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31. 发明申请

US20130075836A1 Vented MEMS Apparatus And Method Of Manufacture 有权
标题翻译：通风MEMS器件及其制造方法
公开(公告)号：US20130075836A1
公开(公告)日：2013-03-28
申请号：US13623598
申请日：2012-09-20
申请人： KNOWLES ELECTRONICS, LLC
发明人： Sung Bok Lee
IPC分类号： H01L29/84
CPC分类号： B81B7/0029 , B81B2201/0257 , B81B2203/0127 , H01L2224/48091 , H01L2924/15151 , H04R19/005 , H04R19/04 , H04R2201/003 , H01L2924/00014
摘要： A micro-electromechanical system (MEMS) device includes a housing and a base. The base includes a port opening extending therethrough and the port opening communicates with the external environment. The MEMS die is disposed on the base and over the opening. The MEMS die includes a diaphragm and a back plate and the MEMS die, the base, and the housing form a back volume. At least one vent extends through the MEMS die and not through the diaphragm. The at least one vent communicates with the back volume and the port opening and is configured to allow venting between the back volume and the external environment.
摘要翻译：微机电系统（MEMS）装置包括壳体和基座。基座包括延伸穿过其中的端口开口，并且端口开口与外部环境连通。 MEMS管芯设置在基座上并在开口上方。 MEMS管芯包括隔膜和背板，并且MEMS管芯，基座和壳体形成后部体积。至少一个通气孔延伸穿过MEMS管芯而不通过隔膜。所述至少一个通风口与所述后部体积和所述端口开口相通并且被构造成允许所述后部体积与所述外部环境之间的排气。

32. 发明授权

US08351635B2 Silicon-based microphone structure with electromagnetic interference shielding means 有权
标题翻译：具有电磁干扰屏蔽手段的硅基麦克风结构
公开(公告)号：US08351635B2
公开(公告)日：2013-01-08
申请号：US12264967
申请日：2008-11-05
申请人： Chih Sun , Shih-Chin Gong
发明人： Chih Sun , Shih-Chin Gong
IPC分类号： H04R11/04
CPC分类号： H04R19/005 , B81B7/0029 , B81B2201/0257 , H04R2201/003
摘要： A silicon-based microphone structure, flip-chip mounted a substrate, has a backside and a via hole formed on the backside. A conductive layer covers the backside and the inner walls of the via hole. A solder ring is attached to the silicon-based microphone structure and electrically connected to the conductive layer.
摘要翻译：基于硅的麦克风结构，安装有底片的倒装芯片具有形成在背面的背面和通孔。导电层覆盖通孔的背面和内壁。焊锡环连接到硅基麦克风结构并电连接到导电层。

33. 发明授权

US07973373B2 Microminiature moving device 有权
标题翻译：微型移动装置
公开(公告)号：US07973373B2
公开(公告)日：2011-07-05
申请号：US12315363
申请日：2008-12-01
申请人： Keiichi Mori , Yoshichika Kato , Satoshi Yoshida , Kenji Kondou , Yoshihiko Hamada , Osamu Imaki
发明人： Keiichi Mori , Yoshichika Kato , Satoshi Yoshida , Kenji Kondou , Yoshihiko Hamada , Osamu Imaki
IPC分类号： H01L27/14
CPC分类号： B81C1/00825 , B81B7/0029 , B81B2201/045 , B81B2203/033 , G02B26/0841 , Y10T29/49 , Y10T29/49002 , Y10T307/865
摘要： A microminiature moving device has disposed on a single-crystal silicon substrate movable elements such as a movable rod and a movable comb electrode that are displaceable in parallel to the substrate surface and stationary parts that are fixedly secured to the single -crystal silicon substrate with an insulating layer sandwiched between. Depressions are formed in the surface regions of the single-crystal silicon substrate where no stationary parts are present and the movable parts are positioned above the depressions. The depressions form gaps large enough to prevent foreign bodies from causing shorts and malfunctioning of the movable parts.
摘要翻译：微型移动装置设置在单晶硅衬底上，可移动元件如可移动杆和可移动梳状电极可平行移动到衬底表面，固定部分固定固定在单晶硅衬底上绝缘层夹在中间。在单晶硅衬底的不存在固定部分并且可移动部件位于凹部上方的表面区域中形成凹陷。凹陷形成足够大的间隙，以防止异物引起可动部件的短路和故障。

