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    • 43. 发明申请
    • Method for the production of semi-conductor chips
    • 生产半导体芯片的方法
    • US20060211159A1
    • 2006-09-21
    • US10561255
    • 2005-06-24
    • Georg BruederlBerthold HahnVolker Haerle
    • Georg BruederlBerthold HahnVolker Haerle
    • H01L21/00
    • H01L33/0095B23K26/40B23K26/53B23K26/57B23K2103/172H01L21/76254H01L21/78H01L33/0079
    • A method for producing a plurality of semiconductor chips, particularly radiation-emitting semiconductor chips, each having at least one epitaxially produced functional semiconductor layer stack, comprising the following method steps: preparing a growth substrate wafer (1) substantially comprised of semiconductor material from a semiconductor material system that is with respect to lattice parameters the same as or similar to that on which a semiconductor layer sequence for the functional semiconductor layer stack is based, forming in the growth substrate wafer (1) a separation zone (4) disposed parallel to a main face (100) of the growth substrate wafer (1), joining the growth substrate wafer (1) to an auxiliary carrier wafer (2), detaching along the separation zone (4) a portion (11) of the growth substrate wafer (1) that faces away from the auxiliary carrier wafer (2) as viewed from the separation zone (4), forming on the portion (12) of the growth substrate wafer remaining on the auxiliary carrier wafer (2) a growth surface for subsequent epitaxial growth of a semiconductor layer sequence, epitaxially growing the semiconductor layer sequence (5) on the growth surface, applying a chip substrate wafer to the semiconductor layer sequence, detaching the auxiliary carrier wafer (2), and singulating the composite composed of the semiconductor layer sequence and the chip substrate wafer (7) into mutually separate semiconductor chips.
    • 一种制造多个半导体芯片,特别是辐射发射半导体芯片的方法,每个半导体芯片具有至少一个外延生产的功能半导体层堆叠,包括以下方法步骤:制备基本上由半导体材料组成的生长衬底晶片(1) 半导体材料系统,其相对于与功能半导体层堆叠的半导体层序列相同或类似的晶格参数,在生长衬底晶片(1)中形成平行于功能半导体层堆叠的分离区(4) 生长衬底晶片(1)的主面(100),将生长衬底晶片(1)接合到辅助载体晶片(2),沿着分离区(4)分离生长衬底晶片的部分(11) (1),其从所述分离区(4)观察时远离所述辅助载体晶片(2),在所述生长衬垫的所述部分(12)上形成 e晶片保留在辅助载体晶片(2)上,用于随后外延生长半导体层序列,在生长表面上外延生长半导体层序列(5),将芯片衬底晶片应用于半导体层序列,分离 辅助载体晶片(2),将由半导体层序列和芯片基板晶片(7)组成的复合体分离成相互分开的半导体芯片。