会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 40. 发明授权
    • Charged particle apparatus having a canted column
    • 具有倾斜柱的带电粒子装置
    • US5734164A
    • 1998-03-31
    • US757727
    • 1996-11-26
    • Colin A. Sanford
    • Colin A. Sanford
    • H01J37/20H01J37/15H01J37/16H01J37/28
    • H01J37/28H01J2237/20
    • A charged particle beam apparatus has a carrier for supporting a sample. A tilt mechanism is provided for tilting the wafer carrier through a range of attitudes including an attitude wherein a normal to the carrier defines a predetermined first angle on one side of vertical. A charged particle beam column irradiates a sample on the carrier with a beam of charged particles. The column is canted at a second angle on the opposite side of vertical from the stage normal such that the angle of beam incidence on the sample relative to the stage normal is equal to the sum of the first and second angles. The carrier may be tilted an attitude at the other end of the range of attitudes which is such that the carrier normal is parallel to the column axis and the beam is thus normal to the sample. The first and second angles in limit preferably equal thirty degrees, and the maximum angle of beam incidence on the sample thus equals sixty degrees.
    • 带电粒子束装置具有用于支撑样品的载体。 提供倾斜机构,用于通过包括姿态的一系列姿态来倾斜晶片载体,其中载体的法线在垂直方向的一侧限定预定的第一角度。 带电粒子束柱用带有粒子的束照射载体上的样品。 该列在垂直于载物台法线的相对侧上以第二角度倾斜,使得样品相对于载物台法线的入射角度等于第一和第二角度之和。 载体可以在姿态范围的另一端倾斜,使得载体法线平行于列轴线,并且束因此垂直于样品。 极限的第一和第二角度最好等于三十度,并且样品上的光束入射的最大角度等于六十度。