34. 发明授权

US07549342B2 Capacitative pressure sensor for oxidative environments 失效
标题翻译：用于氧化环境的电容式压力传感器
公开(公告)号：US07549342B2
公开(公告)日：2009-06-23
申请号：US11543047
申请日：2006-10-05
申请人： Kia Silverbrook , Samuel George Mallinson
发明人： Kia Silverbrook , Samuel George Mallinson
IPC分类号： G01L9/12
CPC分类号： B81B7/0029 , B60C23/0408 , B81B2201/0264 , G01L9/0047 , G01L9/0073 , G01L9/125 , G01L15/00 , G01L19/0636
摘要： A capacitative pressure sensor (30) for harsh environments such as vehicle tires. The sensor has two opposing electrodes (36 and 50). One electrode is a membrane (50) that extends between fluid at a reference pressure and fluid at the pressure to be sensed. In use, the flexible membrane (50) deflects due to pressure differentials between the reference pressure and the fluid pressure. Associated circuitry converts the deflection into a signal indicative of the pressure to be sensed. The membrane is a laminate at least partially formed from a transition metal nitride because transition metal nitrides are a metal ceramics with high yield strength and metallic bonding that makes it suitable for use in extreme environments. They can also readily include an oxidizing component such as aluminium so that the membrane form a passivating surface oxide layer to protect it from oxidative failure.
摘要翻译：用于诸如车辆轮胎的恶劣环境的电容式压力传感器（30）。传感器具有两个相对的电极（36和50）。一个电极是在参考压力的流体和在要感测的压力下的流体之间延伸的膜（50）。在使用中，柔性膜（50）由于参考压力和流体压力之间的压力差而偏转。相关电路将偏转转换成指示要感测的压力的信号。膜是由过渡金属氮化物至少部分形成的层压体，因为过渡金属氮化物是具有高屈服强度的金属陶瓷，并且金属粘合使其适用于极端环境。它们还可以容易地包括氧化组分如铝，使得膜形成钝化表面氧化物层以保护其免于氧化失效。

35. 发明授权

US07476948B2 Microminiature moving device and method of making the same 失效
标题翻译：微型移动装置及其制作方法
公开(公告)号：US07476948B2
公开(公告)日：2009-01-13
申请号：US11069184
申请日：2005-02-28
申请人： Keiichi Mori , Yoshichika Kato , Satoshi Yoshida , Kenji Kondou , Yoshihiko Hamada , Osamu Imaki
发明人： Keiichi Mori , Yoshichika Kato , Satoshi Yoshida , Kenji Kondou , Yoshihiko Hamada , Osamu Imaki
IPC分类号： H01L29/82
CPC分类号： B81C1/00825 , B81B7/0029 , B81B2201/045 , B81B2203/033 , G02B26/0841 , Y10T29/49 , Y10T29/49002 , Y10T307/865
摘要： In a microminiature moving device that has disposed, on a single-crystal silicon substrate, movable elements (a movable rod 46, a movable comb electrode 49, etc.) displaceable in parallel to the substrate surface and stationary parts (a stationary part 40a, etc.), the stationary parts are fixedly secured to the single-crystal silicon substrate 61 with an insulating layer 62 sandwiched therebetween, and depressions 64 are formed in those surface regions of the single-crystal silicon substrate 61 where no stationary parts are present, and the movable parts are positioned above the depressions 64. The depressions 64 form gaps 50 large enough to prevent foreign bodies from causing troubles such as malfunction of the movable parts and shoring.
摘要翻译：在微单元移动装置中，在单晶硅基板上设置可移动的元件（可动杆46，活动梳状电极49等），其可平行于基板表面和静止部分（静止部分40a，等等）时，固定部分被固定地固定在单晶硅衬底61上，绝缘层62夹在它们之间，在单晶硅衬底61的不存在静止部分的那些表面区域形成凹陷64，并且可动部件位于凹部64的上方。凹部64形成足够大的间隙50，以防止异物引起诸如可移动部件和支撑件的故障的麻烦。

