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42. 发明授权

US06801277B2 Multi-directional diffusion-symmetric slant reflector 有权
标题翻译：多向扩散对称倾斜反射器
公开(公告)号：US06801277B2
公开(公告)日：2004-10-05
申请号：US09849132
申请日：2001-05-04
申请人： Dai-Liang Ting , Wei-Chih Chang
发明人： Dai-Liang Ting , Wei-Chih Chang
IPC分类号： G02F11335
CPC分类号： G02F1/133553
摘要： A multi-directional diffusion-symmetric slant reflector. A substrate having a plurality of domains thereon is provided. A plurality of diffusion-symmetric slant reflectors are formed on the substrate. The diffusion-symmetric slant reflectors has a variety of shapes, including conical, elliptical cone longitudinal prismatic or other polyhedron shapes. A plurality of bumps, such as cone, elliptical cone or longitudinal prism structures, are formed on the slant surface of the diffusion-symmetric slant reflectors. The longitudinal prismatic and elliptical cone diffusion-symmetric slant reflectors within a domain are aligned to a direction. An reflection layer such as an aluminum layer, a silver layer or a layer made of materials with a characteristic of reflection, is formed over the surface of the diffusion-symmetric slant reflector. A method of forming a diffusion-symmetric slant reflector is also provided. A substrate is provided and then a photoresist layer is formed over the substrate. After the substrate and the photoresist layer assembly are baked, a photolithographic process is conducted using a gray-level mask, a multi-step exposure process or a half-tone mask. The exposed photoresist layer is developed, followed by an intermediate baking and a hard baking. In the final step, aluminum is deposited over the photoresist layer.
摘要翻译：多方向扩散对称倾斜反射器。提供了具有多个畴的衬底。在基板上形成多个扩散对称倾斜反射器。扩散对称倾斜反射器具有各种形状，包括圆锥形，椭圆锥形棱柱形或其他多面体形状。在扩散对称倾斜反射体的倾斜表面上形成多个凸起，例如锥形，椭圆锥形或纵向棱镜结构。域内的纵向棱柱和椭圆锥形扩散对称倾斜反射器与方向对齐。在扩散对称倾斜反射体的表面上形成反射层，例如铝层，银层或由具有反射特性的材料制成的层。还提供了形成扩散对称倾斜反射器的方法。提供衬底，然后在衬底上形成光致抗蚀剂层。在基板和光致抗蚀剂层组件被烘烤之后，使用灰度掩模，多步曝光处理或半色调掩模进行光刻处理。曝光的光致抗蚀剂层被显影，随后进行中间烘烤和硬烘烤。在最后一步中，铝沉积在光致抗蚀剂层上。

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