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31. 发明授权

US07029371B1 Jig for guiding a grinder 失效
标题翻译：引导磨床的夹具
公开(公告)号：US07029371B1
公开(公告)日：2006-04-18
申请号：US11156299
申请日：2005-06-17
申请人： Derek A. Bird
发明人： Derek A. Bird
IPC分类号： B24B49/00 , B24B51/00
CPC分类号： B24B19/14 , B24B41/04
摘要： A jig is structured to guide a grinder along the inner surface of the base or cover of a combustion turbine. The jig includes a base having a bottom surface with a plurality of rollers arranged in substantially the same radius as the portion of the casing being repaired. Side rollers locate the base horizontally during movement. A top platform may restrain the base vertically by supporting a pivot block that bears against the rotor of the turbine. The grinder may be moved vertically or horizontally with respect to the base upon which it is secured.
摘要翻译：夹具被构造成沿着燃烧轮机的底座或盖的内表面引导研磨机。夹具包括具有底表面的底座，该底面具有多个辊，其布置成与被修复的壳体的部分基本相同的半径。侧辊在移动期间水平定位底座。顶部平台可以通过支撑靠在涡轮机的转子上的枢轴块来垂直地限制基座。研磨机可以相对于其固定在其上的基座垂直或水平移动。

32. 发明授权

US06935922B2 Methods and systems for generating a two-dimensional map of a characteristic at relative or absolute locations of measurement spots on a specimen during polishing 有权
标题翻译：用于在抛光期间在样品上的测量点的相对或绝对位置产生特征的二维图的方法和系统
公开(公告)号：US06935922B2
公开(公告)日：2005-08-30
申请号：US10358106
申请日：2003-02-04
申请人： Kurt Lehman , Charles Chen , Ronald L. Allen , Robert Shinagawa , Anantha Sethuraman , Christopher F. Bevis , Thanassis Trikas , Haiguang Chen , Ching Ling Meng
发明人： Kurt Lehman , Charles Chen , Ronald L. Allen , Robert Shinagawa , Anantha Sethuraman , Christopher F. Bevis , Thanassis Trikas , Haiguang Chen , Ching Ling Meng
IPC分类号： B24B37/04 , B24B41/04 , B24B49/04 , B24B49/10 , B24B49/12 , B24D49/00
CPC分类号： B24B37/013 , B24B37/042 , B24B41/04 , B24B49/04 , B24B49/10 , B24B49/12
摘要： Methods and systems for generating a two-dimensional map of a characteristic at relative or absolute locations of measurement spots on a specimen during polishing are provided. One method includes scanning a specimen with a measurement device during polishing to generate output signals at measurement spots on the specimen. The method may also include determining a characteristic of polishing at the measurement spots from the output signals. In addition, the method may include determining relative or absolute locations of the measurement spots on the specimen. The method may further include generating a two-dimensional map of the characteristic at the relative or absolute locations of the measurement spots on the specimen. In some embodiments, the relative locations of the measurement spots may be determined from a representative scan path of the measurement device and an average spacing between starting points on individual scans.
摘要翻译：提供了用于在抛光期间在样本上的测量点的相对或绝对位置处产生特征的二维图的方法和系统。一种方法包括在抛光期间用测量装置扫描样品，以在样品上的测量点产生输出信号。该方法还可以包括从输出信号确定测量点处的抛光特性。此外，该方法可以包括确定样本上的测量点的相对或绝对位置。该方法还可以包括在样本上的测量点的相对或绝对位置处生成特征的二维图。在一些实施例中，测量点的相对位置可以从测量装置的代表性扫描路径和单个扫描上的起始点之间的平均间隔来确定。

33. 发明授权

US06926595B2 Oscillatory drive 有权
标题翻译：振荡驱动
公开(公告)号：US06926595B2
公开(公告)日：2005-08-09
申请号：US10427007
申请日：2003-04-30
申请人： Roland Pollak , Adam Felger
发明人： Roland Pollak , Adam Felger
IPC分类号： B24B23/04 , B24B41/04 , B24B47/10 , B24B7/00 , B24B9/00
CPC分类号： B24B23/04 , B24B41/04 , B24B47/10
摘要： An oscillatory drive comprising a rotating drive shaft is disclosed. The oscillatory drive is driven by an eccentric element that is coupled via a pivot element to a tool drive shaft arranged at an angle to the drive shaft for oscillatingly driving the tool drive shaft pivoting back and forth about its longitudinal axis. The eccentric element comprises a spherical outer ring which is guided within an at least partially cylindrical inner surface of the pivot element. By spring biasing the free end of the pivot element at both outer sides against the housing, efficiency is improved and vibrations are reduced.
摘要翻译：公开了一种包括旋转驱动轴的振荡驱动器。振荡驱动由偏心元件驱动，该偏心元件通过枢轴元件联接到与驱动轴成一定角度布置的工具驱动轴，用于使工具驱动轴围绕其纵向轴线来回摆动。偏心元件包括球形外圈，其在枢转元件的至少部分圆柱形的内表面内被引导。通过弹簧将枢转元件的两个外侧的自由端偏置抵靠壳体，效率得到改善并且减小了振动。

