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31. 发明申请

US20180202882A1 PRESSURE SENSOR 审中-公开
公开(公告)号：US20180202882A1
公开(公告)日：2018-07-19
申请号：US15921504
申请日：2018-03-14
申请人： InvenSense, Inc.
发明人： Johannes Schumm , Andreas Reinhard , Thomas Kraehenbuehl , Stefan Thiele , Rene Hummel , Chung-Hsien Lin , Wang Shen Su , Tsung Lin Tang , Chia Min Lin
IPC分类号： G01L9/00 , H01L29/84 , B81C1/00
CPC分类号： G01L9/0042 , B81B3/0089 , B81B2201/0264 , B81B2203/0315 , B81C1/00285 , G01L9/0045 , G01L9/0073 , H01L29/84
摘要： A sensor includes a deformable membrane that deflects in response to a stimuli. The sensor further includes a capacitive element coupled to the deformable membrane. The capacitive element is disposed within an enclosed cavity of the sensor. The capacitive element changes capacitance in response to the deformable membrane deflecting. The capacitive element comprises a getter material for collecting gas molecules within the enclosed cavity.

32. 发明授权

US09867979B2 Three-dimensional multi-electrode array 有权
公开(公告)号：US09867979B2
公开(公告)日：2018-01-16
申请号：US15207199
申请日：2016-07-11
申请人： ZYVEX LABS, LLC
发明人： Rahul Saini , John Neal Randall
IPC分类号： A61N1/05 , A61B5/04 , B81B3/00 , A61B5/00 , A61B5/0492 , A61B5/0496
CPC分类号： A61N1/0543 , A61B5/04001 , A61B5/0492 , A61B5/0496 , A61B5/6846 , A61B2562/0209 , A61B2562/046 , A61B2562/125 , A61B2562/166 , A61N1/05 , B81B3/0089 , B81B2203/04 , Y10T29/49117
摘要： A multi-electrode array with individually isolated electrodes each configurable for a target-containing carrier and a method for fabricating the array are disclosed. In an exemplary embodiment, the array includes a substrate; and a plurality of electrodes disposed on the substrate. Each electrode of the plurality of electrodes has a conductive tip-end and an insulated remainder. A first electrode of the plurality of electrodes has a first configuration selected to bring a conductive tip end of the first electrode in proximity to a first target structure, and a second electrode of the plurality of electrodes has a second configuration selected to bring a conductive tip end of the second electrode in proximity to a second target structure. The first configuration and the second configuration are different. A first contact of the plurality of contacts may be electrically coupled to the first electrode through the substrate.

33. 发明申请

US20160376143A1 MEMS DEVICE WITH ELECTRODES PERMEABLE TO OUTGASSING SPECIES 有权
标题翻译：带有电极的MEMS器件可以通过出口物种进行
公开(公告)号：US20160376143A1
公开(公告)日：2016-12-29
申请号：US14935296
申请日：2015-11-06
申请人： InvenSense, Inc.
发明人： Jongwoo SHIN , Houri JOHARI-GALLE , Martin LIM , Joseph SEEGER
IPC分类号： B81B3/00 , B81C1/00
CPC分类号： B81B3/0089 , B81B7/0038 , B81B7/02 , B81B2201/0235 , B81B2201/0242 , B81B2203/0315 , B81B2203/04 , B81B2207/07 , B81C1/00206 , B81C2201/016 , B81C2203/035
摘要： A MEMS device and method for providing a MEMS device are disclosed. In a first aspect, the MEMS device comprises a first substrate and a second substrate coupled to the first substrate forming a sealed enclosure. A moveable structure is located within the sealed enclosure. An outgassing layer is formed on the first or second substrates and within the sealed enclosure. A first conductive layer is disposed between the moveable structure and the outgassing layer, wherein the first conductive layer allows outgassing species to pass therethrough.
摘要翻译：公开了一种用于提供MEMS器件的MEMS器件和方法。在第一方面，MEMS装置包括第一基板和耦合到第一基板的第二基板，形成密封外壳。可移动的结构位于密封的外壳内。在第一或第二基板上和密封的外壳内形成除气层。第一导电层设置在可移动结构和除气层之间，其中第一导电层允许除气物质通过其中。

