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    • 32. 发明授权
    • Optical inspection system
    • 光学检测系统
    • US4532723A
    • 1985-08-06
    • US361992
    • 1982-03-25
    • Truman F. KellieJ. David LandryChing C. Lai
    • Truman F. KellieJ. David LandryChing C. Lai
    • G01B11/02G01B11/00G01B11/24G01B11/30G01N21/88G01N21/93G01N21/952G21C17/06G01N21/89G01B11/10
    • G21C17/06G01B11/00G01N21/952
    • An optical inspection system is disclosed which determines surface and other features of objects by illuminating them with a light beam having substantially uniform light intensity in space and time. The light beam is derived from a light source whose light intensity may vary in space and time. The surface features of each object are inspected by detecting light reflected from the object through a lens system which focuses the reflected light on an array of photosensitive elements. The output signals provided by the array may be used to provide a measure indicative of the conformance of the inspected surface to predetermined criteria. The inspection system is further capable of determining other features of the inspected object, such as the height of the object, by illuminating the object with a second light beam derived from a second light surface. A portion of the second light beam is eclipsed by the object and the non-eclipsed portions are directed to a second array of photosensitive elements to provide signals indicative of the desired dimension.
    • 公开了一种光学检查系统,其通过用在空间和时间上具有基本上均匀的光强度的光束照射物体来确定物体的表面和其它特征。 光束来自光源,其光强度可能在空间和时间上变化。 通过将反射光聚焦在感光元件阵列上的透镜系统检测从物体反射的光来检查每个物体的表面特征。 由阵列提供的输出信号可用于提供指示被检查表面与预定标准的一致性的度量。 检查系统还能够通过用来自第二光表面的第二光束照射物体来确定被检查物体的其它特征,例如物体的高度。 第二光束的一部分被物体覆盖,并且非遮蔽部分被引导到第二阵列的光敏元件以提供指示期望尺寸的信号。