34. 发明申请

US20050107002A1 Spectacle lens edging machine 失效
标题翻译：眼镜镜边缘机
公开(公告)号：US20050107002A1
公开(公告)日：2005-05-19
申请号：US11020533
申请日：2004-12-23
申请人： Lutz Gottschald , Fritz Kotting , Joerg Luderich
发明人： Lutz Gottschald , Fritz Kotting , Joerg Luderich
IPC分类号： B24B9/14 , B24B41/04 , B24B49/00
CPC分类号： B24B9/146 , B24B41/04
摘要： The invention relates to a grinding machine for the edges of spectacles lenses, comprising at least one grindstone and one driven shaft for holding the spectacles lenses, said shaft being able to move radially and axially relatively to the grindstone. The inventive grinding machine comprises at least one operational support which is placed in such a way that it can rotate coaxially on a spindle designed for a shaft of the grinding machine or on at least one pivoting lever which is placed in a non-aligned position on a spindle designed for a shaft of the grinding machine, said operational support being free to pivot in the space between the grindstone and the shaft holding the spectacles glasses.
摘要翻译：本发明涉及一种用于眼镜镜片边缘的磨床，包括至少一个磨石和一个用于保持眼镜镜片的从动轴，所述轴能够相对于磨石径向和轴向移动。本发明的研磨机包括至少一个操作支撑件，其以这样的方式设置，使得其可以在设计用于研磨机的轴的主轴上或在至少一个枢转杆上同轴旋转，所述枢转杆以不对准的位置专为磨床的轴设计的主轴，所述操作支撑件可自由地在磨石与保持眼镜眼镜的轴之间的空间中枢转。

35. 发明申请

US20050095960A1 Polishing apparatus and method for producing semiconductors using the apparatus 有权
标题翻译：抛光装置及其制造方法
公开(公告)号：US20050095960A1
公开(公告)日：2005-05-05
申请号：US11004991
申请日：2004-12-07
申请人： Shigeo Moriyama , Yoshihiro Ishida , Takashi Kugaya , Shigeo Ootsuki , Soichi Katagiri , Sadayuki Nishimura , Ryosei Kawai , Kan Yasui
发明人： Shigeo Moriyama , Yoshihiro Ishida , Takashi Kugaya , Shigeo Ootsuki , Soichi Katagiri , Sadayuki Nishimura , Ryosei Kawai , Kan Yasui
IPC分类号： B24B37/04 , B24B41/04 , B24B53/12 , B24B49/00 , B24B1/00
CPC分类号： B24B53/017 , B24B37/042 , B24B41/04 , B24B53/12
摘要： The present invention relates to a polishing apparatus, and a semiconductor manufacturing method using the apparatus. Dressing of a grindstone surface is ground by sizing processing whereby dressing of a tool surface can be done while preventing occurrence of cracks on the grindstone surface which is the cause for occurrence of scratches. Further, flatness of the surface of a dressing tool can be guaranteed because of sizing cutting-in; even if a thick grindstone of a few centimeters is used, the flatness can be maintained to the end; and processing with less in-face unevenness can be always carried out. Therefore, the life of the dressing tool can be greatly extended. Further, the present sizing-dressing is carried out jointly with processing of a wafer to thereby enable improvement of throughput of the apparatus as well as maintenance of a processing rate. The present apparatus and method are effective for planarization of various substrate surfaces having irregularities.
摘要翻译：本发明涉及一种抛光装置以及使用该装置的半导体制造方法。磨石表面的磨合通过施胶处理进行研磨，由此可以进行工具表面的修整，同时防止在磨石表面产生裂纹，这是产生划痕的原因。此外，可以保证修整工具的表面的平整度，因为切割的尺寸大小; 即使使用了几厘米厚的砂轮，也可以保持平坦度，并且可以总是执行具有较少的面内不均匀性的处理。因此，修整工具的寿命可以大大延长。此外，与晶片的处理联合进行本施胶修整，从而能够提高装置的生产量以及维持处理速度。本装置和方法对于具有不规则性的各种衬底表面的平坦化是有效的。