34. 发明申请

US20160317802A1 THREE-DIMENSIONAL MULTI-ELECTRODE ARRAY 有权
标题翻译：三维多电极阵列
公开(公告)号：US20160317802A1
公开(公告)日：2016-11-03
申请号：US15207199
申请日：2016-07-11
申请人： ZYVEX LABS, LLC
发明人： RAHUL SAINI , JOHN NEAL RANDALL
IPC分类号： A61N1/05 , A61B5/00 , B81B3/00 , A61B5/04
CPC分类号： A61N1/0543 , A61B5/04001 , A61B5/0492 , A61B5/0496 , A61B5/6846 , A61B2562/0209 , A61B2562/046 , A61B2562/125 , A61B2562/166 , A61N1/05 , B81B3/0089 , B81B2203/04 , Y10T29/49117
摘要： A multi-electrode array with individually isolated electrodes each configurable for a target-containing carrier and a method for fabricating the array are disclosed. In an exemplary embodiment, the array includes a substrate; and a plurality of electrodes disposed on the substrate. Each electrode of the plurality of electrodes has a conductive tip-end and an insulated remainder. A first electrode of the plurality of electrodes has a first configuration selected to bring a conductive tip end of the first electrode in proximity to a first target structure, and a second electrode of the plurality of electrodes has a second configuration selected to bring a conductive tip end of the second electrode in proximity to a second target structure. The first configuration and the second configuration are different. A first contact of the plurality of contacts may be electrically coupled to the first electrode through the substrate.
摘要翻译：公开了具有各自独立电极的多电极阵列，每个独立的电极可配置用于含靶载体和制造该阵列的方法。在示例性实施例中，阵列包括衬底; 以及设置在基板上的多个电极。多个电极的每个电极具有导电尖端和绝缘的剩余部分。多个电极的第一电极具有被选择为使第一电极的导电尖端靠近第一目标结构的第一配置，并且多个电极中的第二电极具有选择为使导电尖端靠近第二目标结构的第二电极的端部。第一配置和第二配置是不同的。多个触点的第一触点可以通过衬底电耦合到第一电极。

35. 发明申请

US20160290883A1 Pressure Sensor 有权
标题翻译：压力传感器
公开(公告)号：US20160290883A1
公开(公告)日：2016-10-06
申请号：US15085592
申请日：2016-03-30
申请人： Johannes Schumm , Andreas Reinhard , Thomas Kraehenbuehl , Stefan Thiele , Rene Hummel , Chung-Hsien Lin , Wang Shen Su , Tsung Lin Tang , Chia Min Lin
发明人： Johannes Schumm , Andreas Reinhard , Thomas Kraehenbuehl , Stefan Thiele , Rene Hummel , Chung-Hsien Lin , Wang Shen Su , Tsung Lin Tang , Chia Min Lin
IPC分类号： G01L9/00 , H01L29/84
CPC分类号： G01L9/0042 , B81B3/0089 , B81B2201/0264 , B81B2203/0315 , B81C1/00285 , G01L9/0045 , G01L9/0073 , H01L29/84
摘要： A pressure sensor comprises a deformable membrane deflecting in response to pressure applied, a first stationary electrode, and a second electrode coupled to the deformable membrane, for determining a change in a capacitance between the first and the second electrode in response to the pressure applied. At least one of the first and the second electrode comprises a getter material for collecting gas molecules.
摘要翻译：压力传感器包括响应于施加的压力而偏转的可变形膜，第一固定电极和耦合到可变形膜的第二电极，用于响应于施加的压力来确定第一和第二电极之间的电容变化。第一和第二电极中的至少一个包括用于收集气体分子的吸气剂材料。

36. 发明申请

US20100285972A1 Nanofiber surfaces for use in enhanced surface area applications 审中-公开
标题翻译：用于增强表面积应用的纳米纤维表面
公开(公告)号：US20100285972A1
公开(公告)日：2010-11-11
申请号：US11975104
申请日：2007-10-17
申请人： Roberto Dubrow , Robert Hugh Daniels , J. Wallace Parce , Matthew Murphy , Jim Hamilton , Erik Scher , Dave Stumbo , Chunming Niu , Linda T. Romano , Jay Goldman , Vijendra Sahi , Jeffery A. Whiteford
发明人： Roberto Dubrow , Robert Hugh Daniels , J. Wallace Parce , Matthew Murphy , Jim Hamilton , Erik Scher , Dave Stumbo , Chunming Niu , Linda T. Romano , Jay Goldman , Vijendra Sahi , Jeffery A. Whiteford
IPC分类号： C40B40/00 , C40B30/00
CPC分类号： C12N15/87 , B01J20/28007 , B01J20/3242 , B01J2220/54 , B81B3/0089 , B82Y5/00 , B82Y30/00 , H01J49/0418
摘要： This invention provides novel nanofiber enhanced surface area substrates and structures comprising such substrates, as well as methods and uses for such substrates.
摘要翻译：本发明提供了新颖的纳米纤维增强表面积基底和包括这种基底的结构，以及这种基底的方法和用途。

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