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    • 33. 发明申请
    • Method and apparatus for reforming film and controlling slimming amount thereof
    • 用于改造薄膜并控制其减肥量的方法和装置
    • US20050214683A1
    • 2005-09-29
    • US11064088
    • 2005-02-24
    • Eiichi NishimuraTakashi TanakaGen YouMinoru HondaMitsuaki Iwashita
    • Eiichi NishimuraTakashi TanakaGen YouMinoru HondaMitsuaki Iwashita
    • G03F7/40A61N5/00G03C5/00G21G5/00H01L21/027
    • G03F7/40
    • In a film reforming method for reforming a film layer to be reformed by irradiating electron beams thereon, the electron beams are irradiated in a state where the film layer is cooled. Further, in a slimming amount controlling method for controlling a slimming amount of a resist film layer, the slimming amount thereof is controlled by the irradiation amount of electron beams irradiated thereon in a state where the resist film layer having a specified opening dimension is cooled. Furthermore, in a film reforming apparatus including a mounting unit for mounting thereon an object to be processed and an electron beam irradiating unit for irradiating electron beams on the object disposed on the mounting unit to thereby reform a film layer to be reformed, formed on an object, the electron beams are irradiated from the electron beam irradiating unit in a state where the film layer is cooled by a cooling unit provided in the mounting unit.
    • 在通过在其上照射电子束来重整薄膜层的薄膜重整方法中,在薄膜层被冷却的状态下照射电子束。 此外,在用于控制抗蚀剂膜层的减肥量的减肥量控制方法中,在具有指定的开口尺寸的抗蚀剂膜层被冷却的状态下,通过照射在其上的电子束的照射量来控制其减肥量。 此外,在包括用于在其上安装待处理物体的安装单元和用于在设置在安装单元上的物体上照射电子束的电子束照射单元的薄膜重整设备中,从而将形成在其上的膜层重新形成 在由设置在安装单元中的冷却单元冷却膜层的状态下,从电子束照射单元照射电子束。
    • 40. 发明授权
    • Error rate measuring apparatus
    • 误差率测量仪
    • US5652760A
    • 1997-07-29
    • US554790
    • 1995-11-07
    • Syugo YamashitaYoshikazu TomidaTerumasa TokumotoMinoru HondaToshihiro Kubo
    • Syugo YamashitaYoshikazu TomidaTerumasa TokumotoMinoru HondaToshihiro Kubo
    • H04N19/00H04B1/16H04L1/00H04L1/24H04N7/20H04N19/42H04N19/423H04N19/44H04N19/65H04N19/70H04N19/89H04N21/61H04N21/647G06F11/00
    • H04L1/24H04B1/16
    • An error rate measuring apparatus includes a demodulator, and data from the demodulator is applied to a decoding circuit in which an error bit number is evaluated for each of a BIC portion and a packet portion. In the BIC portion, if a synchronization is settled, the error bit number is evaluated by comparing received BICs and a predetermined BIC pattern, and if the synchronization is not settled, the error bit number is determined as eight (8) bits. In the packet portion, if a frame synchronization is settled and decoding is successful, the error bit number is calculated by comparing data before decoding and data after decoding with each other. If the frame synchronization is settled but the decoding is unsuccessful, a presumed error bit number is set according to the number of packets being decoded successfully in a first time horizontal direction, and if the frame synchronization is not settled, a predetermined error bit number is set. In each of the BIC portion and the packet portion, a bit error rate is calculated on the basis of the error bit number for each measurement range, and displayed on a monitor.
    • 错误率测量装置包括解调器,并且来自解调器的数据被应用于对BIC部分和分组部分中的每一个评估错误比特数的解码电路。 在BIC部分中,如果同步被确定,则通过比较所接收的BIC和预定的BIC模式来评估错误比特数,并且如果同步未被确定,则错误比特数被确定为八(8)比特。 在分组部分中,如果帧同步被确定并且解码成功,则通过比较解码之前的数据和解码之后的数据来计算错误比特数。 如果帧同步被确定但是解码不成功,则根据在第一时间水平方向成功解码的分组的数量来设置推定的错误比特数,并且如果帧同步未被确定,则预定的错误比特数是 组。 在每个BIC部分和分组部分中,基于每个测量范围的误差位数来计算误码率,并显示在监视器上。