36. 发明申请

US20050016350A1 Machining apparatus for forming cracking slot for connecting rod 审中-公开
标题翻译：用于形成连杆裂缝槽的加工装置
公开(公告)号：US20050016350A1
公开(公告)日：2005-01-27
申请号：US10890107
申请日：2004-07-14
申请人： Yasuo Momose , Sigeo Ota
发明人： Yasuo Momose , Sigeo Ota
IPC分类号： B23P15/00 , B24B19/02 , B24B41/04 , F16C7/02 , F16C9/04 , B26D3/06 , B23P17/00
CPC分类号： F16C9/045 , B23P15/00 , B23P2700/04 , B24B19/02 , B24B41/04 , Y10T29/49288 , Y10T83/0304
摘要： When a rotary drive source on a body is energized, a drive pulley is rotated, and the rotary drive power from the drive pulley is transmitted to a driven pulley by a drive power transmitting belt. A slotting mechanism integrally coupled to the driven pulley is rotated and inserted into a larger end hole defined in a connecting rod. A cutting plate of the slotting mechanism forms a first slot having a substantially rectangular concave cross section in the inner circumferential surface of the larger end hole and then a second slot having a substantially rectangular concave cross section in the inner circumferential surface of the larger end hole at a position facing the first slot across the axis of the connecting rod. The first and second slots have a symmetrical shape.
摘要翻译：当主体上的旋转驱动源被通电时，驱动滑轮旋转，并且来自驱动滑轮的旋转驱动力由驱动动力传递带传递到从动滑轮。一体地联接到从动带轮的开槽机构旋转并插入限定在连接杆中的较大端孔中。开槽机构的切割板在大端孔的内周面形成具有大致矩形的凹状截面的第一槽，在大端孔的内周面形成大致矩形的凹状截面的第二槽在面向连接杆的轴线的第一槽的位置处。第一和第二槽具有对称的形状。

37. 发明授权

US06783441B2 Apparatus and method for transferring a torque from a rotating hub frame to a one-piece hub shaft 失效
标题翻译：用于将扭矩从旋转轮毂框架转移到一体式轮毂轴的装置和方法
公开(公告)号：US06783441B2
公开(公告)日：2004-08-31
申请号：US09928057
申请日：2001-08-10
申请人： Yao Hsiang Liang , Wen-Ten Chan
发明人： Yao Hsiang Liang , Wen-Ten Chan
IPC分类号： B24B100
CPC分类号： B24B53/017 , B24B37/042 , B24B41/04
摘要： An apparatus and a method for transferring a rotational torque from a hub frame to a one-piece hub shaft onto which a pad conditioning disc is attached are described. The apparatus is a one-piece hub shaft for mounting into a hub-frame. To provide a great improvement over the conventional design wherein a hub spacer is mounted to a hub shaft by screw means, the present invention conditioning head is assembled together by frictionally engaging a key and a flat surface on the hub shaft to a slot opening on the hub frame such that any catastrophic failure due to a screw breakage can be avoided. The present invention novel frictional engagement further provides a more uniform torque transfer between the two components.
摘要翻译：描述了一种用于将旋转扭矩从轮毂框架转移到连接有垫片调节盘的单件轮毂轴的装置和方法。该装置是用于安装到轮毂架中的一体式轮毂轴。为了提供比通过螺钉装置将轮毂间隔件安装到轮毂轴的传统设计更大的改进，本发明的调节头通过将轮毂轴上的钥匙和平坦表面摩擦接合到所述轮毂轴上的槽口而组装在一起轮毂框架，从而可以避免由于螺钉破损而导致的任何灾难性故障。本发明的新颖的摩擦接合进一步提供了两个部件之间更均匀的转矩传递。

38. 发明授权

US06762535B2 Spindle structure in ultrasonic machine and supporting horn used in the same 有权
标题翻译：主轴结构在超声波机和支撑喇叭中使用相同
公开(公告)号：US06762535B2
公开(公告)日：2004-07-13
申请号：US10114706
申请日：2002-04-01
申请人： Yoshihiro Take , Masayoshi Kawanami
发明人： Yoshihiro Take , Masayoshi Kawanami
IPC分类号： B23B100
CPC分类号： B23B37/00 , B24B1/04 , B24B35/005 , B24B41/04
摘要： The present invention is to provide a spindle structure of an ultrasonic machine which can reduce the number of assembling steps, can improve working accuracy, and can reduce heat generation due to an ultrasonic wave leakage during the working process. The spindle structure comprises: an ultrasonic vibrator 4 housed in a main body sleeve 3b formed in a spindle main body 3 rotationally driven, and a supporting horn 6 connected to the ultrasonic vibrator 4, wherein the supporting horn 6 comprises a main body 6a, a base portion 6c formed in a brim shape on an outer peripheral face of the main body 6a, an elastic cylindrical damping sleeve 6d formed by extending an outer periphery of the base portion 6c in the axial direction, a loose flange 6e and a fixing flange 6f formed on both ends of the damping sleeve 6d, and a buffer groove 6g formed on an outer peripheral face of the base portion 6c, wherein the loose flange 6e of the supporting horn 6 is disposed on the side of the ultrasonic vibrator 4 in a state that it is slidable to and has contact with an inner peripheral face of the main body sleeve 3b, and the fixing flange 6f is mounted on the main body sleeve 3b in a state that it is restrained in the axial direction.
摘要翻译：本发明提供一种超声波机械的主轴结构，其可以减少组装步骤的数量，可以提高加工精度，并且可以在工作过程中减少由于超声波泄漏引起的发热。主轴结构包括：容纳在形成在主轴主体3中的主体套筒3b中的超声波振动器4，以及与超声波振动器4连接的支撑喇叭6，其中支撑喇叭6包括主体6a，在本体6a的外周面上形成为边缘形状的基部6c，沿轴向延伸基部6c的外周而形成的弹性圆筒形阻尼套筒6d，松动凸缘6e和固定凸缘6f 形成在缓冲套筒6d的两端上的缓冲槽6g和形成在基部6c的外周面上的缓冲槽6g，其中支撑喇叭6的松散凸缘6e处于超声波振动器4的一侧可滑动到主体套筒3b的内周面并且与主体套筒3b的内周面接触，并且固定凸缘6f以沿轴向被限制的状态安装在主体套筒3b上。