36. 发明授权

US07476561B2 Method of making microminiature moving device 失效
标题翻译：制作微型移动装置的方法
公开(公告)号：US07476561B2
公开(公告)日：2009-01-13
申请号：US11407468
申请日：2006-04-19
申请人： Keiichi Mori , Yoshichika Kato , Satoshi Yoshida , Kenji Kondou , Yoshihiko Hamada , Osamu Imaki
发明人： Keiichi Mori , Yoshichika Kato , Satoshi Yoshida , Kenji Kondou , Yoshihiko Hamada , Osamu Imaki
IPC分类号： H01L21/00
CPC分类号： B81C1/00825 , B81B7/0029 , B81B2201/045 , B81B2203/033 , G02B26/0841 , Y10T29/49 , Y10T29/49002 , Y10T307/865
摘要： In a microminiature moving device that has disposed, on a single-crystal silicon substrate, movable elements (a movable rod 46, a movable comb electrode 49, etc.) displaceable in parallel to the substrate surface and stationary parts (a stationary part 40a, etc.), the stationary parts are fixedly secured to the single-crystal silicon substrate 61 with an insulating layer 62 sandwiched therebetween, and depressions 64 are formed in those surface regions of the single-crystal silicon substrate 61 where no stationary parts are present, and the movable parts are positioned above the depressions 64. The depressions 64 form gaps 50 large enough to prevent foreign bodies from causing troubles such as malfunction of the movable parts and shoring.
摘要翻译：在微单元移动装置中，在单晶硅基板上设置可移动的元件（可动杆46，活动梳状电极49等），其可平行于基板表面和静止部分（静止部分40a，等等）时，固定部分被固定地固定在单晶硅衬底61上，绝缘层62夹在它们之间，在单晶硅衬底61的不存在静止部分的那些表面区域形成凹陷64，并且可动部件位于凹部64的上方。凹部64形成足够大的间隙50，以防止异物引起诸如可移动部件和支撑件的故障的麻烦。

37. 发明申请

US20070039392A1 Capacitative pressure sensor for oxidative environments 失效
标题翻译：用于氧化环境的电容式压力传感器
公开(公告)号：US20070039392A1
公开(公告)日：2007-02-22
申请号：US11543047
申请日：2006-10-05
申请人： Kia Silverbrook , Samuel Mallinson
发明人： Kia Silverbrook , Samuel Mallinson
IPC分类号： G01L9/12
CPC分类号： B81B7/0029 , B60C23/0408 , B81B2201/0264 , G01L9/0047 , G01L9/0073 , G01L9/125 , G01L15/00 , G01L19/0636
摘要： A capacitative pressure sensor (30) for harsh environments such as vehicle tires. The sensor has two opposing electrodes (36 and 50). One electrode is a membrane (50) that extends between fluid at a reference pressure and fluid at the pressure to be sensed. In use, the flexible membrane (50) deflects due to pressure differentials between the reference pressure and the fluid pressure. Associated circuitry converts the deflection into a signal indicative of the pressure to be sensed. The membrane is a laminate at least partially formed from a transition metal nitride because transition metal nitrides are a metal ceramics with high yield strength and metallic bonding that makes it suitable for use in extreme environments. They can also readily include an oxidizing component such as aluminium so that the membrane form a passivating surface oxide layer to protect it from oxidative failure.
摘要翻译：用于诸如车辆轮胎的恶劣环境的电容式压力传感器（30）。传感器具有两个相对的电极（36和50）。一个电极是在参考压力的流体和在要感测的压力下的流体之间延伸的膜（50）。在使用中，柔性膜（50）由于参考压力和流体压力之间的压力差而偏转。相关电路将偏转转换成指示要感测的压力的信号。膜是由过渡金属氮化物至少部分形成的层压体，因为过渡金属氮化物是具有高屈服强度的金属陶瓷，并且金属粘合使其适用于极端环境。它们还可以容易地包括氧化组分如铝，使得膜形成钝化表面氧化物层以保护其免于氧化失效。

38. 发明申请

US20060186498A1 Microminiature moving device and method of making the same 失效
标题翻译：微型移动装置及其制作方法
公开(公告)号：US20060186498A1
公开(公告)日：2006-08-24
申请号：US11407468
申请日：2006-04-19
申请人： Keiichi Mori , Yoshichika Kato , Satoshi Yoshida , Kenji Kondou , Yoshihiko Hamada , Osamu Imaki
发明人： Keiichi Mori , Yoshichika Kato , Satoshi Yoshida , Kenji Kondou , Yoshihiko Hamada , Osamu Imaki
IPC分类号： H01L21/00 , H01L27/14
CPC分类号： B81C1/00825 , B81B7/0029 , B81B2201/045 , B81B2203/033 , G02B26/0841 , Y10T29/49 , Y10T29/49002 , Y10T307/865
摘要： In a microminiature moving device that has disposed, on a single-crystal silicon substrate, movable elements (a movable rod 46, a movable comb electrode 49, etc.) displaceable in parallel to the substrate surface and stationary parts (a stationary part 40a, etc.), the stationary parts are fixedly secured to the single-crystal silicon substrate 61 with an insulating layer 62 sandwiched therebetween, and depressions 64 are formed in those surface regions of the single-crystal silicon substrate 61 where no stationary parts are present, and the movable parts are positioned above the depressions 64. The depressions 64 form gaps 50 large enough to prevent foreign bodies from causing troubles such as malfunction of the movable parts and shoring.
摘要翻译：在微单元移动装置中，在单晶硅基板上设置可移动的元件（可移动的杆46，可移动梳状电极49等），其可平行于基底表面和静止部分（静止部分40a 等），固定部分被固定地固定在单晶硅衬底61上，绝缘层62夹在它们之间，在单晶硅衬底61的不存在固定部分的那些表面区域形成凹陷64 并且可动部件位于凹部64的上方。凹陷64形成足够大的间隙50，以防止异物引起诸如可移动部件和支撑件的故障的麻烦。

