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    • 32. 发明申请
    • Antistatic Treatment Agent, and Antistatic Film, Coated Article and Pattern Forming Method Using the Agents
    • 抗静电处理剂,抗静电膜,使用该试剂的涂布制品和图案形成方法
    • US20070252111A1
    • 2007-11-01
    • US11663199
    • 2005-09-21
    • Takashi OhkuboYoshihiro Saida
    • Takashi OhkuboYoshihiro Saida
    • C09K3/16B32B27/18G03F7/11
    • C09K3/16C08G2261/312G03F7/093Y10T428/31855
    • The invention provides an antistatic treatment agent having an ability of preventing resist film thinning phenomenon in a chemically amplified resist, an antistatic film, a coated article and a pattern forming method using such antistatic treatment agent, in particular, the invention provides an antistatic treatment agent comprising an aqueous solvent-soluble electroconductive polymer, a diamine (divalent) or polyamine (polyvalent) aliphatic basic compound and an anionic surfactant, an antistatic film, a coated article and a pattern forming method using such antistatic treatment agent. As the aqueous solvent-soluble electroconductive polymer, a π-conjugated electroconductive polymer having a Brönsted acid group is a sulfonic acid group is preferred and it is preferable that the amount of the diamine (divalent) or polyamine (polyvalent) aliphatic basic compound be from 0.1 to 75 mol % based on the total number of moles of the basic compounds.
    • 本发明提供一种具有防止化学放大型抗蚀剂,抗静电膜,涂布制品和使用这种抗静电处理剂的图案形成方法中的抗蚀剂薄膜化现象的抗静电处理剂,特别是本发明提供一种抗静电处理剂 包含水性溶剂可溶性导电聚合物,二胺(二价)或多胺(多价)脂族碱性化合物和阴离子表面活性剂,抗静电膜,涂布制品和使用这种抗静电处理剂的图案形成方法。 作为水性溶剂可溶性导电性聚合物,优选具有布朗斯台德酸基的π-共轭导电性聚合物为磺酸基,优选二胺(二价)或多胺(多价)脂肪族碱性化合物的量为 相对于碱性化合物的总摩尔数为0.1〜75摩尔%。