚焦区域的辐射束以掠入射照射表面，由此辐射从表面反射。焦点区域和样本中的至少一个通过调整范围内的多个调节台进行调节，以便改变聚焦区域相对于表面的位置。在多个调整阶段测量从表面反射的辐射的各个角度分布，并且比较角剖面，以便在表面与光束所期望的对准的范围内选择调节。

49. 发明申请

US20050094766A1 X-ray scattering with a polychromatic source 有权
标题翻译：具有多色源的X射线散射
公开(公告)号：US20050094766A1
公开(公告)日：2005-05-05
申请号：US10702413
申请日：2003-11-05
申请人： Boris Yokhin
发明人： Boris Yokhin
IPC分类号： G01N23/20 , G01N23/201 , H01L21/66
CPC分类号： G01N23/201
摘要： A method for inspection of a sample includes irradiating the sample with a polychromatic beam of X-rays, comprising X-ray photons having a range of respective photon energies. The X-rays scattered from the sample are received at a plurality of scattering angles using one or more sensors, which generate output signals indicative of the respective photon energies of the X-rays photons that are incident thereon. The output signals are analyzed based on the photon energies so as to determine a scattering profile of the sample at a selected photon energy within the range.
摘要翻译：用于检查样品的方法包括用包含具有各自光子能量范围的X射线光子的X射线的多色光束照射样品。使用一个或多个传感器以多个散射角接收从样品散射的X射线，其产生指示入射在其上的X射线光子的相应光子能量的输出信号。基于光子能量分析输出信号，以便在该范围内的所选光子能量下确定样品的散射分布。

50. 发明授权

US07653174B2 Inspection of small features using X-ray fluorescence 有权
标题翻译：使用X射线荧光检查小特征
公开(公告)号：US07653174B2
公开(公告)日：2010-01-26
申请号：US12003215
申请日：2007-12-20
申请人： Isaac Mazor , David Berman , Boris Yokhin , Alexander Tokar
发明人： Isaac Mazor , David Berman , Boris Yokhin , Alexander Tokar
IPC分类号： G01N23/223
CPC分类号： G01N23/223 , G01N2223/076
摘要： A method for inspection includes irradiating a sample using an X-ray beam, which is focused so as to define a spot on a surface of the sample. At least one of the sample and the X-ray beam is shifted so as to scan the spot along a scan path that crosses a feature on the surface. Respective intensities of X-ray fluorescence emitted from the sample responsively to the X-ray beam are measured at a plurality of locations along the scan path, at which the spot has different, respective degrees of overlap with the feature. The intensities measured at the plurality of the locations are processed in order to compute an adjusted value of the emitted X-ray fluorescence over the scan path. A thickness of the feature is estimated based on the adjusted value.
摘要翻译：一种检查方法包括：使用聚焦的X射线束照射样品，以便在样品的表面上限定斑点。样本和X射线束中的至少一个被移动，以沿着与表面上的特征交叉的扫描路径扫描斑点。在沿着扫描路径的多个位置处测量从样品响应于X射线束发射的X射线荧光的相应强度，其中斑点与特征具有不同的重叠程度。处理在多个位置处测量的强度，以便计算扫描路径上发射的X射线荧光的调整值。基于调整值估计特征的厚度。

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