39. 发明申请

US20050164016A1 Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates 失效
标题翻译：硅衬底上的金属涂层，以及在硅衬底上形成金属涂层的方法
公开(公告)号：US20050164016A1
公开(公告)日：2005-07-28
申请号：US10918287
申请日：2004-08-13
申请人： Daniel Branagan , Timothy Hyde , James Fincke
发明人： Daniel Branagan , Timothy Hyde , James Fincke
IPC分类号： B32B15/04 , B81C1/00 , C23C14/16 , C23C14/58
CPC分类号： C23C14/16 , B81B7/0029 , B81C1/00674 , C22C33/00 , C22C33/003 , C22C45/02 , C23C14/5806 , Y10T428/24917 , Y10T428/263 , Y10T428/31
摘要： The invention includes methods of forming a metallic coating on a substrate which contains silicon. A metallic glass layer is formed over a silicon surface of the substrate. The invention includes methods of protecting a silicon substrate. The substrate is provided within a deposition chamber along with a deposition target. Material from the deposition target is deposited over at least a portion of the silicon substrate to form a protective layer or structure which contains metallic glass. The metallic glass comprises iron and one or more of B, Si, P and C. The invention includes structures which have a substrate containing silicon and a metallic layer over the substrate. The metallic layer contains less than or equal to about 2 weight % carbon and has a hardness of at least 9.2 GPa. The metallic layer can have an amorphous microstructure or can be devitrified to have a nanocrystalline microstructure.
摘要翻译：本发明包括在含有硅的衬底上形成金属涂层的方法。在衬底的硅表面上形成金属玻璃层。本发明包括保护硅衬底的方法。衬底与沉积靶一起设置在沉积室内。来自沉积靶的材料沉积在硅衬底的至少一部分上以形成包含金属玻璃的保护层或结构。金属玻璃包括铁和B，Si，P和C中的一种或多种。本发明包括在衬底上具有含硅和金属层的衬底的结构。金属层含有小于或等于约2重量％的碳，并且具有至少9.2GPa的硬度。金属层可以具有无定形微观结构，或者可以失透以具有纳米晶体微观结构。

40. 发明申请

US20040188784A1 Semiconductor sensor with pressure difference adjusting means 失效
标题翻译：具有压差调节装置的半导体传感器
公开(公告)号：US20040188784A1
公开(公告)日：2004-09-30
申请号：US10809343
申请日：2004-03-26
申请人： DENSO CORPORATION
发明人： Kazuaki Hamamoto
IPC分类号： H01L029/82
CPC分类号： B81B7/0029 , B81B2201/0292 , B81B2203/0127
摘要： In a semiconductor sensor having a membrane structure, the destruction of the membrane caused by the expansion or contraction of a fluid within a hollow part formed under the membrane while the sensor is in use is prevented. A semiconductor sensor 10 comprising a substrate 30 and a membrane 20 formed on the top surface thereof, in which the bottom of the substrate 30 and a mounting surface 50 on which the sensor 10 is mounted are bonded, has pressure difference adjusting means 22a to 22c for eliminating the difference in pressure of a fluid between an inside and an outside of a hollow part 34 while the sensor is in use.
摘要翻译：在具有膜结构的半导体传感器中，防止了在传感器使用时在膜下方形成的中空部内的流体的膨胀或收缩引起的膜的破坏。半导体传感器10包括基板30和形成在其顶表面上的膜20，其中基板30的底部和安装有传感器10的安装表面50接合，具有压差调整装置22a至22c 用于消除传感器在使用中的中空部分34的内部和外部之间的流体的压力差。

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