39. 发明授权

US06736710B2 Polisher for polishing end surface of semiconductor wafer 失效
标题翻译：用于抛光半导体晶片端面的抛光机
公开(公告)号：US06736710B2
公开(公告)日：2004-05-18
申请号：US10402226
申请日：2003-03-26
申请人： Kazunari Osawa , Izuru Morioka , Naotoshi Hosoya
发明人： Kazunari Osawa , Izuru Morioka , Naotoshi Hosoya
IPC分类号： B24B100
CPC分类号： B24B41/04 , B24B9/065 , B24B21/002 , B24B21/20 , H01L21/30625
摘要： A polishing head for polishing the end surface of a semiconductor wafer has a driver roller, a driving motor for rotating it, a pair of upper and lower follower rollers one above the other parallel to and horizontally separated from the driver roller and an endless polishing belt around these rollers. As the driving motor causes the polishing belt to run around the rollers, the semiconductor wafer is pushed against the polishing belt between the upper and lower follower rollers. A pair of upper and lower tension-controlling rollers are provided for controlling the tension in the polishing belt between the two follower rollers. At least one of these tension-controlling rollers is movable vertically. A polisher is formed with such a polishing head, a holder for holding and rotating the wafer and an attaching device for attaching the polishing head to the polisher.
摘要翻译：用于抛光半导体晶片的端面的抛光头具有驱动辊，用于旋转驱动辊的驱动电机，一对上下的从动辊，其一个上下平行于驱动辊并与驱动辊水平分离，并且环形抛光带围绕这些滚筒。随着驱动电机使抛光带绕辊滚动，半导体晶片被推到上和下从动辊之间的抛光带上。提供一对上下张力控制辊，用于控制两个从动辊之间的抛光带中的张力。这些张力控制辊中的至少一个可垂直移动。抛光机形成有这样的抛光头，用于保持和旋转晶片的保持器和用于将抛光头附接到抛光机的附接装置。

40. 发明授权

US06716095B1 Cordless surface dresser 失效
标题翻译：无绳表面修整器
公开(公告)号：US06716095B1
公开(公告)日：2004-04-06
申请号：US10338527
申请日：2003-01-08
申请人： Chih-Hua Hsu , Kun-Lin Li
发明人： Chih-Hua Hsu , Kun-Lin Li
IPC分类号： B24B2300
CPC分类号： B24B55/052 , B24B23/02 , B24B41/04 , B25F5/02
摘要： A surface dresser for removing contaminants includes a body assembly with a stationary seat and an adjustable assembly with a dressing wheel. The adjustable assembly is rotatably mounted on an outer periphery of the stationary seat. Two pairs of pin holes are defined in the stationary seat, and a flexible pin with two short ends is movably mounted in each pair of pin holes. A latch is slidably attached on the outer periphery of the stationary seat and has two clamping holes and two detents corresponding to two adjacent pin holes. When the adjustable assembly is rotated relative to the body assembly by a specific angle, the flexible pins selectively engage the clamping holes and the detents in the latch to lock the adjustable assembly. Consequently, the angle of the dressing wheel is adjustable to accommodate various requirements.
摘要翻译：用于去除污染物的表面修整器包括具有静止座椅的主体组件和具有修整轮的可调组件。可调组件可旋转地安装在固定座的外周上。在固定座中限定了两对针孔，并且具有两个短端的柔性销可移动地安装在每对针孔中。闩锁可滑动地附接在固定座的外周上，并且具有两个夹紧孔和对应于两个相邻销孔的两个棘爪。当可调节组件相对于主体组件旋转特定角度时，柔性销选择性地接合夹紧孔和闩锁中的棘爪以锁定可调组件。因此，修整轮的角度是可调节的以适应各种要求。

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